[Scan]
initial_time=2015-12-18T20:56:38
final_time=2015-12-18T20:56:58
ip_count=19
run=1020
dataset=3
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.79192E-1
ql1_imon=1.33281E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.93346E-9
ql3_vset=
ql3_vmon=-9.0456E0
ql3_imon=5.24998E-10
ql4_vset=
ql4_vmon=-9.04119E0
ql4_imon=2.52008E-11
mult1=-1.02236E-8
mult2=-2.7687E-9
rf_tmon=-5.70308E-3
rf_agc=3.12286E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.66835E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20361E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53316E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=1.09553E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42904E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=3.00685E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03486E1
cs_ea2_imon=1.3915E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84088E1
cs_ef1a_imon=3.03352E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.39393E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.29563E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.34825E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27433E0
cs_ionrep_imon=9.57462E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.40183E-8
tplens_vset=1.4E-1
tplens_vmon=1.57414E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26523E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.08528E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.20117E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74946E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5477E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10561E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.61094E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.44545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72812E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.28626E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.12723E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.64958E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.44378E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65595E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31851E1
cs_fil1_imon=7.37708E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80976E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66159E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72625E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.3048E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.79407E-1	-8.96549E-1	-9.04617E0	-9.04095E0	5.45979E-3	9.3317E-2	2.73243E1	-3.26729E1	-3.25972E1	2.68106E1	1.19186E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.9874E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.79478E-1	-8.96382E-1	-9.04605E0	-9.04086E0	5.24521E-3	9.35555E-2	2.72907E1	-3.26654E1	-3.26106E1	2.67899E1	1.1929E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09696E0	-8.79669E-1	-8.96096E-1	-9.04605E0	-9.04095E0	5.4121E-3	9.32932E-2	2.7319E1	-3.26683E1	-3.26335E1	2.67891E1	1.1929E-7	2.52022E-3	2.52022E-3	6.32174E-3	3.02066E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.79359E-1	-8.96096E-1	-9.04577E0	-9.04107E0	5.38826E-3	9.3174E-2	2.72992E1	-3.2662E1	-3.26561E1	2.6813E1	1.1929E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.79359E-1	-8.96263E-1	-9.04586E0	-9.04138E0	5.34058E-3	9.35078E-2	2.73027E1	-3.26646E1	-3.26462E1	2.68316E1	1.19238E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.79192E-1	-8.96168E-1	-9.04579E0	-9.041E0	5.24521E-3	9.32932E-2	2.73153E1	-3.26518E1	-3.26482E1	2.68046E1	1.19237E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.04156E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.79192E-1	-8.96001E-1	-9.04562E0	-9.04109E0	5.24521E-3	9.34124E-2	2.73243E1	-3.26753E1	-3.26482E1	2.67998E1	1.19188E-7	2.51417E-3	2.51417E-3	6.28592E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.7924E-1	-8.96168E-1	-9.04582E0	-9.04145E0	5.43594E-3	9.32693E-2	2.73267E1	-3.26624E1	-3.2626E1	2.68163E1	1.1929E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.79145E-1	-8.96168E-1	-9.04584E0	-9.04136E0	5.53131E-3	9.32693E-2	2.7307E1	-3.26553E1	-3.26247E1	2.67864E1	1.1924E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.99343E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.79049E-1	-8.9612E-1	-9.04586E0	-9.04119E0	5.53131E-3	9.33409E-2	2.73195E1	-3.26392E1	-3.26254E1	2.68292E1	1.19235E-7	2.51527E-3	2.51527E-3	6.3016E-3	3.02303E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.79169E-1	-8.96263E-1	-9.04567E0	-9.04112E0	5.60284E-3	9.36985E-2	2.73187E1	-3.26667E1	-3.26431E1	2.67962E1	1.1929E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.78954E-1	-8.96215E-1	-9.04586E0	-9.04083E0	5.14984E-3	9.36747E-2	2.73138E1	-3.26619E1	-3.26388E1	2.68209E1	1.1929E-7	2.51847E-3	2.51847E-3	6.28056E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.78954E-1	-8.9612E-1	-9.04601E0	-9.04105E0	5.60284E-3	9.35078E-2	2.73351E1	-3.26719E1	-3.26248E1	2.67878E1	1.1924E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.01862E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.79025E-1	-8.96168E-1	-9.0461E0	-9.04098E0	5.126E-3	9.3627E-2	2.73093E1	-3.26386E1	-3.2641E1	2.67908E1	1.19238E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.02659E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09704E0	-8.79192E-1	-8.96287E-1	-9.04593E0	-9.04098E0	5.53131E-3	9.38177E-2	2.73659E1	-3.26744E1	-3.26189E1	2.67896E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.79002E-1	-8.96382E-1	-9.04593E0	-9.041E0	5.57899E-3	9.35793E-2	2.73135E1	-3.26554E1	-3.2638E1	2.68208E1	1.19137E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.7924E-1	-8.96382E-1	-9.04596E0	-9.04081E0	5.29289E-3	9.36985E-2	2.73069E1	-3.26957E1	-3.26308E1	2.67776E1	1.19237E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.79216E-1	-8.96335E-1	-9.04598E0	-9.04093E0	5.48363E-3	9.31978E-2	2.72744E1	-3.26417E1	-3.26243E1	2.68076E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9926E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-8.7893E-1	-8.96215E-1	-9.04582E0	-9.04088E0	5.55515E-3	9.35316E-2	2.73086E1	-3.26661E1	-3.26502E1	2.68334E1	1.1924E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.79192E-1	-8.96215E-1	-9.0456E0	-9.04119E0	5.57899E-3	9.34124E-2	2.72812E1	-3.2675E1	-3.26523E1	2.68184E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.98156E-1