[Scan]
initial_time=2015-12-18T20:51:45
final_time=2015-12-18T20:52:04
ip_count=19
run=1020
dataset=3
scan=182
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09704E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.80504E-1
ql1_imon=1.36618E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.88091E-9
ql3_vset=
ql3_vmon=-9.04577E0
ql3_imon=1.69371E-9
ql4_vset=
ql4_vmon=-9.04062E0
ql4_imon=-2.18868E-11
mult1=-1.00534E-8
mult2=-2.91622E-9
rf_tmon=-4.66263E-3
rf_agc=3.37662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.64932E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.17551E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=1.09458E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42329E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.39331E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.03964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.40183E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.29779E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.32276E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.49466E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=3.4008E-8
tplens_vset=1.4E-1
tplens_vmon=1.58008E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.4963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.02719E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=8.53548E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.20029E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58539E0
os_ea2_imon=-6.9884E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0605E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53886E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.4523E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.32583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.10153E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.29546E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=8.16971E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-8.31936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.52181E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92683E3
multa_neg_imon=6.71622E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.00645E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33291E1
os_fil1_imon=9.43531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65444E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=6.7524E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76171E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67916E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.89906E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22585E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.23873E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.80551E-1	-8.96168E-1	-9.04615E0	-9.04086E0	5.29289E-3	9.34601E-2	2.72781E1	-3.26549E1	-3.2629E1	2.67962E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9874E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.80623E-1	-8.96144E-1	-9.04598E0	-9.04081E0	5.4121E-3	9.36508E-2	2.73303E1	-3.26705E1	-3.2632E1	2.67812E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.80575E-1	-8.96239E-1	-9.04582E0	-9.04047E0	5.07832E-3	9.35316E-2	2.73117E1	-3.26669E1	-3.26206E1	2.68106E1	1.19184E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.9671E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.80527E-1	-8.95977E-1	-9.04572E0	-9.04069E0	5.24521E-3	9.35078E-2	2.73305E1	-3.26549E1	-3.26478E1	2.68106E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.97394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.80432E-1	-8.96263E-1	-9.04539E0	-9.04119E0	5.29289E-3	9.35555E-2	2.72853E1	-3.2653E1	-3.26248E1	2.68047E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.80694E-1	-8.9612E-1	-9.04562E0	-9.04109E0	5.48363E-3	9.35793E-2	2.72955E1	-3.26741E1	-3.26452E1	2.68016E1	1.19137E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.80671E-1	-8.96525E-1	-9.04524E0	-9.04098E0	5.55515E-3	9.34124E-2	2.73069E1	-3.26356E1	-3.26182E1	2.68418E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.80456E-1	-8.96215E-1	-9.04539E0	-9.04081E0	5.24521E-3	9.35793E-2	2.7352E1	-3.26543E1	-3.26404E1	2.68196E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.8048E-1	-8.96525E-1	-9.04558E0	-9.04086E0	5.31673E-3	9.3317E-2	2.73123E1	-3.26518E1	-3.26032E1	2.6816E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.80432E-1	-8.96358E-1	-9.0457E0	-9.04086E0	5.10216E-3	9.39131E-2	2.72868E1	-3.26685E1	-3.26248E1	2.68088E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.8048E-1	-8.96287E-1	-9.0457E0	-9.04098E0	5.17368E-3	9.35555E-2	2.72883E1	-3.26711E1	-3.2614E1	2.68064E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.80599E-1	-8.96096E-1	-9.04567E0	-9.04078E0	5.38826E-3	9.36031E-2	2.73045E1	-3.26711E1	-3.26326E1	2.68142E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.80599E-1	-8.96335E-1	-9.04605E0	-9.04071E0	5.65052E-3	9.36508E-2	2.72775E1	-3.26681E1	-3.26452E1	2.6831E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.80408E-1	-8.96239E-1	-9.04586E0	-9.0409E0	5.07832E-3	9.36508E-2	2.73665E1	-3.26625E1	-3.26231E1	2.68018E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.80694E-1	-8.96239E-1	-9.04574E0	-9.04057E0	5.03063E-3	9.36031E-2	2.73388E1	-3.26697E1	-3.26229E1	2.67864E1	1.1929E-7	2.51783E-3	2.51783E-3	6.3074E-3	2.99753E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.80313E-1	-8.96263E-1	-9.04565E0	-9.04114E0	4.86374E-3	9.35793E-2	2.73063E1	-3.26362E1	-3.26158E1	2.67974E1	1.1929E-7	2.52179E-3	2.52179E-3	6.30171E-3	2.989E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.8048E-1	-8.96311E-1	-9.04551E0	-9.04098E0	5.4121E-3	9.33647E-2	2.7278E1	-3.26561E1	-3.26266E1	2.68046E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0968E0	-8.80766E-1	-8.96192E-1	-9.04553E0	-9.04124E0	5.17368E-3	9.33409E-2	2.73187E1	-3.26762E1	-3.26236E1	2.68227E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.80837E-1	-8.9643E-1	-9.04586E0	-9.04086E0	5.22137E-3	9.34362E-2	2.73183E1	-3.26711E1	-3.26362E1	2.68148E1	1.1924E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09704E0	-8.80504E-1	-8.96168E-1	-9.04577E0	-9.04062E0	4.98295E-3	9.34124E-2	2.73135E1	-3.26579E1	-3.26152E1	2.68004E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.99E-1