[Scan]
initial_time=2015-12-18T20:56:11
final_time=2015-12-18T20:56:31
ip_count=19
run=1020
dataset=3
scan=192
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.79025E-1
ql1_imon=1.33894E-8
ql2_vset=
ql2_vmon=-8.96502E-1
ql2_imon=1.8775E-9
ql3_vset=
ql3_vmon=-9.04605E0
ql3_imon=6.2176E-10
ql4_vset=
ql4_vmon=-9.041E0
ql4_imon=1.87635E-11
mult1=-9.64122E-9
mult2=-2.6723E-9
rf_tmon=-5.89574E-3
rf_agc=3.27487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.68636E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52673E1
cs_ef1b_imon=3.16506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=1.08075E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35453E0
lens1_imon=2.54136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.04541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=1.39966E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11622E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=2.34285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=9.43403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91832E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.39342E-8
tplens_vset=1.4E-1
tplens_vmon=1.615E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.48379E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.11636E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=8.60128E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55551E0
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.89325E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=3.45374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.09576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.0739E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67644E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.28958E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=8.11988E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-8.78788E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.25151E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=6.83125E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.17515E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.98626E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.45351E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07521E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65395E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=7.55728E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.63557E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66595E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92475E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22696E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.01742E-1
chamber_ion_pmon=1.19237E-7
chamber_cvt_pmon=2.51136E-3
foreline_cvt_pmon=2.51136E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.54487E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.7924E-1	-8.96096E-1	-9.04613E0	-9.041E0	5.57899E-3	9.36508E-2	2.73135E1	-3.26819E1	-3.26182E1	2.67722E1	1.1929E-7	2.52027E-3	2.52027E-3	6.34099E-3	2.99348E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.7924E-1	-8.96358E-1	-9.04601E0	-9.04102E0	5.29289E-3	9.36747E-2	2.73225E1	-3.26597E1	-3.26356E1	2.68274E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.79216E-1	-8.96192E-1	-9.0462E0	-9.04119E0	5.50747E-3	9.36031E-2	2.73027E1	-3.26461E1	-3.26384E1	2.6801E1	1.19237E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.01209E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.79288E-1	-8.96525E-1	-9.04601E0	-9.04117E0	5.38826E-3	9.35078E-2	2.72921E1	-3.26443E1	-3.26325E1	2.68204E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.79407E-1	-8.9612E-1	-9.04586E0	-9.04117E0	5.22137E-3	9.37223E-2	2.72794E1	-3.26585E1	-3.26401E1	2.68007E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.79169E-1	-8.96311E-1	-9.04596E0	-9.04117E0	5.05447E-3	9.32693E-2	2.72992E1	-3.26561E1	-3.26154E1	2.67677E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.79288E-1	-8.96335E-1	-9.04596E0	-9.04124E0	5.10216E-3	9.31263E-2	2.73009E1	-3.26458E1	-3.26356E1	2.68136E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.79145E-1	-8.96478E-1	-9.04603E0	-9.04133E0	5.26905E-3	9.31978E-2	2.72991E1	-3.26458E1	-3.26296E1	2.67939E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.79288E-1	-8.96168E-1	-9.04615E0	-9.04129E0	5.34058E-3	9.30786E-2	2.73105E1	-3.26446E1	-3.26302E1	2.68435E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.79145E-1	-8.95929E-1	-9.04593E0	-9.04102E0	5.24521E-3	9.31263E-2	2.73147E1	-3.26344E1	-3.2626E1	2.67842E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.79145E-1	-8.95977E-1	-9.04605E0	-9.0414E0	5.38826E-3	9.32932E-2	2.73093E1	-3.26663E1	-3.2629E1	2.6792E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.79788E-1	-8.95977E-1	-9.04586E0	-9.04088E0	5.36442E-3	9.33409E-2	2.72991E1	-3.26434E1	-3.26212E1	2.68028E1	1.1929E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.79097E-1	-8.95953E-1	-9.04603E0	-9.04112E0	5.4121E-3	9.34124E-2	2.72968E1	-3.26419E1	-3.26443E1	2.68112E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.79216E-1	-8.96287E-1	-9.04608E0	-9.04124E0	5.38826E-3	9.32217E-2	2.72818E1	-3.26591E1	-3.26474E1	2.68178E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01609E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.79025E-1	-8.96358E-1	-9.04584E0	-9.04105E0	4.88758E-3	9.32932E-2	2.73033E1	-3.26549E1	-3.2659E1	2.68094E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.79192E-1	-8.96287E-1	-9.0456E0	-9.04093E0	4.91142E-3	9.32217E-2	2.72886E1	-3.26573E1	-3.26366E1	2.68279E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.79097E-1	-8.96668E-1	-9.0456E0	-9.04105E0	4.93526E-3	9.32455E-2	2.73198E1	-3.26508E1	-3.26236E1	2.68106E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.79431E-1	-8.96192E-1	-9.04555E0	-9.04086E0	5.05447E-3	9.34362E-2	2.73016E1	-3.26649E1	-3.26419E1	2.67763E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00453E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.78859E-1	-8.96215E-1	-9.0457E0	-9.04074E0	5.03063E-3	9.33886E-2	2.72961E1	-3.26747E1	-3.26464E1	2.68358E1	1.1924E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.99594E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.79025E-1	-8.96502E-1	-9.04605E0	-9.041E0	5.03063E-3	9.3627E-2	2.73405E1	-3.26809E1	-3.26231E1	2.67644E1	1.19237E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.01742E-1