[Scan]
initial_time=2015-12-18T20:52:38
final_time=2015-12-18T20:52:58
ip_count=19
run=1020
dataset=3
scan=184
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.80337E-1
ql1_imon=1.35299E-8
ql2_vset=
ql2_vmon=-8.96335E-1
ql2_imon=1.92475E-9
ql3_vset=
ql3_vmon=-9.04574E0
ql3_imon=1.28387E-9
ql4_vset=
ql4_vmon=-9.04114E0
ql4_imon=-1.30534E-11
mult1=-9.921E-9
mult2=-3.20566E-9
rf_tmon=-4.96905E-3
rf_agc=3.30993E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=1.6651E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.66393E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55616E1
cs_ef1b_imon=3.20218E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.09409E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43024E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.39582E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.04036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.39448E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=2.36231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63918E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=9.28262E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91836E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=1.9617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.3925E-8
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98573E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.00591E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=8.42464E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53509E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.45842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.27164E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=8.14352E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.69284E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.50898E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33295E1
os_fil1_imon=9.44246E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07732E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65265E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.61735E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59953E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66507E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20539E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96986E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49992E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.80194E-1	-8.9643E-1	-9.04584E0	-9.04098E0	5.14984E-3	9.36031E-2	2.72927E1	-3.26644E1	-3.26172E1	2.67914E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.80313E-1	-8.96502E-1	-9.04603E0	-9.04136E0	5.29289E-3	9.33886E-2	2.72996E1	-3.26701E1	-3.26315E1	2.67932E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.80313E-1	-8.96358E-1	-9.0457E0	-9.04143E0	5.36442E-3	9.3317E-2	2.73068E1	-3.26515E1	-3.26393E1	2.68343E1	1.1929E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99348E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.80098E-1	-8.96788E-1	-9.04567E0	-9.04117E0	5.00679E-3	9.31501E-2	2.73033E1	-3.2675E1	-3.26148E1	2.6819E1	1.1929E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.80003E-1	-8.96645E-1	-9.04562E0	-9.04098E0	5.29289E-3	9.30071E-2	2.73069E1	-3.26356E1	-3.26074E1	2.68076E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.80194E-1	-8.9643E-1	-9.04579E0	-9.04112E0	5.36442E-3	9.33886E-2	2.73155E1	-3.26608E1	-3.26283E1	2.68036E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.80146E-1	-8.96549E-1	-9.04598E0	-9.04114E0	5.29289E-3	9.33409E-2	2.73088E1	-3.2651E1	-3.26204E1	2.68232E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.00852E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09696E0	-8.80218E-1	-8.96502E-1	-9.0456E0	-9.04088E0	5.19753E-3	9.34601E-2	2.73242E1	-3.26503E1	-3.26289E1	2.68026E1	1.1929E-7	2.51045E-3	2.51045E-3	6.33592E-3	2.98361E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.80051E-1	-8.96573E-1	-9.04539E0	-9.04071E0	5.48363E-3	9.3174E-2	2.7291E1	-3.26719E1	-3.26144E1	2.683E1	1.1929E-7	2.51886E-3	2.51886E-3	6.31779E-3	2.98768E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.79884E-1	-8.96502E-1	-9.0456E0	-9.04078E0	5.34058E-3	9.36508E-2	2.7288E1	-3.26331E1	-3.26366E1	2.68094E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01742E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.8017E-1	-8.96263E-1	-9.04574E0	-9.04088E0	5.36442E-3	9.3317E-2	2.73261E1	-3.26591E1	-3.26152E1	2.6798E1	1.1929E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.03027E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.80003E-1	-8.9612E-1	-9.04565E0	-9.04119E0	5.65052E-3	9.3174E-2	2.72841E1	-3.26579E1	-3.26344E1	2.68166E1	1.19186E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.80146E-1	-8.9612E-1	-9.04548E0	-9.04098E0	5.22137E-3	9.33409E-2	2.72979E1	-3.26687E1	-3.26314E1	2.67904E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.80265E-1	-8.9643E-1	-9.04531E0	-9.04121E0	5.55515E-3	9.34839E-2	2.72909E1	-3.26773E1	-3.26402E1	2.68011E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.80456E-1	-8.96549E-1	-9.04562E0	-9.04098E0	5.50747E-3	9.34601E-2	2.73117E1	-3.26434E1	-3.26116E1	2.68202E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.80575E-1	-8.9643E-1	-9.0456E0	-9.04083E0	5.38826E-3	9.34362E-2	2.73308E1	-3.26829E1	-3.26468E1	2.67824E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.03712E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.80432E-1	-8.96263E-1	-9.04558E0	-9.04105E0	5.76973E-3	9.34124E-2	2.73195E1	-3.2641E1	-3.26627E1	2.67794E1	1.19237E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01742E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.80575E-1	-8.96072E-1	-9.04596E0	-9.04086E0	5.4121E-3	9.36747E-2	2.73057E1	-3.26613E1	-3.26323E1	2.68395E1	1.1929E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.03712E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.80766E-1	-8.96215E-1	-9.04584E0	-9.04112E0	5.50747E-3	9.35316E-2	2.73219E1	-3.26873E1	-3.26236E1	2.67854E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.01733E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.80337E-1	-8.96335E-1	-9.04574E0	-9.04114E0	5.4121E-3	9.33409E-2	2.73045E1	-3.26543E1	-3.26026E1	2.67992E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00041E-1