[Scan]
initial_time=2015-12-18T20:52:12
final_time=2015-12-18T20:52:31
ip_count=19
run=1020
dataset=3
scan=183
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.80527E-1
ql1_imon=1.35413E-8
ql2_vset=
ql2_vmon=-8.96263E-1
ql2_imon=1.91995E-9
ql3_vset=
ql3_vmon=-9.04586E0
ql3_imon=1.35866E-9
ql4_vset=
ql4_vmon=-9.04129E0
ql4_imon=1.76311E-11
mult1=-1.02581E-8
mult2=-2.80844E-9
rf_tmon=-4.83086E-3
rf_agc=3.35138E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.71641E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=2.0065E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.1802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=1.1031E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42904E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.39258E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.39858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.34573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=9.59265E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93269E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.39979E-8
tplens_vset=1.4E-1
tplens_vmon=1.61019E0
tplens_imon=1.068E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.5667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.04505E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=8.47872E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33483E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57835E0
os_ea2_imon=-5.51693E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61695E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.45914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.31803E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.36037E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.15642E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.31758E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.75412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.74473E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.44024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08368E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65711E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3181E1
cs_fil1_imon=7.76151E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70164E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68097E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63086E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22648E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18757E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.80194E-1	-8.96311E-1	-9.04586E0	-9.04114E0	5.22137E-3	9.34601E-2	2.72847E1	-3.26621E1	-3.26188E1	2.67986E1	1.19238E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.9874E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80289E-1	-8.96549E-1	-9.04567E0	-9.04093E0	5.19753E-3	9.35793E-2	2.73027E1	-3.2653E1	-3.26825E1	2.68202E1	1.19238E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.80408E-1	-8.96525E-1	-9.04558E0	-9.04109E0	5.17368E-3	9.36508E-2	2.72779E1	-3.2637E1	-3.25982E1	2.68099E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.80575E-1	-8.96168E-1	-9.04548E0	-9.04126E0	5.4121E-3	9.33886E-2	2.72696E1	-3.26717E1	-3.2614E1	2.68142E1	1.1924E-7	2.51919E-3	2.51919E-3	6.30212E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09348E0	-8.80432E-1	-8.9612E-1	-9.04558E0	-9.04129E0	5.29289E-3	9.32217E-2	2.72931E1	-3.26386E1	-3.25984E1	2.67992E1	1.19237E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.80432E-1	-8.96311E-1	-9.0457E0	-9.04117E0	5.19753E-3	9.34124E-2	2.73175E1	-3.26738E1	-3.26148E1	2.68204E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.80551E-1	-8.96096E-1	-9.04596E0	-9.04143E0	5.17368E-3	9.35555E-2	2.72895E1	-3.26434E1	-3.26224E1	2.67968E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3445E-3	2.99845E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.80384E-1	-8.96358E-1	-9.04582E0	-9.0409E0	5.00679E-3	9.34839E-2	2.73105E1	-3.26428E1	-3.2647E1	2.67884E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.80647E-1	-8.96239E-1	-9.04603E0	-9.04129E0	5.07832E-3	9.31263E-2	2.73135E1	-3.26693E1	-3.26398E1	2.6831E1	1.19186E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.80599E-1	-8.96382E-1	-9.04605E0	-9.04117E0	5.05447E-3	9.34839E-2	2.73375E1	-3.26639E1	-3.2626E1	2.67944E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.80575E-1	-8.96144E-1	-9.04586E0	-9.04107E0	5.34058E-3	9.32217E-2	2.72925E1	-3.26687E1	-3.26518E1	2.6825E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.80361E-1	-8.96382E-1	-9.04574E0	-9.04107E0	5.36442E-3	9.31263E-2	2.72781E1	-3.26789E1	-3.26344E1	2.68118E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.80671E-1	-8.96406E-1	-9.04593E0	-9.04121E0	5.38826E-3	9.35316E-2	2.73092E1	-3.26809E1	-3.26331E1	2.67932E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.8048E-1	-8.9612E-1	-9.04586E0	-9.04102E0	5.53131E-3	9.3174E-2	2.72889E1	-3.26609E1	-3.26086E1	2.68088E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.80742E-1	-8.9643E-1	-9.0457E0	-9.04083E0	5.19753E-3	9.32693E-2	2.72791E1	-3.26785E1	-3.26531E1	2.68099E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.80575E-1	-8.96025E-1	-9.04608E0	-9.04081E0	4.95911E-3	9.35793E-2	2.73309E1	-3.26242E1	-3.25978E1	2.67746E1	1.19239E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.98665E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.80408E-1	-8.96215E-1	-9.04586E0	-9.04088E0	5.00679E-3	9.35078E-2	2.73147E1	-3.26458E1	-3.26332E1	2.68172E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.80241E-1	-8.96478E-1	-9.04605E0	-9.04105E0	5.07832E-3	9.32932E-2	2.73075E1	-3.26343E1	-3.26219E1	2.6795E1	1.19238E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.80551E-1	-8.9643E-1	-9.04601E0	-9.04112E0	5.05447E-3	9.3317E-2	2.72504E1	-3.26573E1	-3.26416E1	2.6786E1	1.19239E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.80527E-1	-8.96263E-1	-9.04586E0	-9.04129E0	4.74453E-3	9.34362E-2	2.73099E1	-3.26506E1	-3.26422E1	2.67776E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1