[Scan]
initial_time=2015-12-18T20:48:26
final_time=2015-12-18T20:48:46
ip_count=19
run=1020
dataset=2
scan=175
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.82705E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-6.74617E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.42339E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.07754E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.57093E-8
mult1=-1.72544E-8
mult2=-2.66838E-9
rf_tmon=-3.47715E-3
rf_agc=3.41704E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=5.98919E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64341E0
bslens_imon=2.76344E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19474E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53316E1
cs_ef1b_imon=2.88035E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05208E1
cs_ea1_imon=2.44119E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03165E0
lens1_imon=1.49993E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03856E1
cs_ea2_imon=1.54095E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.93008E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.40835E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.32807E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23128E0
cs_ionrep_imon=1.2214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.0364E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=4.03827E-8
tplens_vset=1.4E-1
tplens_vmon=1.61205E0
tplens_imon=-2.2269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26526E1
iondef3_imon=1.48549E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.58723E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98412E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.07719E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.82524E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33848E1
lens5b_imon=2.18666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53369E0
os_ea2_imon=-7.95673E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00586E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09961E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.45477E-1
os_ef2bup_imon=-5.54232E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.44617E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.31618E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.26839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.07301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.44978E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=8.18326E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=9.36064E-2
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39012E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.47219E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.52456E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.10122E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39129E0
defgridb_imon=6.01769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33383E1
os_fil1_imon=9.43736E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0632E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65878E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.96516E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62029E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91091E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64555E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.83899E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59292E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.494E3	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80006E1	-1.90735E-4	-8.80004E1	1.19209E-4	5.45979E-3	9.33647E-2	2.7319E1	-3.26469E1	-3.26671E1	2.67931E1	1.19237E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.9829E-1
2.0E0	1.08661E5	1.01E2	3.16E2	1.6E2	-7.27828E-2	-8.80006E1	-4.76837E-5	-8.80003E1	2.86102E-4	5.36442E-3	9.34362E-2	2.73008E1	-3.26707E1	-3.26499E1	2.67998E1	1.1919E-7	2.51077E-3	2.51077E-3	6.32328E-3	2.98842E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80003E1	-2.6226E-4	-8.80004E1	3.09944E-4	5.29289E-3	9.36031E-2	2.7298E1	-3.26626E1	-3.26236E1	2.6837E1	1.19184E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.99083E-1
4.0E0	2.3694E4	1.1E1	6.55E2	3.98E2	-7.20871E-2	-8.80005E1	-9.53674E-5	-8.80003E1	-9.53674E-5	5.45979E-3	9.32217E-2	2.73181E1	-3.26685E1	-3.26319E1	2.68034E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80001E1	-9.53674E-5	-8.80007E1	2.6226E-4	5.24521E-3	9.32455E-2	2.73057E1	-3.26933E1	-3.2637E1	2.68196E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80001E1	0.0E0	-8.80004E1	-2.38419E-5	5.22137E-3	9.34362E-2	2.73317E1	-3.26523E1	-3.26465E1	2.6819E1	1.1929E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.8E1	-3.57628E-4	-8.80004E1	2.14577E-4	5.126E-3	9.35078E-2	2.73369E1	-3.26527E1	-3.26177E1	2.68179E1	1.1926E-7	2.517E-3	2.517E-3	6.3074E-3	3.01088E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80003E1	-4.05312E-4	-8.80005E1	-2.38419E-4	5.24521E-3	9.35078E-2	2.72733E1	-3.26446E1	-3.2614E1	2.67944E1	1.1929E-7	2.52106E-3	2.52106E-3	6.31902E-3	2.9926E-1
1.2E1	1.25E2	2.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80004E1	-3.8147E-4	-8.80001E1	3.8147E-4	5.29289E-3	9.32932E-2	2.73237E1	-3.26627E1	-3.25876E1	2.67974E1	1.19238E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80002E1	-6.19888E-4	-8.80001E1	4.05312E-4	5.17368E-3	9.36985E-2	2.73069E1	-3.26957E1	-3.26344E1	2.67926E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.4E1	3.887E3	3.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80003E1	-4.52995E-4	-8.80002E1	1.66893E-4	5.55515E-3	9.34839E-2	2.72961E1	-3.26735E1	-3.26464E1	2.6798E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.5E1	1.18E2	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80004E1	-4.76837E-4	-8.79999E1	0.0E0	5.38826E-3	9.34362E-2	2.72805E1	-3.26771E1	-3.26392E1	2.68478E1	1.19238E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1
1.6E1	7.1E2	1.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80004E1	-1.66893E-4	-8.79999E1	-4.76837E-5	5.34058E-3	9.36031E-2	2.73574E1	-3.26879E1	-3.2632E1	2.68034E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
1.7E1	1.433E3	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80004E1	-2.6226E-4	-8.80004E1	-7.15256E-5	5.53131E-3	9.36747E-2	2.73321E1	-3.26561E1	-3.2641E1	2.68118E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.8E1	5.927E3	2.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80006E1	0.0E0	-8.80005E1	-2.38419E-5	5.38826E-3	9.35316E-2	2.73015E1	-3.26801E1	-3.26248E1	2.681E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01871E-1
1.9E1	2.405E3	3.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80005E1	-1.43051E-4	-8.80002E1	1.66893E-4	5.38826E-3	9.34839E-2	2.72697E1	-3.26596E1	-3.26419E1	2.68352E1	1.19238E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.03185E-1
2.0E1	2.5247E4	1.7E1	8.08E2	5.58E2	-7.19325E-2	-8.80007E1	-7.15256E-5	-8.80001E1	2.14577E-4	5.4121E-3	9.38177E-2	2.73222E1	-3.26578E1	-3.2604E1	2.6831E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
2.1E1	4.3E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80005E1	-7.15256E-5	-8.80001E1	3.33786E-4	5.36442E-3	9.38177E-2	2.72903E1	-3.26744E1	-3.26119E1	2.68279E1	1.19237E-7	2.51359E-3	2.51359E-3	6.33538E-3	2.98819E-1
2.2E1	1.832E3	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80008E1	2.38419E-5	-8.80005E1	0.0E0	5.34058E-3	9.35555E-2	2.73057E1	-3.26639E1	-3.2644E1	2.67902E1	1.1929E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80004E1	0.0E0	-8.80003E1	2.38419E-4	5.31673E-3	9.3627E-2	2.73187E1	-3.26378E1	-3.26526E1	2.67908E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1