[Scan]
initial_time=2015-12-18T20:41:45
final_time=2015-12-18T20:42:04
ip_count=19
run=1020
dataset=2
scan=160
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.51013E-2
qbias_imon=-3.85674E-6
ql1_vset=
ql1_vmon=-8.79996E1
ql1_imon=-7.57623E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.3955E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.21879E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.57207E-8
mult1=-2.00351E-8
mult2=-2.61082E-9
rf_tmon=-3.95366E-3
rf_agc=3.41507E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.63467E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63674E0
bslens_imon=2.37823E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20071E1
lens5a_imon=1.99226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05076E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=2.87819E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.01992E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04884E1
cs_ea1_imon=2.42888E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0435E0
lens1_imon=1.38056E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0391E1
cs_ea2_imon=1.54349E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.95279E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.40048E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14964E1
os_ea1_imon=2.3371E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25673E0
cs_ionrep_imon=1.22368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93274E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.02919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=4.04637E-8
tplens_vset=1.4E-1
tplens_vmon=1.61073E0
tplens_imon=-4.13159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.49864E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.57581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98311E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.03332E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26716E0
ionrepsh_imon=1.82853E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33779E1
lens5b_imon=2.19979E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74988E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50354E0
os_ea2_imon=-7.43399E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.0024E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.77087E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07034E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.44761E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30519E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72648E1
iondef1_imon=1.06551E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.40253E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=8.18071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.46439E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.4813E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.4002E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.85559E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53121E0
defgridb_imon=6.16034E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.43946E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07581E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65525E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30844E1
cs_fil1_imon=9.95963E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62888E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67439E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93414E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82698E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78204E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.73805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8452E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.57E3	2.0E0	1.47E2	4.1E1	-7.41738E-2	-8.79993E1	-1.66893E-4	-8.80005E1	-2.38419E-5	5.07832E-3	9.35316E-2	2.7311E1	-3.26679E1	-3.26296E1	2.67995E1	1.19239E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1
2.0E0	1.09274E5	1.01E2	3.16E2	1.6E2	-7.31692E-2	-8.79996E1	-2.86102E-4	-8.80007E1	1.19209E-4	4.76837E-3	9.34362E-2	2.73039E1	-3.2645E1	-3.26493E1	2.68274E1	1.1919E-7	2.50972E-3	2.50972E-3	6.29684E-3	3.00097E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.79997E1	-9.53674E-5	-8.80004E1	9.53674E-5	5.29289E-3	9.35078E-2	2.73051E1	-3.26703E1	-3.26278E1	2.67926E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01475E-1
4.0E0	2.3804E4	1.7E1	6.55E2	3.98E2	-7.40967E-2	-8.79998E1	-2.86102E-4	-8.80005E1	-1.19209E-4	4.95911E-3	9.32932E-2	2.73141E1	-3.265E1	-3.26194E1	2.68322E1	1.19264E-7	2.51918E-3	2.51918E-3	6.31555E-3	2.99475E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79999E1	-1.66893E-4	-8.80006E1	-2.38419E-5	5.00679E-3	9.30786E-2	2.73147E1	-3.26615E1	-3.26122E1	2.68082E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.79999E1	-2.14577E-4	-8.80004E1	3.57628E-4	5.19753E-3	9.3174E-2	2.73269E1	-3.26738E1	-3.26095E1	2.6813E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.39421E-2	-8.79999E1	-2.6226E-4	-8.80005E1	1.90735E-4	5.00679E-3	9.34362E-2	2.72922E1	-3.26574E1	-3.26214E1	2.68178E1	1.19239E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.79999E1	-9.53674E-5	-8.80008E1	9.53674E-5	5.07832E-3	9.31978E-2	2.735E1	-3.26578E1	-3.26295E1	2.68399E1	1.1929E-7	2.51147E-3	2.51147E-3	6.3074E-3	2.99929E-1
1.2E1	1.39E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80001E1	-3.33786E-4	-8.80006E1	2.38419E-4	5.45979E-3	9.32932E-2	2.72588E1	-3.26765E1	-3.26278E1	2.68233E1	1.19262E-7	2.51308E-3	2.51308E-3	6.32501E-3	3.00979E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80001E1	-1.90735E-4	-8.80006E1	9.53674E-5	5.26905E-3	9.34601E-2	2.72781E1	-3.26621E1	-3.26398E1	2.68063E1					
1.4E1	4.033E3	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80002E1	-3.33786E-4	-8.80007E1	1.43051E-4	5.29289E-3	9.34601E-2	2.72788E1	-3.26634E1	-3.26205E1	2.68238E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80003E1	-9.53674E-5	-8.80007E1	1.90735E-4	5.26905E-3	9.36985E-2	2.73299E1	-3.26679E1	-3.26354E1	2.68022E1	1.19132E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.0041E-1
1.6E1	7.35E2	1.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80001E1	3.57628E-4	-8.80004E1	3.33786E-4	5.43594E-3	9.3317E-2	2.72859E1	-3.26885E1	-3.26188E1	2.6834E1	1.19238E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.99E-1
1.7E1	1.449E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.8E1	2.38419E-4	-8.80006E1	1.66893E-4	5.43594E-3	9.34362E-2	2.73231E1	-3.26494E1	-3.26218E1	2.68036E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
1.8E1	6.129E3	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.79997E1	-9.53674E-5	-8.80007E1	1.19209E-4	5.34058E-3	9.35078E-2	2.73111E1	-3.26633E1	-3.26272E1	2.68172E1	1.19186E-7	2.51716E-3	2.51716E-3	6.31563E-3	3.00954E-1
1.9E1	2.345E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.79996E1	-9.53674E-5	-8.80006E1	2.86102E-4	5.4121E-3	9.34601E-2	2.72841E1	-3.26951E1	-3.26152E1	2.67892E1					
2.0E1	2.4666E4	1.3E1	8.08E2	5.58E2	-7.40192E-2	-8.79997E1	-9.53674E-5	-8.80001E1	3.57628E-4	5.19753E-3	9.32217E-2	2.73045E1	-3.26526E1	-3.26331E1	2.68035E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.9952E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.79998E1	-4.76837E-5	-8.80002E1	7.15256E-5	5.07832E-3	9.31263E-2	2.72803E1	-3.26508E1	-3.26154E1	2.67577E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.02253E-1
2.2E1	1.813E3	2.0E0	8.89E2	6.17E2	-7.44059E-2	-8.79998E1	-2.14577E-4	-8.80002E1	2.14577E-4	4.8399E-3	9.29832E-2	2.72955E1	-3.27089E1	-3.2611E1	2.67932E1	1.1929E-7	2.50775E-3	2.50775E-3	6.31278E-3	3.00197E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.51013E-2	-8.79996E1	-7.15256E-5	-8.79998E1	-7.15256E-5	5.26905E-3	9.3317E-2	2.72648E1	-3.26879E1	-3.26074E1	2.68256E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00302E-1