[Scan]
initial_time=2015-12-18T20:47:06
final_time=2015-12-18T20:47:26
ip_count=19
run=1020
dataset=2
scan=172
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77446E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.38592E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.39666E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.99732E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.57098E-8
mult1=-2.03162E-8
mult2=-2.76049E-9
rf_tmon=-5.74237E-3
rf_agc=3.32678E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.95152E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63672E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20096E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=2.87131E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.43071E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98228E0
lens1_imon=1.33278E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.99156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03366E1
cs_ea2_imon=1.53099E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84487E1
cs_ef1a_imon=2.94742E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.40412E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.30138E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14863E1
os_ea1_imon=2.32771E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.21811E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93293E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=3.02944E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=4.04455E-8
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26514E1
iondef3_imon=1.4825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.98314E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=1.83042E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12223E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50988E0
os_ea2_imon=-5.28949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04819E0
os_ef2alow_imon=-2.60933E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2735E-1
os_ef2bup_imon=-5.33046E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.46489E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.2922E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.24924E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73139E1
iondef1_imon=1.07228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08607E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.42158E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.16742E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12898E0
cs_ionaccel_imon=-1.89691E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47112E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=9.19975E-2
window_imon=-1.20533E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.8606E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=6.3375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.39413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.13387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33386E1
os_fil1_imon=9.44389E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06623E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65685E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.96895E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63304E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.69235E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57494E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36019E-1
cs_fil2_imon=-1.95676E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22747E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.94538E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.485E3	1.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80006E1	-2.14577E-4	-8.80002E1	3.8147E-4	5.38826E-3	9.3317E-2	2.73141E1	-3.26663E1	-3.26464E1	2.67938E1	1.19188E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.97901E-1
2.0E0	1.08455E5	9.6E1	3.16E2	1.6E2	-7.3401E-2	-8.80004E1	-1.19209E-4	-8.80004E1	3.33786E-4	5.24521E-3	9.3317E-2	2.73284E1	-3.26933E1	-3.26217E1	2.68207E1	1.19238E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9926E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80006E1	-1.90735E-4	-8.80003E1	2.14577E-4	5.126E-3	9.34839E-2	2.72987E1	-3.26463E1	-3.26318E1	2.6807E1	1.1929E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.9829E-1
4.0E0	2.3247E4	1.0E1	6.55E2	3.98E2	-7.31692E-2	-8.80006E1	-4.05312E-4	-8.80002E1	4.76837E-5	5.29289E-3	9.37223E-2	2.73151E1	-3.26402E1	-3.26166E1	2.68233E1	1.1929E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80005E1	-2.14577E-4	-8.80002E1	-1.43051E-4	5.43594E-3	9.32693E-2	2.73216E1	-3.26626E1	-3.26378E1	2.68004E1	1.1929E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80004E1	-2.14577E-4	-8.80003E1	4.76837E-5	5.36442E-3	9.32932E-2	2.73118E1	-3.2645E1	-3.26774E1	2.68038E1	1.1929E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80008E1	-9.53674E-5	-8.80005E1	2.6226E-4	5.29289E-3	9.35078E-2	2.73271E1	-3.2656E1	-3.26285E1	2.6819E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80005E1	-4.76837E-5	-8.80004E1	3.57628E-4	5.45979E-3	9.36031E-2	2.73255E1	-3.26735E1	-3.26188E1	2.67872E1	1.1929E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.00676E-1
1.2E1	1.29E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80004E1	4.76837E-5	-8.80005E1	3.8147E-4	5.53131E-3	9.3317E-2	2.73242E1	-3.26776E1	-3.26173E1	2.6818E1	1.1929E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.02396E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80004E1	-4.76837E-5	-8.80002E1	4.76837E-4	5.72205E-3	9.34601E-2	2.72843E1	-3.27087E1	-3.26413E1	2.67951E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.02769E-1
1.4E1	3.993E3	4.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80003E1	2.6226E-4	-8.80004E1	5.24521E-4	5.53131E-3	9.3317E-2	2.73492E1	-3.26566E1	-3.26468E1	2.68154E1	1.1929E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.0201E-1
1.5E1	1.03E2	1.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80005E1	-1.66893E-4	-8.80006E1	-2.38419E-5	5.43594E-3	9.31025E-2	2.73021E1	-3.26518E1	-3.26476E1	2.6807E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02133E-1
1.6E1	7.45E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80003E1	-4.76837E-5	-8.80006E1	1.19209E-4	5.43594E-3	9.31978E-2	2.73081E1	-3.26633E1	-3.26332E1	2.67992E1	1.19186E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.7E1	1.415E3	1.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80005E1	9.53674E-5	-8.8001E1	9.53674E-5	5.38826E-3	9.34124E-2	2.73021E1	-3.26819E1	-3.25942E1	2.6849E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
1.8E1	5.809E3	3.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80002E1	-4.29153E-4	-8.80005E1	2.6226E-4	5.36442E-3	9.34362E-2	2.73256E1	-3.26794E1	-3.26422E1	2.68092E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.9E1	2.409E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80005E1	-4.52995E-4	-8.80004E1	2.86102E-4	5.62668E-3	9.32932E-2	2.72925E1	-3.26488E1	-3.26861E1	2.68232E1	1.19249E-7	2.51324E-3	2.51324E-3	6.31611E-3	3.00778E-1
2.0E1	2.566E4	1.5E1	8.08E2	5.58E2	-7.27828E-2	-8.80005E1	-4.29153E-4	-8.80004E1	1.66893E-4	5.43594E-3	9.33409E-2	2.73303E1	-3.2653E1	-3.2638E1	2.68274E1	1.1929E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
2.1E1	5.0E1	1.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80006E1	-2.38419E-4	-8.80005E1	1.90735E-4	5.17368E-3	9.34839E-2	2.72939E1	-3.26207E1	-3.26236E1	2.68172E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00041E-1
2.2E1	1.676E3	1.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80005E1	-7.15256E-5	-8.80002E1	1.43051E-4	5.60284E-3	9.36031E-2	2.73321E1	-3.26543E1	-3.2632E1	2.68522E1	1.1929E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.01104E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.286E-2	-8.80005E1	-4.76837E-4	-8.80005E1	2.6226E-4	5.53131E-3	9.36031E-2	2.73139E1	-3.26378E1	-3.26514E1	2.68022E1	1.19238E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1