[Scan]
initial_time=2015-12-18T20:51:18
final_time=2015-12-18T20:51:38
ip_count=19
run=1020
dataset=3
scan=181
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.80647E-1
ql1_imon=1.36925E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.89435E-9
ql3_vset=
ql3_vmon=-9.0456E0
ql3_imon=1.8942E-9
ql4_vset=
ql4_vmon=-9.04095E0
ql4_imon=-5.52297E-11
mult1=-9.96916E-9
mult2=-2.7226E-9
rf_tmon=-5.23942E-3
rf_agc=3.26066E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.65076E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6715E0
bslens_imon=2.67719E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19782E1
lens5a_imon=1.98983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05069E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.18058E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.01888E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0493E1
cs_ea1_imon=1.1034E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39342E0
lens1_imon=2.70847E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64594E1
os_ef1alow_imon=2.98279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03928E1
cs_ea2_imon=1.40131E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84421E1
cs_ef1a_imon=3.05002E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.40039E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.30298E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15439E1
os_ea1_imon=2.33919E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63391E1
os_ef1bup_imon=3.0992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23298E0
cs_ionrep_imon=9.34107E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93531E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02086E1
cs_anode1_imon=1.95628E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.39288E-8
tplens_vset=1.4E-1
tplens_vmon=1.62811E0
tplens_imon=-3.19302E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.48613E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.59632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.01658E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24804E0
ionrepsh_imon=8.57631E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.336E1
lens5b_imon=2.20987E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74448E1
cs_ef2b_imon=3.13034E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56438E0
os_ea2_imon=-8.30304E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71452E1
cs_ef2a_imon=3.19509E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09437E0
os_ef2alow_imon=-2.6904E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25338E-1
os_ef2bup_imon=-5.28054E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10988E1
os_restr2_imon=3.45694E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31423E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01868E1
cs_anode2_imon=2.1003E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.08915E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.08477E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.30769E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=8.12164E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11009E0
cs_ionaccel_imon=-7.83184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56093E1
einzel_imon=7.69138E-6
window_vset=0.0E0
window_vmon=1.82428E-1
window_imon=-9.56568E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86267E1
mask2_imon=-5.60262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.03287E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.56011E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.56126E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55441E0
defgridb_imon=6.32373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.45168E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6552E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=6.64439E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38668E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66701E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44405E-2
os_fil2_imon=-2.44351E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.26852E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65402E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30224E-1
cs_fil2_imon=-2.21351E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.09749E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22507E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.53646E-1
res40_imon=-2.47456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.811E-1	-8.96573E-1	-9.0456E0	-9.04102E0	5.29289E-3	9.39369E-2	2.73008E1	-3.26505E1	-3.26034E1	2.6798E1	1.1924E-7	2.51393E-3	2.51393E-3	6.3445E-3	2.99594E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.81314E-1	-8.96883E-1	-9.04512E0	-9.04095E0	5.05447E-3	9.39608E-2	2.73099E1	-3.26825E1	-3.2647E1	2.68178E1	1.19238E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.81267E-1	-8.96716E-1	-9.04551E0	-9.04071E0	5.36442E-3	9.38416E-2	2.72974E1	-3.26541E1	-3.26332E1	2.68132E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.99879E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.81743E-1	-8.96668E-1	-9.04536E0	-9.04059E0	5.36442E-3	9.3627E-2	2.73333E1	-3.26638E1	-3.26542E1	2.67993E1	1.19242E-7	2.51923E-3	2.51923E-3	6.3074E-3	2.99339E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.81481E-1	-8.96668E-1	-9.04529E0	-9.04131E0	5.03063E-3	9.34362E-2	2.73072E1	-3.26474E1	-3.26274E1	2.67974E1	1.1929E-7	2.5126E-3	2.5126E-3	6.32652E-3	2.99562E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.81267E-1	-8.96668E-1	-9.04541E0	-9.041E0	4.98295E-3	9.35793E-2	2.73187E1	-3.26673E1	-3.26248E1	2.67992E1	1.1929E-7	2.51655E-3	2.51655E-3	6.33264E-3	2.99958E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.81219E-1	-8.96621E-1	-9.04527E0	-9.041E0	5.07832E-3	9.37462E-2	2.73009E1	-3.26482E1	-3.26398E1	2.68244E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.81076E-1	-8.96406E-1	-9.04565E0	-9.04093E0	5.10216E-3	9.36985E-2	2.73189E1	-3.26717E1	-3.26194E1	2.68424E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.81124E-1	-8.96263E-1	-9.04527E0	-9.04107E0	5.17368E-3	9.37462E-2	2.72985E1	-3.2653E1	-3.2626E1	2.681E1	1.1929E-7	2.51826E-3	2.51826E-3	6.3074E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.81171E-1	-8.96478E-1	-9.04553E0	-9.04098E0	5.126E-3	9.35793E-2	2.73237E1	-3.26651E1	-3.26446E1	2.68004E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.81076E-1	-8.96525E-1	-9.04524E0	-9.04107E0	5.03063E-3	9.37462E-2	2.73117E1	-3.2623E1	-3.26278E1	2.67764E1	1.19135E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.81195E-1	-8.96168E-1	-9.0452E0	-9.04105E0	4.98295E-3	9.37462E-2	2.72865E1	-3.2647E1	-3.26056E1	2.681E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.80885E-1	-8.95786E-1	-9.04548E0	-9.04102E0	5.24521E-3	9.34601E-2	2.72895E1	-3.26416E1	-3.26717E1	2.68154E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.81124E-1	-8.95977E-1	-9.04536E0	-9.04102E0	5.07832E-3	9.34124E-2	2.73003E1	-3.26512E1	-3.2629E1	2.67998E1	1.19188E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.81052E-1	-8.96168E-1	-9.04539E0	-9.04086E0	4.8399E-3	9.34362E-2	2.73261E1	-3.26428E1	-3.26374E1	2.68214E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.80885E-1	-8.96335E-1	-9.0457E0	-9.04086E0	5.22137E-3	9.34124E-2	2.7321E1	-3.26809E1	-3.2626E1	2.6831E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.8098E-1	-8.96287E-1	-9.04536E0	-9.04078E0	5.126E-3	9.35078E-2	2.72984E1	-3.26823E1	-3.2626E1	2.68172E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02922E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.80527E-1	-8.96311E-1	-9.04591E0	-9.04071E0	5.14984E-3	9.35316E-2	2.73057E1	-3.26747E1	-3.26225E1	2.67677E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.80408E-1	-8.96239E-1	-9.04574E0	-9.04045E0	5.22137E-3	9.36985E-2	2.72929E1	-3.26487E1	-3.26352E1	2.681E1	1.19239E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.80647E-1	-8.96239E-1	-9.0456E0	-9.04095E0	5.00679E-3	9.36031E-2	2.73057E1	-3.26585E1	-3.26428E1	2.68208E1	1.1929E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.99E-1