[Scan]
initial_time=2015-12-18T20:39:57
final_time=2015-12-18T20:40:17
ip_count=19
run=1020
dataset=2
scan=156
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.83642E-6
ql1_vset=
ql1_vmon=-8.79994E1
ql1_imon=-7.79021E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=1.43846E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.34478E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.57071E-8
mult1=-1.65554E-8
mult2=-2.50503E-9
rf_tmon=-5.61194E-3
rf_agc=3.27508E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.35882E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54055E1
cs_ef1b_imon=2.89425E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=2.43142E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01531E0
lens1_imon=1.72565E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64852E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.53913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.94464E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.40539E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.29373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14946E1
os_ea1_imon=2.31745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.21598E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=3.0409E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=4.03811E-8
tplens_vset=1.4E-1
tplens_vmon=1.58362E0
tplens_imon=-4.617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26753E1
iondef3_imon=1.47117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.59187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.74722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.8329E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.12501E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5907E0
os_ea2_imon=-8.72271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.61976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28508E-1
os_ef2bup_imon=-5.41386E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.45272E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.26662E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72901E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68324E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.35524E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.17858E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-1.94904E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47164E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.72259E-6
window_vset=0.0E0
window_vmon=1.72508E-1
window_imon=-9.96817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39101E-4
mask2_vset=0.0E0
mask2_vmon=-1.86147E1
mask2_imon=-7.67451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.6754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.21882E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.73923E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.43619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06478E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65926E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.96877E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62505E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91401E-2
os_fil2_imon=-2.75027E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55723E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27553E-1
res40_imon=-2.53983E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=136
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.546E3	4.0E0	1.47E2	4.1E1	-7.30918E-2	-8.79998E1	1.90735E-4	-8.80007E1	-2.14577E-4	5.60284E-3	9.35316E-2	2.7351E1	-3.26768E1	-3.26982E1	2.68163E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
2.0E0	1.09595E5	9.3E1	3.16E2	1.6E2	-7.3401E-2	-8.79998E1	4.52995E-4	-8.80002E1	-9.53674E-5	5.50747E-3	9.35316E-2	2.73187E1	-3.26767E1	-3.26231E1	2.68286E1	1.1929E-7	2.5225E-3	2.5225E-3	6.33538E-3	2.99613E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79997E1	2.6226E-4	-8.80002E1	-7.15256E-5	5.43594E-3	9.36985E-2	2.73085E1	-3.26511E1	-3.26431E1	2.68026E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
4.0E0	2.3181E4	1.5E1	6.55E2	3.98E2	-7.45602E-2	-8.79998E1	2.6226E-4	-8.80004E1	-3.09944E-4	5.57899E-3	9.35555E-2	2.73117E1	-3.27113E1	-3.25894E1	2.68268E1	1.1929E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.03383E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.79999E1	-1.19209E-4	-8.80007E1	2.38419E-5	5.62668E-3	9.36031E-2	2.72865E1	-3.26597E1	-3.26122E1	2.68028E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.79996E1	-7.15256E-5	-8.80004E1	-4.76837E-5	5.43594E-3	9.3317E-2	2.73123E1	-3.26753E1	-3.26164E1	2.68058E1	1.1929E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.79998E1	-4.76837E-5	-8.80006E1	0.0E0	5.45979E-3	9.34601E-2	2.73375E1	-3.26675E1	-3.26344E1	2.68112E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.79999E1	0.0E0	-8.80007E1	2.38419E-4	5.24521E-3	9.35316E-2	2.73105E1	-3.26879E1	-3.26134E1	2.681E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.2E1	1.46E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.79997E1	3.33786E-4	-8.80005E1	9.53674E-5	5.55515E-3	9.36747E-2	2.72856E1	-3.26832E1	-3.26349E1	2.68058E1	1.19238E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.03449E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.79996E1	-4.76837E-5	-8.80005E1	-1.19209E-4	5.55515E-3	9.34124E-2	2.73424E1	-3.26176E1	-3.26248E1	2.68226E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02396E-1
1.4E1	4.007E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.79999E1	2.14577E-4	-8.80003E1	-2.38419E-5	5.50747E-3	9.35078E-2	2.73249E1	-3.26434E1	-3.26338E1	2.68364E1	1.19188E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.79999E1	2.38419E-5	-8.80005E1	2.38419E-5	5.84126E-3	9.34839E-2	2.72949E1	-3.26837E1	-3.26122E1	2.67992E1	1.19237E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99348E-1
1.6E1	7.51E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79997E1	1.19209E-4	-8.80005E1	9.53674E-5	5.74589E-3	9.3627E-2	2.7302E1	-3.27209E1	-3.26309E1	2.68172E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02659E-1
1.7E1	1.429E3	1.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80001E1	1.90735E-4	-8.80002E1	-2.38419E-5	5.55515E-3	9.36031E-2	2.73291E1	-3.26825E1	-3.26086E1	2.68346E1	1.19186E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02396E-1
1.8E1	5.975E3	3.0E0	7.27E2	5.0E2	-7.30146E-2	-8.79998E1	9.53674E-5	-8.80004E1	-9.53674E-5	5.62668E-3	9.35316E-2	2.72892E1	-3.26624E1	-3.26049E1	2.68117E1	1.19264E-7	2.51739E-3	2.51739E-3	6.32087E-3	3.00966E-1
1.9E1	2.467E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.79997E1	-4.76837E-5	-8.80004E1	-9.53674E-5	5.53131E-3	9.34124E-2	2.73126E1	-3.26641E1	-3.26522E1	2.68082E1					
2.0E1	2.5023E4	1.0E1	8.08E2	5.58E2	-7.37874E-2	-8.79999E1	1.19209E-4	-8.80002E1	-2.38419E-5	5.62668E-3	9.3627E-2	2.7275E1	-3.26874E1	-3.26107E1	2.68128E1	1.1929E-7	2.51611E-3	2.51611E-3	6.34164E-3	3.00522E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.79996E1	-1.90735E-4	-8.80004E1	-1.43051E-4	5.79357E-3	9.34839E-2	2.73267E1	-3.26759E1	-3.26242E1	2.68094E1	1.1929E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.02368E-1
2.2E1	1.693E3	2.0E0	8.89E2	6.17E2	-7.29374E-2	-8.79994E1	-4.76837E-5	-8.80002E1	9.53674E-5	5.48363E-3	9.34601E-2	2.72939E1	-3.26944E1	-3.26148E1	2.6825E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02922E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.79994E1	9.53674E-5	-8.80002E1	-7.15256E-5	5.48363E-3	9.34601E-2	2.72901E1	-3.26404E1	-3.26753E1	2.68324E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1