[Scan]
initial_time=2015-12-18T20:49:58
final_time=2015-12-18T20:50:18
ip_count=19
run=1020
dataset=3
scan=178
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.82316E-1
ql1_imon=1.56203E-8
ql2_vset=
ql2_vmon=-8.96072E-1
ql2_imon=1.74255E-9
ql3_vset=
ql3_vmon=-9.04524E0
ql3_imon=6.80428E-9
ql4_vset=
ql4_vmon=-9.04112E0
ql4_imon=-4.70042E-10
mult1=-9.97825E-9
mult2=-2.84192E-9
rf_tmon=-3.94617E-3
rf_agc=3.36957E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.53291E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53065E1
cs_ef1b_imon=3.15906E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=1.08184E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45338E0
lens1_imon=2.45831E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.98391E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03501E1
cs_ea2_imon=1.43224E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8451E1
cs_ef1a_imon=3.04438E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.40809E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.29617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=2.33585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.41679E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93236E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.96392E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.39959E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.25456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26113E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.06364E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33586E0
ionrepsh_imon=8.44345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74884E1
cs_ef2b_imon=3.13682E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58185E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00679E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09105E0
os_ef2alow_imon=-2.59543E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.35459E-1
os_ef2bup_imon=-5.31656E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.45932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.09147E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.95763E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=8.19713E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-8.82134E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.67046E-6
window_vset=0.0E0
window_vmon=1.67874E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-5.4851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=6.85072E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.35166E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.44123E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.081E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65927E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31783E1
cs_fil1_imon=8.44004E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.45945E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67921E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01661E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52559E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.28691E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32156E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65781E-1
res40_imon=-2.4182E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.82506E-1	-8.96525E-1	-9.04667E0	-9.04107E0	4.95911E-3	9.377E-2	2.73097E1	-3.26399E1	-3.26492E1	2.68184E1	1.19186E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.81791E-1	-8.96525E-1	-9.04667E0	-9.04095E0	5.07832E-3	9.35316E-2	2.72732E1	-3.26465E1	-3.26266E1	2.67819E1	1.1919E-7	2.51182E-3	2.51182E-3	6.32858E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.82101E-1	-8.96215E-1	-9.0466E0	-9.04081E0	4.8399E-3	9.35078E-2	2.7298E1	-3.26675E1	-3.25858E1	2.67835E1	1.19143E-7	2.51575E-3	2.51575E-3	6.33863E-3	2.9926E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.82125E-1	-8.96239E-1	-9.04632E0	-9.04117E0	5.26905E-3	9.34124E-2	2.7301E1	-3.26366E1	-3.26124E1	2.68406E1	1.1929E-7	2.52029E-3	2.52029E-3	6.32518E-3	3.00479E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.82101E-1	-8.95977E-1	-9.04627E0	-9.041E0	4.88758E-3	9.36747E-2	2.72959E1	-3.26566E1	-3.26303E1	2.67944E1	1.19239E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.82387E-1	-8.96168E-1	-9.04622E0	-9.04074E0	4.69685E-3	9.3627E-2	2.7301E1	-3.26431E1	-3.26183E1	2.68388E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.82626E-1	-8.96311E-1	-9.04622E0	-9.04081E0	4.95911E-3	9.3317E-2	2.72805E1	-3.26549E1	-3.26044E1	2.68262E1	1.19238E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.82363E-1	-8.96311E-1	-9.04627E0	-9.04083E0	5.05447E-3	9.33886E-2	2.72895E1	-3.26428E1	-3.25846E1	2.68238E1	1.19186E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.03976E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.82459E-1	-8.96358E-1	-9.04589E0	-9.04093E0	4.93526E-3	9.35316E-2	2.72962E1	-3.26472E1	-3.2613E1	2.6807E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.82673E-1	-8.96573E-1	-9.04577E0	-9.04078E0	5.17368E-3	9.34601E-2	2.73051E1	-3.26675E1	-3.26434E1	2.67698E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.82339E-1	-8.96168E-1	-9.04589E0	-9.04086E0	5.29289E-3	9.35316E-2	2.73015E1	-3.26446E1	-3.26344E1	2.68022E1	1.19238E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.82339E-1	-8.96549E-1	-9.0456E0	-9.0409E0	5.26905E-3	9.34839E-2	2.72943E1	-3.26675E1	-3.26326E1	2.68106E1	1.19238E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.82602E-1	-8.96478E-1	-9.04524E0	-9.04086E0	5.34058E-3	9.36031E-2	2.7311E1	-3.26508E1	-3.26236E1	2.68186E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.82339E-1	-8.96049E-1	-9.04522E0	-9.04119E0	5.07832E-3	9.36031E-2	2.72973E1	-3.26801E1	-3.2602E1	2.68358E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.82435E-1	-8.96001E-1	-9.04546E0	-9.04112E0	5.31673E-3	9.34839E-2	2.73151E1	-3.26673E1	-3.26526E1	2.67716E1	1.1929E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.82316E-1	-8.96025E-1	-9.04539E0	-9.04102E0	5.17368E-3	9.35078E-2	2.72979E1	-3.26855E1	-3.26428E1	2.6816E1	1.19238E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.82411E-1	-8.95882E-1	-9.04524E0	-9.04133E0	5.31673E-3	9.37462E-2	2.72721E1	-3.26512E1	-3.26452E1	2.68034E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.8222E-1	-8.95977E-1	-9.04527E0	-9.04095E0	5.19753E-3	9.36508E-2	2.72998E1	-3.26337E1	-3.26626E1	2.67992E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.82316E-1	-8.96168E-1	-9.04517E0	-9.04126E0	5.17368E-3	9.35316E-2	2.73092E1	-3.26767E1	-3.26242E1	2.68041E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.82316E-1	-8.96072E-1	-9.04524E0	-9.04112E0	5.03063E-3	9.36508E-2	2.73198E1	-3.26591E1	-3.26113E1	2.68124E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00197E-1