[Scan]
initial_time=2015-12-18T20:45:19
final_time=2015-12-18T20:45:39
ip_count=19
run=1020
dataset=2
scan=168
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.83719E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-7.09295E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.39656E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.0896E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.57081E-8
mult1=-1.80725E-8
mult2=-2.61881E-9
rf_tmon=-6.69943E-3
rf_agc=3.18015E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.7478E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.77928E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54806E1
cs_ef1b_imon=2.90017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.44667E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0029E0
lens1_imon=1.51034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.54867E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=2.95135E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.40623E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.32086E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.06703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=1.21341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.05298E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=4.0496E-8
tplens_vset=1.4E-1
tplens_vmon=1.60178E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27137E1
iondef2_imon=1.55552E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=8.94022E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=1.81905E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53929E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35266E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.06813E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.46325E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.1715E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.57276E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.25303E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.30711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29028E0
defgridb_imon=6.08503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33388E1
os_fil1_imon=9.4382E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06608E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6591E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.96257E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67244E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.43365E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.65899E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.516E3	1.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80003E1	2.38419E-5	-8.80004E1	3.33786E-4	5.05447E-3	9.34124E-2	2.73175E1	-3.26537E1	-3.26301E1	2.68148E1	1.19186E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00824E-1
2.0E0	1.09988E5	9.8E1	3.16E2	1.6E2	-7.37874E-2	-8.80003E1	-1.19209E-4	-8.80005E1	4.52995E-4	5.4121E-3	9.3174E-2	2.73112E1	-3.26768E1	-3.26419E1	2.68214E1	1.1929E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.02396E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80006E1	4.76837E-5	-8.80003E1	3.8147E-4	5.10216E-3	9.34124E-2	2.72973E1	-3.26495E1	-3.26506E1	2.67897E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.03185E-1
4.0E0	2.3602E4	1.5E1	6.55E2	3.98E2	-7.40967E-2	-8.80004E1	4.76837E-5	-8.80005E1	-1.90735E-4	5.4121E-3	9.30786E-2	2.7292E1	-3.26647E1	-3.26479E1	2.68007E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.01733E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80003E1	4.76837E-5	-8.80006E1	-1.43051E-4	5.48363E-3	9.30071E-2	2.73155E1	-3.26744E1	-3.26334E1	2.68136E1	1.19236E-7	2.52293E-3	2.52293E-3	6.30171E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80001E1	2.86102E-4	-8.80001E1	7.15256E-5	5.07832E-3	9.3317E-2	2.72809E1	-3.27021E1	-3.26349E1	2.68136E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80002E1	2.6226E-4	-8.80006E1	1.90735E-4	5.17368E-3	9.32455E-2	2.73132E1	-3.26677E1	-3.26347E1	2.68024E1	1.1929E-7	2.51937E-3	2.51937E-3	6.31541E-3	2.99893E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80004E1	4.76837E-5	-8.80003E1	7.15256E-5	5.38826E-3	9.31025E-2	2.7291E1	-3.26823E1	-3.26199E1	2.68232E1					
1.2E1	1.24E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80004E1	7.15256E-5	-8.80006E1	2.38419E-5	5.24521E-3	9.30071E-2	2.7288E1	-3.26578E1	-3.26536E1	2.68058E1	1.19236E-7	2.51384E-3	2.51384E-3	6.3245E-3	3.00251E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80002E1	-2.38419E-5	-8.80006E1	3.09944E-4	5.38826E-3	9.32217E-2	2.73134E1	-3.2672E1	-3.26319E1	2.6816E1	1.19264E-7	2.51607E-3	2.51607E-3	6.28825E-3	3.01478E-1
1.4E1	3.981E3	1.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80002E1	-2.14577E-4	-8.80008E1	2.14577E-4	5.38826E-3	9.3174E-2	2.73177E1	-3.2629E1	-3.262E1	2.67897E1					
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80003E1	-4.29153E-4	-8.80004E1	-7.15256E-5	5.48363E-3	9.33647E-2	2.73092E1	-3.26508E1	-3.26136E1	2.68046E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9841E-1
1.6E1	7.41E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.8E1	-2.38419E-5	-8.80002E1	2.6226E-4	5.53131E-3	9.32455E-2	2.73265E1	-3.27074E1	-3.26181E1	2.67856E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
1.7E1	1.424E3	1.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80005E1	-2.38419E-5	-8.80002E1	1.43051E-4	5.22137E-3	9.33647E-2	2.73051E1	-3.26639E1	-3.26518E1	2.68047E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.8E1	6.1E3	2.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80001E1	2.38419E-4	-8.80003E1	1.90735E-4	5.53131E-3	9.32932E-2	2.73045E1	-3.26868E1	-3.26313E1	2.68046E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.9E1	2.388E3	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80002E1	1.43051E-4	-8.80002E1	1.90735E-4	5.00679E-3	9.31978E-2	2.72591E1	-3.27127E1	-3.26018E1	2.68111E1	1.19239E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
2.0E1	2.5331E4	1.9E1	8.08E2	5.58E2	-7.40192E-2	-8.80002E1	0.0E0	-8.80006E1	7.15256E-5	5.14984E-3	9.29117E-2	2.72799E1	-3.26549E1	-3.26308E1	2.68063E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
2.1E1	3.4E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80002E1	-9.53674E-5	-8.80004E1	2.14577E-4	5.05447E-3	9.32693E-2	2.73293E1	-3.2685E1	-3.26219E1	2.67926E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00676E-1
2.2E1	1.856E3	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80003E1	0.0E0	-8.80006E1	7.15256E-5	5.126E-3	9.3317E-2	2.73219E1	-3.26476E1	-3.26188E1	2.681E1	1.1929E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.02511E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80001E1	-2.14577E-4	-8.8E1	2.38419E-4	5.05447E-3	9.3174E-2	2.73081E1	-3.27137E1	-3.26086E1	2.68154E1	1.19239E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00966E-1