[Scan]
initial_time=2015-12-18T20:44:52
final_time=2015-12-18T20:45:12
ip_count=19
run=1020
dataset=2
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.86149E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.0461E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.37316E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.09092E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.57055E-8
mult1=-1.77715E-8
mult2=-2.69865E-9
rf_tmon=-3.43094E-3
rf_agc=3.42889E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.67746E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5337E1
cs_ef1b_imon=2.88143E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.43405E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04496E0
lens1_imon=1.24718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.54543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.95711E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.41204E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.33672E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.21233E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91835E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.03063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=4.04728E-8
tplens_vset=1.4E-1
tplens_vmon=1.58315E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26765E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.80802E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=1.82445E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55912E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00443E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.4577E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.31839E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.3918E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=8.221E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=1.74696E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.64958E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.76276E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33382E1
os_fil1_imon=9.4209E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65761E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=9.95783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62666E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66835E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.87833E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22446E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35576E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.48E3	2.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80005E1	-2.38419E-4	-8.80006E1	2.86102E-4	5.4121E-3	9.36747E-2	2.73033E1	-3.26663E1	-3.26308E1	2.68124E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
2.0E0	1.09454E5	9.5E1	3.16E2	1.6E2	-7.37103E-2	-8.80005E1	-1.43051E-4	-8.80005E1	-1.19209E-4	5.45979E-3	9.36747E-2	2.73051E1	-3.26383E1	-3.26138E1	2.68088E1	1.19238E-7	2.51498E-3	2.51498E-3	6.32661E-3	3.00302E-1
3.0E0	1.8E1	1.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80003E1	-4.52995E-4	-8.80002E1	1.19209E-4	5.126E-3	9.36747E-2	2.73173E1	-3.26585E1	-3.26486E1	2.67902E1					
4.0E0	2.3579E4	2.1E1	6.55E2	3.98E2	-7.37874E-2	-8.80003E1	-7.15256E-5	-8.80002E1	-2.38419E-5	5.07832E-3	9.36747E-2	2.73111E1	-3.26693E1	-3.26488E1	2.68088E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80007E1	-1.90735E-4	-8.80004E1	1.66893E-4	4.98295E-3	9.37462E-2	2.72973E1	-3.26651E1	-3.26344E1	2.6831E1	1.1929E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00563E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80003E1	-1.90735E-4	-8.80003E1	4.76837E-5	5.05447E-3	9.40084E-2	2.73081E1	-3.26651E1	-3.26458E1	2.68028E1	1.1929E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80003E1	0.0E0	-8.80002E1	1.19209E-4	5.36442E-3	9.34362E-2	2.72985E1	-3.26591E1	-3.26236E1	2.68034E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80004E1	-4.76837E-5	-8.80004E1	1.43051E-4	5.4121E-3	9.36508E-2	2.72892E1	-3.26437E1	-3.26207E1	2.68094E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
1.2E1	1.38E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80001E1	-3.33786E-4	-8.80003E1	1.90735E-4	5.36442E-3	9.34124E-2	2.72974E1	-3.26514E1	-3.26195E1	2.67914E1	1.1929E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.02621E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80002E1	-3.09944E-4	-8.80003E1	-1.19209E-4	5.10216E-3	9.34124E-2	2.73082E1	-3.26713E1	-3.26548E1	2.6834E1	1.1929E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00041E-1
1.4E1	4.011E3	3.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80002E1	-4.29153E-4	-8.80002E1	-1.19209E-4	5.126E-3	9.33886E-2	2.73195E1	-3.26669E1	-3.26164E1	2.67848E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.99348E-1
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80004E1	-4.76837E-5	-8.80003E1	7.15256E-5	4.81606E-3	9.35078E-2	2.73039E1	-3.26554E1	-3.2626E1	2.6819E1	1.1929E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.99E-1
1.6E1	7.09E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8E1	-1.66893E-4	-8.80001E1	1.66893E-4	4.88758E-3	9.33409E-2	2.73181E1	-3.2649E1	-3.26413E1	2.67885E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
1.7E1	1.446E3	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.8E1	-1.19209E-4	-8.79999E1	1.90735E-4	5.24521E-3	9.31978E-2	2.73187E1	-3.26354E1	-3.26219E1	2.67836E1	1.1929E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.00966E-1
1.8E1	5.83E3	4.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80001E1	-2.38419E-5	-8.80003E1	1.90735E-4	4.91142E-3	9.33886E-2	2.73087E1	-3.26873E1	-3.26543E1	2.68178E1	1.1929E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.03286E-1
1.9E1	2.394E3	2.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80002E1	1.19209E-4	-8.80004E1	4.29153E-4	5.22137E-3	9.35555E-2	2.73291E1	-3.26789E1	-3.26278E1	2.67932E1	1.19237E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.00942E-1
2.0E1	2.4972E4	1.7E1	8.08E2	5.58E2	-7.26282E-2	-8.80002E1	-4.76837E-5	-8.80004E1	5.24521E-4	5.24521E-3	9.32455E-2	2.73267E1	-3.26711E1	-3.26452E1	2.68094E1	1.19188E-7	2.51954E-3	2.51954E-3	6.28592E-3	2.99941E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80002E1	-2.6226E-4	-8.80002E1	2.38419E-5	5.126E-3	9.35316E-2	2.72968E1	-3.26785E1	-3.2626E1	2.67992E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9978E-1
2.2E1	1.838E3	3.0E0	8.89E2	6.17E2	-7.34782E-2	-8.8E1	0.0E0	-8.80003E1	2.6226E-4	5.24521E-3	9.35555E-2	2.73175E1	-3.2675E1	-3.2662E1	2.68209E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.03712E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80004E1	-1.66893E-4	-8.80004E1	2.86102E-4	5.17368E-3	9.36031E-2	2.72811E1	-3.26554E1	-3.26765E1	2.68052E1	1.1929E-7	2.51096E-3	2.51096E-3	6.29665E-3	3.01995E-1