[Scan]
initial_time=2015-12-18T20:43:59
final_time=2015-12-18T20:44:18
ip_count=19
run=1020
dataset=2
scan=165
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.80304E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.77841E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.44067E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.2181E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.57211E-8
mult1=-1.30877E-8
mult2=-2.77849E-9
rf_tmon=-4.88494E-3
rf_agc=3.27388E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=5.6479E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69438E0
bslens_imon=2.77928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20211E1
lens5a_imon=1.97406E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52541E1
cs_ef1b_imon=2.85836E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.4272E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0726E0
lens1_imon=1.6293E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.53173E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.40642E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.28842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.3378E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=1.20548E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=3.02919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=4.04855E-8
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.4773E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=9.07826E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.83058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49904E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.45698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.2827E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.39922E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=8.16769E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.42607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24818E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.42432E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65672E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30878E1
cs_fil1_imon=9.97002E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.78996E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77265E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2251E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.02545E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51248E-3
foreline_cvt_pmon=2.51248E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.40671E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.602E3	3.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80001E1	-2.38419E-4	-8.80002E1	2.86102E-4	4.93526E-3	9.34362E-2	2.73092E1	-3.26773E1	-3.26396E1	2.68157E1	1.19237E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.01209E-1
2.0E0	1.08633E5	9.6E1	3.16E2	1.6E2	-7.18554E-2	-8.8E1	-2.86102E-4	-8.80005E1	3.57628E-4	5.07832E-3	9.32693E-2	2.73153E1	-3.26825E1	-3.2617E1	2.68188E1	1.1929E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80001E1	-4.52995E-4	-8.80004E1	0.0E0	4.79221E-3	9.33647E-2	2.7298E1	-3.26667E1	-3.26095E1	2.68366E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
4.0E0	2.3047E4	1.6E1	6.55E2	3.98E2	-7.30146E-2	-8.80001E1	-4.76837E-4	-8.80004E1	1.66893E-4	5.00679E-3	9.3627E-2	2.73149E1	-3.26529E1	-3.26009E1	2.67938E1	1.1929E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80002E1	-6.67572E-4	-8.80004E1	2.38419E-5	5.00679E-3	9.37462E-2	2.73281E1	-3.26691E1	-3.26272E1	2.68118E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.00144E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80004E1	-1.19209E-4	-8.80003E1	-1.66893E-4	4.81606E-3	9.36031E-2	2.72853E1	-3.26813E1	-3.25894E1	2.6828E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03027E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80003E1	1.43051E-4	-8.80006E1	1.19209E-4	5.10216E-3	9.34839E-2	2.72721E1	-3.26651E1	-3.2641E1	2.68106E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.79998E1	0.0E0	-8.80008E1	1.43051E-4	5.07832E-3	9.35555E-2	2.73039E1	-3.26398E1	-3.26236E1	2.67848E1	1.19237E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.00676E-1
1.2E1	1.33E2	2.0E0	4.85E2	3.23E2	-7.23964E-2	-8.79997E1	0.0E0	-8.80005E1	9.53674E-5	5.26905E-3	9.34362E-2	2.72889E1	-3.26873E1	-3.2626E1	2.68184E1	1.1929E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00302E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80001E1	-4.76837E-5	-8.80007E1	0.0E0	5.19753E-3	9.36747E-2	2.73104E1	-3.2649E1	-3.26502E1	2.67908E1	1.19188E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
1.4E1	4.012E3	6.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80001E1	2.86102E-4	-8.80009E1	-9.53674E-5	4.91142E-3	9.35793E-2	2.73051E1	-3.26873E1	-3.26224E1	2.68337E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.5E1	1.05E2	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.79999E1	0.0E0	-8.80005E1	4.76837E-5	5.22137E-3	9.35316E-2	2.72815E1	-3.26567E1	-3.26349E1	2.6807E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99941E-1
1.6E1	7.11E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.79997E1	1.66893E-4	-8.80005E1	9.53674E-5	5.07832E-3	9.34839E-2	2.73051E1	-3.26725E1	-3.26376E1	2.68142E1	1.19186E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.7E1	1.372E3	1.0E0	6.87E2	4.7E2	-7.20871E-2	-8.79998E1	-4.76837E-5	-8.80004E1	1.66893E-4	5.03063E-3	9.33647E-2	2.73189E1	-3.26573E1	-3.26296E1	2.67758E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.8E1	6.056E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.79999E1	-2.14577E-4	-8.80004E1	0.0E0	5.14984E-3	9.33409E-2	2.72968E1	-3.26986E1	-3.26431E1	2.68001E1	1.1929E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.01209E-1
1.9E1	2.304E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80001E1	-2.6226E-4	-8.80007E1	-2.38419E-5	5.03063E-3	9.36747E-2	2.73117E1	-3.26554E1	-3.26242E1	2.68214E1	1.19239E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.03286E-1
2.0E1	2.4863E4	1.2E1	8.08E2	5.58E2	-7.18554E-2	-8.80004E1	-2.38419E-5	-8.80006E1	2.14577E-4	5.26905E-3	9.34362E-2	2.73204E1	-3.26744E1	-3.26437E1	2.67902E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
2.1E1	6.6E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80003E1	1.43051E-4	-8.80004E1	0.0E0	5.24521E-3	9.34839E-2	2.73005E1	-3.26681E1	-3.26539E1	2.68516E1	1.19265E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00222E-1
2.2E1	1.796E3	1.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80003E1	-1.90735E-4	-8.80003E1	0.0E0	5.22137E-3	9.35316E-2	2.73333E1	-3.2656E1	-3.2637E1	2.68001E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80004E1	-4.52995E-4	-8.80005E1	2.86102E-4	5.29289E-3	9.35555E-2	2.73153E1	-3.26741E1	-3.26272E1	2.6807E1	1.1929E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.02545E-1