[Scan]
initial_time=2015-12-18T20:42:11
final_time=2015-12-18T20:42:31
ip_count=19
run=1020
dataset=2
scan=161
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.85069E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.64716E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.41755E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.19212E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.57017E-8
mult1=-1.48095E-8
mult2=-2.73658E-9
rf_tmon=-4.44033E-3
rf_agc=3.43009E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=5.72252E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.41158E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20301E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=2.91639E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04679E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04435E1
cs_ea1_imon=2.41567E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04556E0
lens1_imon=1.57883E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03877E1
cs_ea2_imon=1.54615E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.95927E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.39974E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.29346E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.34717E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.21125E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93672E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.0364E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.04012E-8
tplens_vset=1.4E-1
tplens_vmon=1.58015E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.50145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.57643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=9.13477E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=1.81003E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3394E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56873E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08759E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31061E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.4505E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.39093E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=8.18717E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.52566E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=6.92138E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.47502E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6581E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=9.9672E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6212E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67156E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.84155E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.72603E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22517E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64698E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.583E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.8E1	-1.43051E-4	-8.80001E1	1.43051E-4	5.17368E-3	9.35316E-2	2.72901E1	-3.26855E1	-3.26428E1	2.68226E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
2.0E0	1.09046E5	1.07E2	3.16E2	1.6E2	-7.37103E-2	-8.8E1	2.38419E-5	-8.8E1	7.15256E-5	5.10216E-3	9.3627E-2	2.73051E1	-3.26693E1	-3.26428E1	2.68022E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0071E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80003E1	-3.8147E-4	-8.8E1	1.43051E-4	5.05447E-3	9.35793E-2	2.72974E1	-3.2695E1	-3.26077E1	2.68099E1	1.1929E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00563E-1
4.0E0	2.3014E4	9.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80001E1	-1.43051E-4	-8.80003E1	-2.38419E-5	5.65052E-3	9.34362E-2	2.73252E1	-3.26608E1	-3.26502E1	2.68094E1	1.1929E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80003E1	-1.19209E-4	-8.80005E1	0.0E0	5.43594E-3	9.37223E-2	2.73117E1	-3.26717E1	-3.26236E1	2.68041E1	1.19239E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.79999E1	-7.15256E-5	-8.80004E1	-7.15256E-5	5.34058E-3	9.3627E-2	2.73369E1	-3.26693E1	-3.26068E1	2.67995E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80002E1	1.66893E-4	-8.80005E1	-2.14577E-4	5.36442E-3	9.33409E-2	2.73529E1	-3.26561E1	-3.26608E1	2.67914E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80003E1	3.33786E-4	-8.80004E1	2.14577E-4	5.50747E-3	9.38892E-2	2.72931E1	-3.26735E1	-3.26032E1	2.67998E1	1.19238E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
1.2E1	1.33E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80002E1	1.66893E-4	-8.80007E1	9.53674E-5	5.22137E-3	9.3317E-2	2.72751E1	-3.26549E1	-3.26062E1	2.68112E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00197E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.8E1	-1.19209E-4	-8.80006E1	7.15256E-5	5.36442E-3	9.36985E-2	2.7321E1	-3.2659E1	-3.26278E1	2.67914E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
1.4E1	3.903E3	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80002E1	-7.15256E-5	-8.80007E1	0.0E0	5.22137E-3	9.33886E-2	2.72907E1	-3.26735E1	-3.2632E1	2.68118E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
1.5E1	1.06E2	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80002E1	0.0E0	-8.80007E1	9.53674E-5	5.17368E-3	9.38416E-2	2.72997E1	-3.265E1	-3.26284E1	2.68166E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00563E-1
1.6E1	7.55E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80002E1	4.76837E-5	-8.80007E1	-9.53674E-5	5.17368E-3	9.35793E-2	2.72936E1	-3.26852E1	-3.26244E1	2.68086E1	1.1929E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.00041E-1
1.7E1	1.401E3	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.79998E1	-4.76837E-5	-8.80004E1	2.38419E-4	5.19753E-3	9.34124E-2	2.72732E1	-3.26608E1	-3.26484E1	2.67848E1	1.1929E-7	2.51442E-3	2.51442E-3	6.3149E-3	3.00269E-1
1.8E1	5.997E3	6.0E0	7.27E2	5.0E2	-7.35556E-2	-8.79998E1	-3.09944E-4	-8.80005E1	-4.76837E-5	5.126E-3	9.33886E-2	2.73175E1	-3.26785E1	-3.26313E1	2.68117E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
1.9E1	2.449E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8E1	-3.8147E-4	-8.80006E1	7.15256E-5	5.26905E-3	9.34362E-2	2.72997E1	-3.26488E1	-3.26164E1	2.68112E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02511E-1
2.0E1	2.491E4	1.6E1	8.08E2	5.58E2	-7.21643E-2	-8.8E1	-4.76837E-5	-8.80006E1	4.76837E-5	5.126E-3	9.35793E-2	2.73281E1	-3.2659E1	-3.26036E1	2.6807E1	1.1929E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.01085E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80002E1	-1.43051E-4	-8.80006E1	4.76837E-5	5.29289E-3	9.35316E-2	2.73204E1	-3.26649E1	-3.26172E1	2.68215E1	1.1929E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00197E-1
2.2E1	1.739E3	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80003E1	-1.90735E-4	-8.80006E1	1.90735E-4	5.55515E-3	9.38654E-2	2.73105E1	-3.26554E1	-3.26302E1	2.67896E1	1.1929E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99686E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80005E1	-3.09944E-4	-8.80005E1	-2.38419E-5	5.29289E-3	9.35555E-2	2.72883E1	-3.26506E1	-3.26188E1	2.68136E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1