[Scan]
initial_time=2015-12-18T20:53:05
final_time=2015-12-18T20:53:24
ip_count=19
run=1020
dataset=3
scan=185
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.80003E-1
ql1_imon=1.34546E-8
ql2_vset=
ql2_vmon=-8.96192E-1
ql2_imon=1.90746E-9
ql3_vset=
ql3_vmon=-9.04579E0
ql3_imon=1.0855E-9
ql4_vset=
ql4_vmon=-9.0409E0
ql4_imon=3.96967E-12
mult1=-1.03183E-8
mult2=-2.86433E-9
rf_tmon=-1.88081E-3
rf_agc=3.45172E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.70375E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64852E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.96988E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52781E1
cs_ef1b_imon=3.15767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=1.09423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41739E0
lens1_imon=2.70607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=3.00163E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.39189E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.06071E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.39514E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.3118E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=2.34789E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.4044E-8
tplens_vset=1.4E-1
tplens_vmon=1.61076E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.52497E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.18268E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23322E0
ionrepsh_imon=8.47885E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55767E0
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09047E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36038E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.45759E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.08834E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.33147E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=8.13782E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10987E0
cs_ionaccel_imon=-9.55115E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56463E1
einzel_imon=7.75039E-6
window_vset=0.0E0
window_vmon=1.89305E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82598E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86796E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.62231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.62774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60635E0
defgridb_imon=6.00126E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33284E1
os_fil1_imon=9.43445E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07989E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65359E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31847E1
cs_fil1_imon=7.78553E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.67172E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67101E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6358E-2
os_fil2_imon=-2.46067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85463E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30651E-1
cs_fil2_imon=-3.06305E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.588E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87008E-1
res40_imon=-2.39734E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80337E-1	-8.96645E-1	-9.04593E0	-9.04109E0	5.26905E-3	9.36031E-2	2.72925E1	-3.26723E1	-3.26356E1	2.68578E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
2.0E0	3.6E1	1.0E0	3.16E2	1.6E2	-2.09518E0	-8.80075E-1	-8.96358E-1	-9.04579E0	-9.04126E0	5.48363E-3	9.3627E-2	2.73057E1	-3.27393E1	-3.26236E1	2.67605E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.8017E-1	-8.96263E-1	-9.04586E0	-9.04129E0	5.34058E-3	9.3317E-2	2.73334E1	-3.26514E1	-3.26685E1	2.67804E1	1.19237E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.01209E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.80361E-1	-8.96239E-1	-9.04596E0	-9.04126E0	5.10216E-3	9.35078E-2	2.73153E1	-3.26789E1	-3.26098E1	2.67794E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.80408E-1	-8.96263E-1	-9.04562E0	-9.04121E0	5.31673E-3	9.35316E-2	2.72817E1	-3.26621E1	-3.26398E1	2.68124E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.80313E-1	-8.96645E-1	-9.04562E0	-9.04124E0	5.29289E-3	9.37223E-2	2.73027E1	-3.26512E1	-3.26086E1	2.68178E1	1.1929E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.80384E-1	-8.96573E-1	-9.04574E0	-9.04098E0	5.36442E-3	9.35078E-2	2.73171E1	-3.2641E1	-3.26392E1	2.67998E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.8017E-1	-8.96621E-1	-9.04584E0	-9.04102E0	5.43594E-3	9.3627E-2	2.72931E1	-3.26591E1	-3.2611E1	2.68376E1	1.19186E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.80194E-1	-8.96573E-1	-9.04613E0	-9.04088E0	5.29289E-3	9.38416E-2	2.73346E1	-3.26567E1	-3.26284E1	2.68154E1	1.19186E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.80527E-1	-8.96502E-1	-9.04591E0	-9.04086E0	5.53131E-3	9.36031E-2	2.72973E1	-3.26579E1	-3.2635E1	2.68112E1	1.19239E-7	2.5131E-3	2.5131E-3	6.29128E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.80575E-1	-8.96668E-1	-9.0457E0	-9.04071E0	5.67436E-3	9.3174E-2	2.72901E1	-3.26651E1	-3.26224E1	2.68046E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.80337E-1	-8.96549E-1	-9.04582E0	-9.04112E0	5.67436E-3	9.31025E-2	2.72774E1	-3.26201E1	-3.26301E1	2.68226E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.80289E-1	-8.96597E-1	-9.04584E0	-9.04109E0	5.55515E-3	9.34601E-2	2.72574E1	-3.26774E1	-3.26499E1	2.67836E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.80051E-1	-8.96549E-1	-9.0457E0	-9.04062E0	5.55515E-3	9.35793E-2	2.73417E1	-3.26874E1	-3.26343E1	2.67944E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.80194E-1	-8.96502E-1	-9.04593E0	-9.04081E0	5.67436E-3	9.3174E-2	2.7321E1	-3.26842E1	-3.26236E1	2.6807E1	1.19238E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.79955E-1	-8.96883E-1	-9.04577E0	-9.04093E0	5.31673E-3	9.33886E-2	2.73116E1	-3.26773E1	-3.26337E1	2.67974E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.80408E-1	-8.96645E-1	-9.0461E0	-9.041E0	5.38826E-3	9.34124E-2	2.72851E1	-3.26675E1	-3.26379E1	2.68193E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.80265E-1	-8.96454E-1	-9.04579E0	-9.041E0	5.65052E-3	9.34601E-2	2.73157E1	-3.26897E1	-3.25995E1	2.68118E1	1.1929E-7	2.51562E-3	2.51562E-3	6.30311E-3	3.01917E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.80075E-1	-8.96144E-1	-9.04572E0	-9.04081E0	5.55515E-3	9.35078E-2	2.72921E1	-3.26555E1	-3.26596E1	2.68065E1	1.1929E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.80003E-1	-8.96192E-1	-9.04579E0	-9.0409E0	5.29289E-3	9.34362E-2	2.73033E1	-3.26567E1	-3.26356E1	2.67926E1	1.19239E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.02511E-1