[Scan]
initial_time=2015-12-18T20:42:38
final_time=2015-12-18T20:42:58
ip_count=19
run=1020
dataset=2
scan=162
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.86415E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.20358E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.4037E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.16913E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.57065E-8
mult1=-2.33189E-8
mult2=-2.87416E-9
rf_tmon=-4.69234E-3
rf_agc=3.33917E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.55515E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6671E0
bslens_imon=2.86004E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19402E1
lens5a_imon=1.9582E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.04956E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53464E1
cs_ef1b_imon=2.87801E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02109E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=2.42462E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0093E0
lens1_imon=1.55966E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64699E1
os_ef1alow_imon=2.96987E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04067E1
cs_ea2_imon=1.52681E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84602E1
cs_ef1a_imon=2.95858E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.40319E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11357E1
os_restr1_imon=4.28196E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15202E1
os_ea1_imon=2.38335E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.07963E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18848E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93358E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01776E1
cs_anode1_imon=3.04343E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=4.0425E-8
tplens_vset=1.4E-1
tplens_vmon=1.55383E0
tplens_imon=-2.46858E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26608E1
iondef3_imon=1.49645E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26396E1
iondef2_imon=1.58483E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.20243E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29687E0
ionrepsh_imon=1.83166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34417E1
lens5b_imon=2.1661E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74624E1
cs_ef2b_imon=3.10376E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53891E0
os_ea2_imon=-7.52993E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00557E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71251E1
cs_ef2a_imon=3.17577E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07337E0
os_ef2alow_imon=-2.68899E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34184E-1
os_ef2bup_imon=-5.36299E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11007E1
os_restr2_imon=3.45018E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29734E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.2642E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72791E1
iondef1_imon=1.06312E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.44807E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=8.18276E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14117E0
cs_ionaccel_imon=-1.92221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47203E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.56329E-6
window_vset=0.0E0
window_vmon=1.89328E-1
window_imon=-1.11651E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86292E1
mask2_imon=-5.91047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=6.65994E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.65216E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=6.86629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36776E0
defgridb_imon=5.93967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=9.42783E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08289E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65835E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=9.96679E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62086E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67055E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82917E-2
os_fil2_imon=-2.65227E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.36461E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38461E-1
cs_fil2_imon=-2.17871E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06486E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22493E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.50953E-1
res40_imon=-2.54497E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.553E3	2.0E0	1.47E2	4.1E1	-7.49466E-2	-8.80001E1	-2.86102E-4	-8.80002E1	1.66893E-4	5.38826E-3	9.3317E-2	2.73246E1	-3.26555E1	-3.26449E1	2.68117E1	1.1929E-7	2.51557E-3	2.51557E-3	6.3074E-3	3.01326E-1
2.0E0	1.09145E5	7.7E1	3.16E2	1.6E2	-7.53334E-2	-8.8E1	-5.24521E-4	-8.80003E1	1.19209E-4	5.22137E-3	9.34839E-2	2.73339E1	-3.27129E1	-3.2604E1	2.68007E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0071E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.8E1	-3.8147E-4	-8.80004E1	1.66893E-4	5.126E-3	9.34839E-2	2.73393E1	-3.26799E1	-3.26324E1	2.68186E1	1.1929E-7	2.51952E-3	2.51952E-3	6.33592E-3	3.00251E-1
4.0E0	2.3537E4	1.4E1	6.55E2	3.98E2	-7.47149E-2	-8.80004E1	-2.38419E-4	-8.80001E1	9.53674E-5	5.03063E-3	9.33886E-2	2.72962E1	-3.26602E1	-3.26585E1	2.68052E1	1.19241E-7	2.52301E-3	2.52301E-3	6.3074E-3	3.00247E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.54877E-2	-8.80003E1	-1.90735E-4	-8.80004E1	-1.19209E-4	5.05447E-3	9.36508E-2	2.73117E1	-3.26783E1	-3.26524E1	2.6813E1	1.19264E-7	2.51593E-3	2.51593E-3	6.31012E-3	3.00378E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.52559E-2	-8.80004E1	7.15256E-5	-8.80005E1	-7.15256E-5	5.07832E-3	9.34362E-2	2.72805E1	-3.26536E1	-3.26206E1	2.68064E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80003E1	1.66893E-4	-8.80003E1	-2.14577E-4	5.34058E-3	9.34601E-2	2.73472E1	-3.27011E1	-3.26152E1	2.67684E1	1.19238E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	2.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80003E1	-1.43051E-4	-8.80006E1	-1.19209E-4	5.24521E-3	9.34839E-2	2.72745E1	-3.26386E1	-3.26056E1	2.68526E1	1.19238E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.97704E-1
1.2E1	1.59E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80001E1	-2.6226E-4	-8.80003E1	4.76837E-5	5.19753E-3	9.31263E-2	2.72859E1	-3.26747E1	-3.26158E1	2.6807E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80002E1	-2.14577E-4	-8.80003E1	1.66893E-4	5.26905E-3	9.34124E-2	2.73219E1	-3.26579E1	-3.26663E1	2.68094E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01871E-1
1.4E1	4.018E3	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80004E1	-2.6226E-4	-8.80002E1	2.6226E-4	5.36442E-3	9.36031E-2	2.72992E1	-3.26573E1	-3.26443E1	2.67674E1	1.19238E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
1.5E1	1.22E2	0.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80004E1	-3.57628E-4	-8.80006E1	7.15256E-5	5.14984E-3	9.3627E-2	2.73186E1	-3.26548E1	-3.26444E1	2.6804E1	1.19188E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
1.6E1	7.41E2	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80003E1	-2.38419E-5	-8.80007E1	1.43051E-4	5.126E-3	9.36031E-2	2.73163E1	-3.26832E1	-3.26425E1	2.68268E1	1.1929E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.9829E-1
1.7E1	1.465E3	1.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80004E1	-1.90735E-4	-8.80004E1	2.38419E-4	5.24521E-3	9.37223E-2	2.73265E1	-3.26811E1	-3.26536E1	2.68256E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
1.8E1	5.917E3	2.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80004E1	-1.66893E-4	-8.80003E1	1.43051E-4	5.4121E-3	9.35316E-2	2.73279E1	-3.26675E1	-3.26158E1	2.68034E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
1.9E1	2.421E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80005E1	2.38419E-5	-8.80003E1	2.38419E-4	5.34058E-3	9.35316E-2	2.72626E1	-3.2662E1	-3.26703E1	2.67938E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02133E-1
2.0E1	2.5066E4	1.2E1	8.08E2	5.58E2	-7.27053E-2	-8.80003E1	-9.53674E-5	-8.80003E1	-1.19209E-4	5.43594E-3	9.36747E-2	2.73039E1	-3.2638E1	-3.2632E1	2.6783E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00453E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80005E1	-4.76837E-5	-8.80004E1	7.15256E-5	5.55515E-3	9.3317E-2	2.72998E1	-3.2685E1	-3.26437E1	2.68082E1	1.19186E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
2.2E1	1.869E3	1.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80003E1	2.38419E-5	-8.80005E1	-1.90735E-4	5.57899E-3	9.36985E-2	2.72997E1	-3.26627E1	-3.26579E1	2.68088E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.01738E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80004E1	-4.76837E-5	-8.80004E1	-1.19209E-4	5.26905E-3	9.36747E-2	2.72791E1	-3.26396E1	-3.26608E1	2.68322E1	1.19238E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02659E-1