[Scan]
initial_time=2015-12-18T20:39:03
final_time=2015-12-18T20:39:23
ip_count=19
run=1020
dataset=2
scan=154
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.78068E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-7.93135E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=1.39582E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.41895E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.57125E-8
mult1=-1.41352E-8
mult2=-2.95016E-9
rf_tmon=-5.0772E-3
rf_agc=3.26126E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=5.70774E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.90017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.40882E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98308E0
lens1_imon=1.34812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04273E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.95351E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.40059E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.28409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.32771E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.2026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93726E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=4.03803E-8
tplens_vset=1.4E-1
tplens_vmon=1.62882E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.4773E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=9.01973E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=1.81869E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57294E0
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.45806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.4126E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=8.1626E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.48735E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.29411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.19175E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.46126E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06861E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65436E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.97681E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66726E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71464E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22571E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.1924E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.80315E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.59E3	3.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79997E1	-1.90735E-4	-8.80001E1	2.14577E-4	5.36442E-3	9.36031E-2	2.73171E1	-3.26945E1	-3.26362E1	2.68154E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
2.0E0	1.09581E5	1.05E2	3.16E2	1.6E2	-7.31692E-2	-8.80001E1	-4.76837E-5	-8.80003E1	7.15256E-5	5.79357E-3	9.35078E-2	2.73213E1	-3.26759E1	-3.26206E1	2.68184E1	1.19238E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01609E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80001E1	-1.90735E-4	-8.80004E1	3.8147E-4	5.81741E-3	9.33647E-2	2.73104E1	-3.26673E1	-3.26372E1	2.68262E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
4.0E0	2.3148E4	2.3E1	6.55E2	3.98E2	-7.20871E-2	-8.8E1	0.0E0	-8.80006E1	0.0E0	5.67436E-3	9.34839E-2	2.73252E1	-3.26785E1	-3.26349E1	2.68292E1	1.1929E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80001E1	-7.15256E-5	-8.80005E1	1.90735E-4	5.55515E-3	9.3317E-2	2.73429E1	-3.26855E1	-3.26482E1	2.68286E1	1.1924E-7	2.51393E-3	2.51393E-3	6.29684E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80004E1	-3.57628E-4	-8.80002E1	-9.53674E-5	5.53131E-3	9.32693E-2	2.72817E1	-3.26699E1	-3.26404E1	2.68088E1	1.19237E-7	2.52027E-3	2.52027E-3	6.29067E-3	3.01742E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.79999E1	2.38419E-5	-8.80001E1	9.53674E-5	5.26905E-3	9.33886E-2	2.73003E1	-3.26458E1	-3.2635E1	2.68227E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.8E1	-2.86102E-4	-8.80001E1	1.19209E-4	5.50747E-3	9.36985E-2	2.73057E1	-3.26502E1	-3.26585E1	2.68124E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01738E-1
1.2E1	1.44E2	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.79998E1	-7.15256E-5	-8.80004E1	1.19209E-4	5.55515E-3	9.35078E-2	2.72577E1	-3.27208E1	-3.25973E1	2.68045E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.79998E1	-1.43051E-4	-8.80007E1	2.38419E-4	5.26905E-3	9.37223E-2	2.72762E1	-3.26738E1	-3.2639E1	2.67944E1	1.1929E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00144E-1
1.4E1	4.044E3	2.0E0	5.66E2	3.82E2	-7.29374E-2	-8.79996E1	-2.38419E-5	-8.80009E1	1.43051E-4	6.00815E-3	9.35555E-2	2.73069E1	-3.26621E1	-3.26621E1	2.67794E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
1.5E1	1.11E2	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.79995E1	2.38419E-4	-8.80006E1	1.90735E-4	5.96046E-3	9.3317E-2	2.73237E1	-3.26488E1	-3.26308E1	2.68028E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03449E-1
1.6E1	7.92E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.79996E1	-1.19209E-4	-8.80006E1	1.90735E-4	5.6982E-3	9.33409E-2	2.72967E1	-3.26777E1	-3.26266E1	2.68334E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02922E-1
1.7E1	1.502E3	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.79996E1	1.19209E-4	-8.80006E1	2.38419E-4	5.76973E-3	9.34839E-2	2.73033E1	-3.26867E1	-3.262E1	2.67932E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.04241E-1
1.8E1	6.1E3	0.0E0	7.27E2	5.0E2	-7.41738E-2	-8.79995E1	4.76837E-5	-8.80005E1	2.38419E-4	5.74589E-3	9.36985E-2	2.72973E1	-3.26735E1	-3.2614E1	2.68376E1	1.19238E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.02922E-1
1.9E1	2.392E3	3.0E0	7.68E2	5.29E2	-7.37874E-2	-8.79997E1	-7.15256E-5	-8.80007E1	1.19209E-4	5.67436E-3	9.35793E-2	2.73063E1	-3.26646E1	-3.26407E1	2.68262E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01871E-1
2.0E1	2.4484E4	1.2E1	8.08E2	5.58E2	-7.34782E-2	-8.79998E1	9.53674E-5	-8.80004E1	-9.53674E-5	5.84126E-3	9.3627E-2	2.73305E1	-3.26396E1	-3.2639E1	2.68047E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.79997E1	0.0E0	-8.80005E1	1.66893E-4	5.50747E-3	9.36747E-2	2.73086E1	-3.26776E1	-3.26335E1	2.68058E1	1.1929E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01223E-1
2.2E1	1.753E3	1.0E0	8.89E2	6.17E2	-7.30918E-2	-8.79994E1	-1.66893E-4	-8.80003E1	2.14577E-4	5.60284E-3	9.35793E-2	2.73004E1	-3.26585E1	-3.26166E1	2.68082E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.79994E1	-1.19209E-4	-8.80006E1	1.90735E-4	5.36442E-3	9.35078E-2	2.73231E1	-3.26897E1	-3.26374E1	2.68154E1	1.1924E-7	2.51393E-3	2.51393E-3	6.29684E-3	3.00097E-1