[Scan]
initial_time=2015-12-18T20:57:31
final_time=2015-12-18T20:57:51
ip_count=19
run=1020
dataset=3
scan=195
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.79502E-1
ql1_imon=1.33029E-8
ql2_vset=
ql2_vmon=-8.96215E-1
ql2_imon=1.93083E-9
ql3_vset=
ql3_vmon=-9.04593E0
ql3_imon=5.80537E-10
ql4_vset=
ql4_vmon=-9.0409E0
ql4_imon=4.44293E-11
mult1=-9.16244E-9
mult2=-2.68268E-9
rf_tmon=-4.87893E-3
rf_agc=3.34658E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.69044E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52607E1
cs_ef1b_imon=3.17371E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04441E1
cs_ea1_imon=1.08904E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.04901E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.39276E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30824E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.35042E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=9.53857E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.39006E-8
tplens_vset=1.4E-1
tplens_vmon=1.58135E0
tplens_imon=-5.22853E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26843E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.07006E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=8.52918E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58435E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06041E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40671E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.45734E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72733E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.29439E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=8.12568E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.19175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=7.00429E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.47436E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.44426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06717E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65683E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31809E1
cs_fil1_imon=7.67741E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.7557E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66849E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42194E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76105E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22641E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02545E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.11549E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.79145E-1	-8.96025E-1	-9.04562E0	-9.04126E0	5.60284E-3	9.34839E-2	2.72939E1	-3.26467E1	-3.26366E1	2.68412E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
2.0E0	3.1E1	2.0E0	3.16E2	1.6E2	-2.09557E0	-8.79264E-1	-8.96335E-1	-9.04572E0	-9.041E0	5.62668E-3	9.3174E-2	2.72916E1	-3.26285E1	-3.26272E1	2.681E1	1.1929E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.79145E-1	-8.9612E-1	-9.04567E0	-9.04083E0	5.84126E-3	9.32693E-2	2.73098E1	-3.26437E1	-3.26166E1	2.67962E1	1.1929E-7	2.51952E-3	2.51952E-3	6.3131E-3	3.00794E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.79073E-1	-8.96358E-1	-9.04541E0	-9.04093E0	5.91278E-3	9.35078E-2	2.73063E1	-3.26597E1	-3.26248E1	2.68202E1	1.1929E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.7893E-1	-8.96525E-1	-9.04601E0	-9.04107E0	5.79357E-3	9.34601E-2	2.73405E1	-3.26609E1	-3.26332E1	2.6771E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.79097E-1	-8.96573E-1	-9.04605E0	-9.04117E0	5.60284E-3	9.32932E-2	2.72997E1	-3.26422E1	-3.26086E1	2.68208E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.79002E-1	-8.96144E-1	-9.04601E0	-9.04112E0	5.53131E-3	9.34839E-2	2.72528E1	-3.26645E1	-3.26356E1	2.68004E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.79049E-1	-8.96192E-1	-9.04641E0	-9.041E0	5.79357E-3	9.34124E-2	2.72739E1	-3.26567E1	-3.26092E1	2.68136E1	1.1929E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.79073E-1	-8.96335E-1	-9.04646E0	-9.04083E0	5.8651E-3	9.36747E-2	2.73015E1	-3.26543E1	-3.26158E1	2.68148E1	1.19238E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.79169E-1	-8.96382E-1	-9.04632E0	-9.04095E0	5.43594E-3	9.34839E-2	2.73027E1	-3.26681E1	-3.26092E1	2.68094E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.79335E-1	-8.96239E-1	-9.0461E0	-9.04059E0	5.34058E-3	9.32932E-2	2.73263E1	-3.26567E1	-3.26189E1	2.67897E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.79169E-1	-8.96621E-1	-9.04608E0	-9.04074E0	5.4121E-3	9.33886E-2	2.73033E1	-3.26669E1	-3.26152E1	2.68154E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.79455E-1	-8.96239E-1	-9.04584E0	-9.04083E0	5.55515E-3	9.33409E-2	2.73303E1	-3.26735E1	-3.26074E1	2.68208E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.79455E-1	-8.96287E-1	-9.04603E0	-9.04086E0	5.60284E-3	9.34601E-2	2.72968E1	-3.2682E1	-3.26219E1	2.68034E1	1.19238E-7	2.50789E-3	2.50789E-3	6.32936E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.79335E-1	-8.96096E-1	-9.04598E0	-9.04098E0	5.55515E-3	9.35555E-2	2.72843E1	-3.26842E1	-3.26542E1	2.68142E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.79359E-1	-8.96192E-1	-9.04605E0	-9.04117E0	5.38826E-3	9.34362E-2	2.72983E1	-3.26858E1	-3.26328E1	2.67885E1	1.1929E-7	2.51581E-3	2.51581E-3	6.34661E-3	2.99879E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.79598E-1	-8.9612E-1	-9.04601E0	-9.04067E0	5.03063E-3	9.35793E-2	2.73039E1	-3.26897E1	-3.26298E1	2.68119E1	1.1929E-7	2.52364E-3	2.52364E-3	6.33809E-3	2.99906E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.79574E-1	-8.96144E-1	-9.04593E0	-9.04098E0	5.07832E-3	9.377E-2	2.73075E1	-3.2662E1	-3.26296E1	2.68088E1	1.1918E-7	2.52222E-3	2.52222E-3	6.3074E-3	3.01193E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.7955E-1	-8.96049E-1	-9.04646E0	-9.04112E0	5.53131E-3	9.35316E-2	2.73265E1	-3.26383E1	-3.26499E1	2.67932E1	1.1919E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.02368E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.79502E-1	-8.96215E-1	-9.04593E0	-9.0409E0	5.60284E-3	9.3627E-2	2.72733E1	-3.2638E1	-3.26843E1	2.6795E1	1.1929E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.02545E-1