[Scan]
initial_time=2015-12-18T20:38:09
final_time=2015-12-18T20:38:29
ip_count=19
run=1020
dataset=2
scan=152
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.82652E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-8.28099E-10
ql2_vset=
ql2_vmon=2.38419E-5
ql2_imon=1.40324E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.48458E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.57502E-8
mult1=-1.93705E-8
mult2=-2.56647E-9
rf_tmon=-5.52411E-3
rf_agc=3.25009E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.01757E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70154E0
bslens_imon=2.294E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.97916E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05044E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5416E1
cs_ef1b_imon=2.89719E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04651E1
cs_ea1_imon=2.41941E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.12974E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.97354E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03865E1
cs_ea2_imon=1.55801E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84294E1
cs_ef1a_imon=2.95221E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.40248E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11317E1
os_restr1_imon=4.30702E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15574E1
os_ea1_imon=2.31646E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.07758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25147E0
cs_ionrep_imon=1.21322E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93259E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02127E1
cs_anode1_imon=3.0323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=4.03769E-8
tplens_vset=1.4E-1
tplens_vmon=1.57842E0
tplens_imon=-2.21701E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.4749E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26331E1
iondef2_imon=1.57635E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98398E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.94761E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29577E0
ionrepsh_imon=1.83129E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33383E1
lens5b_imon=2.18319E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7437E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57717E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71189E1
cs_ef2a_imon=3.16778E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06641E0
os_ef2alow_imon=-2.58929E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.15721E-1
os_ef2bup_imon=-5.34008E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10986E1
os_restr2_imon=3.45858E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29516E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.26282E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72862E1
iondef1_imon=1.12787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.08428E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.38578E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=8.16622E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11767E0
cs_ionaccel_imon=-1.93808E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47155E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56043E1
einzel_imon=7.64667E-6
window_vset=0.0E0
window_vmon=1.72062E-1
window_imon=-1.10348E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86207E1
mask2_imon=-5.90748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=8.04792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.29217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.3591E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29942E0
defgridb_imon=6.26971E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33378E1
os_fil1_imon=9.43711E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06874E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65428E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=9.97436E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62428E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67012E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.09008E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58585E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35971E-1
cs_fil2_imon=-2.25706E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.49087E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.39424E-1
res40_imon=-2.57057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=227
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.475E3	2.0E0	1.47E2	4.1E1	-7.34782E-2	-8.79997E1	1.90735E-4	-8.80005E1	1.90735E-4	5.53131E-3	9.32932E-2	2.72967E1	-3.26585E1	-3.26488E1	2.68382E1	1.19182E-7	2.52066E-3	2.52066E-3	6.33592E-3	2.9863E-1
2.0E0	1.09244E5	9.3E1	3.16E2	1.6E2	-7.35556E-2	-8.79997E1	-1.90735E-4	-8.80007E1	-7.15256E-5	5.67436E-3	9.34362E-2	2.73007E1	-3.26491E1	-3.26566E1	2.68082E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9874E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.79997E1	-2.38419E-4	-8.80009E1	3.33786E-4	5.4121E-3	9.3174E-2	2.73128E1	-3.26726E1	-3.26095E1	2.6796E1	1.1929E-7	2.51952E-3	2.51952E-3	6.31879E-3	2.9944E-1
4.0E0	2.3181E4	1.3E1	6.55E2	3.98E2	-7.32464E-2	-8.79994E1	1.19209E-4	-8.80007E1	5.00679E-4	5.4121E-3	9.36508E-2	2.7308E1	-3.26744E1	-3.26378E1	2.6831E1	1.1929E-7	2.51709E-3	2.51709E-3	6.29684E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.79999E1	-3.33786E-4	-8.80008E1	1.90735E-4	5.53131E-3	9.33409E-2	2.72829E1	-3.26362E1	-3.26416E1	2.68406E1	1.1929E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.79998E1	4.76837E-5	-8.80006E1	-4.76837E-5	5.43594E-3	9.36508E-2	2.73321E1	-3.26729E1	-3.26398E1	2.68034E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.79998E1	2.6226E-4	-8.80005E1	-9.53674E-5	5.34058E-3	9.38177E-2	2.73051E1	-3.26524E1	-3.26212E1	2.68358E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.79999E1	3.33786E-4	-8.80005E1	-2.38419E-5	5.126E-3	9.37223E-2	2.73267E1	-3.26536E1	-3.25984E1	2.68118E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.01223E-1
1.2E1	1.21E2	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.79994E1	3.57628E-4	-8.80004E1	7.15256E-5	5.65052E-3	9.35793E-2	2.72558E1	-3.26458E1	-3.26452E1	2.68292E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99613E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.79994E1	1.19209E-4	-8.80005E1	3.33786E-4	5.34058E-3	9.37462E-2	2.73242E1	-3.26903E1	-3.26446E1	2.67937E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
1.4E1	4.141E3	3.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79995E1	2.6226E-4	-8.80003E1	3.09944E-4	5.19753E-3	9.39369E-2	2.73123E1	-3.26855E1	-3.26194E1	2.68256E1					
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79996E1	-4.76837E-5	-8.80006E1	2.38419E-4	5.50747E-3	9.38654E-2	2.73149E1	-3.26658E1	-3.2634E1	2.67882E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
1.6E1	7.23E2	1.0E0	6.47E2	4.41E2	-7.34782E-2	-8.79993E1	7.15256E-5	-8.80007E1	9.53674E-5	5.38826E-3	9.37223E-2	2.73045E1	-3.26508E1	-3.26419E1	2.6818E1	1.1929E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01475E-1
1.7E1	1.492E3	2.0E0	6.87E2	4.7E2	-7.33239E-2	-8.79996E1	1.43051E-4	-8.80004E1	7.15256E-5	5.05447E-3	9.36031E-2	2.72984E1	-3.26762E1	-3.26327E1	2.684E1	1.19239E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
1.8E1	6.151E3	5.0E0	7.27E2	5.0E2	-7.31692E-2	-8.79995E1	1.19209E-4	-8.80002E1	3.09944E-4	5.67436E-3	9.36031E-2	2.72986E1	-3.26655E1	-3.26402E1	2.68058E1	1.19238E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01871E-1
1.9E1	2.443E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.79997E1	2.14577E-4	-8.80006E1	2.14577E-4	5.76973E-3	9.36508E-2	2.73165E1	-3.26819E1	-3.26374E1	2.68334E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.0E1	2.4889E4	1.8E1	8.08E2	5.58E2	-7.30146E-2	-8.79993E1	1.19209E-4	-8.80004E1	1.90735E-4	5.72205E-3	9.39131E-2	2.72985E1	-3.2653E1	-3.2647E1	2.67938E1	1.1929E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99941E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.79995E1	3.8147E-4	-8.80004E1	2.14577E-4	5.65052E-3	9.36985E-2	2.72915E1	-3.26425E1	-3.2649E1	2.68238E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
2.2E1	1.776E3	1.0E0	8.89E2	6.17E2	-7.44831E-2	-8.79998E1	3.8147E-4	-8.80005E1	2.86102E-4	5.53131E-3	9.37462E-2	2.72985E1	-3.2638E1	-3.26266E1	2.68118E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.79998E1	2.38419E-5	-8.80003E1	5.96046E-4	5.48363E-3	9.36508E-2	2.72862E1	-3.26331E1	-3.26425E1	2.68082E1	1.1929E-7	2.52318E-3	2.52318E-3	6.28552E-3	3.00563E-1