[Scan]
initial_time=2015-12-18T20:50:51
final_time=2015-12-18T20:51:11
ip_count=19
run=1020
dataset=3
scan=180
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.81696E-1
ql1_imon=1.38954E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.90318E-9
ql3_vset=
ql3_vmon=-9.04579E0
ql3_imon=2.58517E-9
ql4_vset=
ql4_vmon=-9.04078E0
ql4_imon=-9.35197E-11
mult1=-9.73579E-9
mult2=-2.77225E-9
rf_tmon=-3.98446E-3
rf_agc=3.33858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.68014E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62408E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20283E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52925E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43745E0
lens1_imon=2.5702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.39871E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.02451E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.40181E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=2.34032E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.39437E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.40184E-8
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.02268E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=8.33452E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56092E0
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71594E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44876E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.45806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.35893E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=8.16121E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-8.03104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=6.83125E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.7195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.46727E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07744E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65781E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.06474E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0026E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60766E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22641E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61094E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.81243E-1	-8.96525E-1	-9.04539E0	-9.04086E0	5.29289E-3	9.31978E-2	2.73387E1	-3.26856E1	-3.26378E1	2.68099E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.0E0	3.5E1	1.0E0	3.16E2	1.6E2	-2.09603E0	-8.81529E-1	-8.96525E-1	-9.04541E0	-9.04038E0	5.17368E-3	9.32217E-2	2.73087E1	-3.26573E1	-3.26188E1	2.681E1	1.1929E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.81124E-1	-8.96335E-1	-9.04534E0	-9.04055E0	5.57899E-3	9.33886E-2	2.7308E1	-3.26638E1	-3.26248E1	2.6829E1	1.1929E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.01347E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.81314E-1	-8.96382E-1	-9.04534E0	-9.04069E0	5.38826E-3	9.37939E-2	2.72967E1	-3.26603E1	-3.26224E1	2.68166E1	1.1929E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.81124E-1	-8.96382E-1	-9.04524E0	-9.04076E0	5.34058E-3	9.37939E-2	2.73003E1	-3.26326E1	-3.26182E1	2.6786E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.81314E-1	-8.96502E-1	-9.04555E0	-9.04102E0	5.24521E-3	9.36508E-2	2.72962E1	-3.26738E1	-3.26142E1	2.68142E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.81243E-1	-8.96382E-1	-9.04574E0	-9.04083E0	5.19753E-3	9.35316E-2	2.72986E1	-3.26626E1	-3.26166E1	2.68082E1	1.1929E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.81171E-1	-8.96406E-1	-9.0456E0	-9.04098E0	5.31673E-3	9.35555E-2	2.73165E1	-3.26759E1	-3.2602E1	2.68018E1	1.19239E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.81076E-1	-8.96263E-1	-9.04558E0	-9.04074E0	5.29289E-3	9.35555E-2	2.72913E1	-3.26512E1	-3.26044E1	2.682E1	1.1929E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.811E-1	-8.96478E-1	-9.04565E0	-9.04098E0	5.31673E-3	9.35793E-2	2.73213E1	-3.26687E1	-3.2596E1	2.67833E1	1.19184E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00144E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.81267E-1	-8.96502E-1	-9.04534E0	-9.04086E0	5.45979E-3	9.35316E-2	2.72997E1	-3.26783E1	-3.26248E1	2.68088E1	1.19238E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.811E-1	-8.96382E-1	-9.04553E0	-9.04088E0	5.26905E-3	9.34362E-2	2.72829E1	-3.26621E1	-3.26134E1	2.68119E1	1.1929E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.81338E-1	-8.96502E-1	-9.04551E0	-9.04095E0	5.29289E-3	9.35555E-2	2.73159E1	-3.26452E1	-3.26524E1	2.67949E1	1.19237E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99879E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.81338E-1	-8.96263E-1	-9.04562E0	-9.04112E0	5.50747E-3	9.33409E-2	2.72709E1	-3.26756E1	-3.26107E1	2.68172E1	1.19238E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.97704E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.81362E-1	-8.95929E-1	-9.04577E0	-9.04074E0	5.45979E-3	9.31978E-2	2.73057E1	-3.26392E1	-3.2626E1	2.67836E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.81648E-1	-8.96335E-1	-9.04553E0	-9.04083E0	5.43594E-3	9.34839E-2	2.73141E1	-3.26639E1	-3.26266E1	2.6828E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.8172E-1	-8.96025E-1	-9.04536E0	-9.04088E0	5.50747E-3	9.34601E-2	2.73135E1	-3.2653E1	-3.26386E1	2.68166E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.81767E-1	-8.96478E-1	-9.04565E0	-9.04086E0	5.48363E-3	9.39369E-2	2.72967E1	-3.26777E1	-3.26236E1	2.6834E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.0201E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.81815E-1	-8.96335E-1	-9.04553E0	-9.0409E0	5.48363E-3	9.35316E-2	2.73141E1	-3.26807E1	-3.26314E1	2.68016E1	1.19239E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.81696E-1	-8.96597E-1	-9.04579E0	-9.04078E0	5.24521E-3	9.34839E-2	2.73057E1	-3.26744E1	-3.26195E1	2.67788E1	1.19238E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1