[Scan]
initial_time=2015-12-18T20:47:33
final_time=2015-12-18T20:47:52
ip_count=19
run=1020
dataset=2
scan=173
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.79602E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-6.48141E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.39285E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.03384E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.57354E-8
mult1=-1.6885E-8
mult2=-2.77277E-9
rf_tmon=-3.35238E-3
rf_agc=3.55995E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=5.81419E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=2.8908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=2.43673E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0218E0
lens1_imon=1.41773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.55612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.95063E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.40687E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.33373E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.19864E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91843E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.02234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=4.03678E-8
tplens_vset=1.4E-1
tplens_vmon=1.59306E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26352E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.59435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=9.14407E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23794E0
ionrepsh_imon=1.82087E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.15782E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53761E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.44689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73106E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.42445E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=8.18607E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47068E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=1.65686E-1
window_imon=-1.22116E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.8632E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.88423E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.56049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22838E0
defgridb_imon=5.8526E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.45135E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06849E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.97351E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66892E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.73673E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69011E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.29549E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2271E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64097E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.672E3	1.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80003E1	-1.90735E-4	-8.80002E1	3.57628E-4	5.31673E-3	9.35793E-2	2.73069E1	-3.26807E1	-3.26158E1	2.68112E1	1.19239E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
2.0E0	1.08716E5	1.04E2	3.16E2	1.6E2	-7.24736E-2	-8.80003E1	-2.38419E-5	-8.80003E1	0.0E0	5.62668E-3	9.3627E-2	2.73131E1	-3.26309E1	-3.26278E1	2.6804E1	1.19238E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00302E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80004E1	-1.19209E-4	-8.80004E1	9.53674E-5	5.57899E-3	9.3627E-2	2.73198E1	-3.26915E1	-3.26608E1	2.68151E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.01085E-1
4.0E0	2.3171E4	1.8E1	6.55E2	3.98E2	-7.32464E-2	-8.80005E1	-1.43051E-4	-8.80004E1	-2.38419E-5	5.57899E-3	9.36747E-2	2.7308E1	-3.26514E1	-3.26496E1	2.68184E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80006E1	0.0E0	-8.80002E1	1.90735E-4	5.14984E-3	9.35555E-2	2.73291E1	-3.26687E1	-3.26579E1	2.68088E1	1.1929E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.01223E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80003E1	-3.33786E-4	-8.80001E1	4.76837E-5	5.36442E-3	9.38892E-2	2.73327E1	-3.26705E1	-3.26627E1	2.6819E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80004E1	-1.43051E-4	-8.80005E1	-2.86102E-4	5.43594E-3	9.34124E-2	2.72883E1	-3.26663E1	-3.26386E1	2.67968E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.03185E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80006E1	-1.66893E-4	-8.80004E1	-4.76837E-5	5.34058E-3	9.30309E-2	2.73111E1	-3.26344E1	-3.26326E1	2.68136E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
1.2E1	1.35E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80006E1	-1.43051E-4	-8.80004E1	4.76837E-5	5.19753E-3	9.35316E-2	2.73106E1	-3.26462E1	-3.26174E1	2.68016E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80005E1	-1.90735E-4	-8.8E1	1.90735E-4	5.34058E-3	9.31025E-2	2.73134E1	-3.26602E1	-3.26166E1	2.681E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.4E1	3.904E3	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80005E1	-2.14577E-4	-8.80003E1	4.76837E-4	5.34058E-3	9.31501E-2	2.73137E1	-3.26817E1	-3.26407E1	2.68028E1	1.19239E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01223E-1
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80006E1	2.38419E-5	-8.80003E1	2.38419E-5	5.29289E-3	9.33886E-2	2.73175E1	-3.26638E1	-3.25694E1	2.6804E1	1.1929E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.99613E-1
1.6E1	6.83E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80007E1	-2.14577E-4	-8.80003E1	7.15256E-5	5.65052E-3	9.32455E-2	2.73243E1	-3.26669E1	-3.26248E1	2.68136E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
1.7E1	1.416E3	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80007E1	-2.14577E-4	-8.80004E1	1.90735E-4	5.60284E-3	9.30786E-2	2.73195E1	-3.26771E1	-3.26092E1	2.67926E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.8E1	5.769E3	5.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80009E1	-9.53674E-5	-8.80004E1	1.43051E-4	5.31673E-3	9.31263E-2	2.73311E1	-3.26903E1	-3.26148E1	2.68136E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.02133E-1
1.9E1	2.407E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80009E1	-3.09944E-4	-8.80007E1	4.05312E-4	5.55515E-3	9.29356E-2	2.72714E1	-3.26759E1	-3.26092E1	2.68106E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
2.0E1	2.4718E4	1.3E1	8.08E2	5.58E2	-7.17779E-2	-8.80004E1	-4.76837E-4	-8.80004E1	4.52995E-4	5.65052E-3	9.30309E-2	2.73115E1	-3.26411E1	-3.26057E1	2.68202E1	1.1929E-7	2.51952E-3	2.51952E-3	6.34164E-3	3.00522E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80002E1	-5.72205E-4	-8.80004E1	5.48363E-4	5.43594E-3	9.3627E-2	2.73181E1	-3.26537E1	-3.26042E1	2.67897E1	1.1929E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.99175E-1
2.2E1	1.749E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80003E1	-2.6226E-4	-8.80006E1	9.53674E-5	5.31673E-3	9.35316E-2	2.73075E1	-3.26735E1	-3.26567E1	2.68232E1	1.19239E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.8E1	-7.15256E-5	-8.80003E1	1.90735E-4	5.26905E-3	9.3317E-2	2.73106E1	-3.2675E1	-3.26352E1	2.681E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.98665E-1