[Scan]
initial_time=2015-12-18T20:55:45
final_time=2015-12-18T20:56:04
ip_count=19
run=1020
dataset=3
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.79216E-1
ql1_imon=1.33764E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.92022E-9
ql3_vset=
ql3_vmon=-9.04601E0
ql3_imon=6.42812E-10
ql4_vset=
ql4_vmon=-9.04114E0
ql4_imon=3.25203E-11
mult1=-1.03217E-8
mult2=-2.70159E-9
rf_tmon=-4.50324E-3
rf_agc=3.34936E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=1.69269E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.78394E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20066E1
lens5a_imon=1.97271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53172E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.09564E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39911E0
lens1_imon=2.81933E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.39508E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.05045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.39461E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.32771E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27215E0
cs_ionrep_imon=9.28229E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93693E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.9498E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.40219E-8
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-4.36924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26229E1
iondef3_imon=1.46764E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26787E1
iondef2_imon=1.52214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.09238E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=8.56733E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33947E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5323E0
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53285E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.46239E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72794E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.687E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.29104E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=8.11436E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-4.49916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.2082E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.42024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08723E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65925E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=6.42804E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66453E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73567E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71285E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22602E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19186E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65008E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.79431E-1	-8.96525E-1	-9.04579E0	-9.04114E0	5.10216E-3	9.32217E-2	2.73243E1	-3.26969E1	-3.2647E1	2.68134E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98481E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.79526E-1	-8.96478E-1	-9.0457E0	-9.04109E0	5.26905E-3	9.33886E-2	2.73135E1	-3.26633E1	-3.26242E1	2.68016E1	1.19239E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.79598E-1	-8.96311E-1	-9.04553E0	-9.04105E0	5.36442E-3	9.31263E-2	2.73027E1	-3.26732E1	-3.26284E1	2.67944E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9952E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.7955E-1	-8.96573E-1	-9.04548E0	-9.04117E0	5.55515E-3	9.32932E-2	2.72889E1	-3.26476E1	-3.26332E1	2.68178E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.98222E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.79693E-1	-8.96311E-1	-9.04553E0	-9.04107E0	5.29289E-3	9.31025E-2	2.73153E1	-3.26615E1	-3.26416E1	2.68154E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.79622E-1	-8.96096E-1	-9.04553E0	-9.041E0	5.36442E-3	9.30548E-2	2.72799E1	-3.26693E1	-3.26386E1	2.68058E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09688E0	-8.79812E-1	-8.96478E-1	-9.04579E0	-9.04121E0	5.05447E-3	9.33886E-2	2.72751E1	-3.26633E1	-3.26326E1	2.68394E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.79812E-1	-8.96668E-1	-9.04567E0	-9.04117E0	5.4121E-3	9.29356E-2	2.73177E1	-3.26603E1	-3.26296E1	2.68124E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.79765E-1	-8.96168E-1	-9.04582E0	-9.04133E0	5.29289E-3	9.30786E-2	2.73039E1	-3.26729E1	-3.2629E1	2.68172E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97704E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.79645E-1	-8.96358E-1	-9.04601E0	-9.04109E0	5.45979E-3	9.32932E-2	2.73201E1	-3.26356E1	-3.26488E1	2.67866E1	1.19186E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.79645E-1	-8.96382E-1	-9.04605E0	-9.04136E0	5.43594E-3	9.33886E-2	2.73165E1	-3.26819E1	-3.26206E1	2.6798E1	1.1929E-7	2.51771E-3	2.51771E-3	6.28006E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.79645E-1	-8.96382E-1	-9.04593E0	-9.04114E0	5.45979E-3	9.34839E-2	2.73045E1	-3.26448E1	-3.26158E1	2.68233E1	1.19188E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.7955E-1	-8.96072E-1	-9.04601E0	-9.04121E0	5.4121E-3	9.36508E-2	2.73299E1	-3.26286E1	-3.25961E1	2.68264E1	1.1929E-7	2.50867E-3	2.50867E-3	6.32328E-3	2.99093E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.7955E-1	-8.96239E-1	-9.0461E0	-9.04114E0	5.31673E-3	9.3317E-2	2.72805E1	-3.26609E1	-3.26404E1	2.6804E1	1.1929E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.9917E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.79574E-1	-8.96001E-1	-9.04584E0	-9.04071E0	5.43594E-3	9.32455E-2	2.73275E1	-3.26673E1	-3.26396E1	2.68279E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.79645E-1	-8.96358E-1	-9.04601E0	-9.04088E0	5.29289E-3	9.34362E-2	2.72991E1	-3.26657E1	-3.265E1	2.67577E1	1.1929E-7	2.51225E-3	2.51225E-3	6.34588E-3	2.99E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.7955E-1	-8.96549E-1	-9.04589E0	-9.041E0	5.36442E-3	9.35793E-2	2.73682E1	-3.2644E1	-3.26368E1	2.6819E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.79478E-1	-8.96525E-1	-9.04603E0	-9.04095E0	5.48363E-3	9.36508E-2	2.73021E1	-3.26478E1	-3.26231E1	2.67854E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.79407E-1	-8.96382E-1	-9.04615E0	-9.04105E0	5.45979E-3	9.35555E-2	2.73493E1	-3.2675E1	-3.26514E1	2.67746E1	1.1929E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.02115E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.79216E-1	-8.96597E-1	-9.04601E0	-9.04114E0	5.48363E-3	9.32932E-2	2.72794E1	-3.26787E1	-3.26229E1	2.687E1	1.19186E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00302E-1