[Scan]
initial_time=2015-12-18T20:39:30
final_time=2015-12-18T20:39:50
ip_count=19
run=1020
dataset=2
scan=155
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.74338E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-7.72464E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=1.38035E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.36797E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.57584E-8
mult1=-1.79039E-8
mult2=-2.85634E-9
rf_tmon=-4.81885E-3
rf_agc=3.34477E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.82945E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19719E1
lens5a_imon=1.96036E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=2.89945E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.4117E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99569E0
lens1_imon=1.42743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04267E1
cs_ea2_imon=1.58112E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.94846E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.39975E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15354E1
os_ea1_imon=2.32843E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.2044E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.03568E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=4.05244E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-8.30488E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98613E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.47638E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.82409E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56272E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19048E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.44473E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73526E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.37374E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=8.18137E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47089E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.86009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.62074E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.20306E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.42805E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06704E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65561E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=9.96203E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63111E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67228E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.90604E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77292E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22658E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.94731E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.624E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.79996E1	3.09944E-4	-8.80002E1	0.0E0	5.43594E-3	9.35316E-2	2.73424E1	-3.26434E1	-3.26158E1	2.6828E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
2.0E0	1.0949E5	1.11E2	3.16E2	1.6E2	-7.25507E-2	-8.79993E1	9.53674E-5	-8.80003E1	0.0E0	5.76973E-3	9.35078E-2	2.73241E1	-3.26738E1	-3.26346E1	2.68174E1	1.19184E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.01209E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79999E1	0.0E0	-8.80004E1	-2.38419E-4	5.4121E-3	9.38177E-2	2.73219E1	-3.26498E1	-3.26671E1	2.67999E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
4.0E0	2.3279E4	2.2E1	6.55E2	3.98E2	-7.286E-2	-8.79997E1	2.38419E-4	-8.80005E1	2.38419E-4	5.24521E-3	9.36985E-2	2.72961E1	-3.2653E1	-3.26416E1	2.6798E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.79996E1	4.76837E-5	-8.80007E1	1.43051E-4	5.17368E-3	9.39131E-2	2.72949E1	-3.26591E1	-3.26356E1	2.6825E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.79996E1	4.76837E-5	-8.80003E1	2.38419E-4	5.96046E-3	9.35555E-2	2.73022E1	-3.26666E1	-3.26162E1	2.67934E1	1.19188E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.79994E1	7.15256E-5	-8.80006E1	2.38419E-4	5.6982E-3	9.3627E-2	2.73082E1	-3.26395E1	-3.26309E1	2.68223E1	1.1929E-7	2.52448E-3	2.52448E-3	6.31269E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.79999E1	1.19209E-4	-8.80004E1	7.15256E-5	5.4121E-3	9.36508E-2	2.73137E1	-3.26413E1	-3.26383E1	2.6807E1	1.19236E-7	2.51498E-3	2.51498E-3	6.30171E-3	3.02972E-1
1.2E1	1.26E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.79998E1	1.19209E-4	-8.80005E1	-7.15256E-5	5.45979E-3	9.34362E-2	2.73309E1	-3.26717E1	-3.2626E1	2.68058E1	1.19264E-7	2.51662E-3	2.51662E-3	6.31563E-3	3.00693E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.79999E1	2.38419E-5	-8.80002E1	4.76837E-5	5.67436E-3	9.34362E-2	2.73198E1	-3.26478E1	-3.26195E1	2.6804E1					
1.4E1	3.932E3	2.0E0	5.66E2	3.82E2	-7.33239E-2	-8.79999E1	7.15256E-5	-8.80004E1	1.66893E-4	5.22137E-3	9.33409E-2	2.73159E1	-3.26717E1	-3.26128E1	2.68376E1	1.19186E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
1.5E1	1.08E2	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.79998E1	2.38419E-5	-8.80007E1	2.14577E-4	5.45979E-3	9.36747E-2	2.72997E1	-3.26879E1	-3.26488E1	2.68226E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.6E1	7.51E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.79999E1	1.19209E-4	-8.80004E1	1.43051E-4	4.74453E-3	9.34601E-2	2.73003E1	-3.2632E1	-3.26374E1	2.68106E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
1.7E1	1.434E3	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.79998E1	-2.38419E-5	-8.80003E1	9.53674E-5	5.03063E-3	9.33409E-2	2.73171E1	-3.26639E1	-3.26326E1	2.68202E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00824E-1
1.8E1	5.901E3	5.0E0	7.27E2	5.0E2	-7.201E-2	-8.79997E1	-4.76837E-5	-8.80005E1	7.15256E-5	4.88758E-3	9.36031E-2	2.73082E1	-3.26548E1	-3.26327E1	2.68051E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.9E1	2.393E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79999E1	-3.33786E-4	-8.80006E1	2.38419E-5	5.38826E-3	9.38892E-2	2.73177E1	-3.26651E1	-3.26326E1	2.67932E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00676E-1
2.0E1	2.4936E4	1.2E1	8.08E2	5.58E2	-7.27828E-2	-8.8E1	-1.90735E-4	-8.80003E1	-1.90735E-4	5.19753E-3	9.36508E-2	2.73315E1	-3.26771E1	-3.26212E1	2.68196E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.79999E1	-2.38419E-4	-8.80003E1	7.15256E-5	5.34058E-3	9.3174E-2	2.73346E1	-3.2639E1	-3.26231E1	2.68111E1	1.1929E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.98819E-1
2.2E1	1.788E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80002E1	3.09944E-4	-8.80004E1	1.19209E-4	5.60284E-3	9.3317E-2	2.72898E1	-3.26714E1	-3.26301E1	2.6822E1	1.19239E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98665E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.8E1	1.43051E-4	-8.80003E1	-4.76837E-5	5.53131E-3	9.3627E-2	2.73526E1	-3.26609E1	-3.26134E1	2.6807E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1