[Scan]
initial_time=2015-12-18T20:57:58
final_time=2015-12-18T20:58:17
ip_count=19
run=1020
dataset=3
scan=196
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.0885E-4
ql1_vset=
ql1_vmon=-8.79288E-1
ql1_imon=1.32701E-8
ql2_vset=
ql2_vmon=-8.96287E-1
ql2_imon=1.91375E-9
ql3_vset=
ql3_vmon=-9.04577E0
ql3_imon=4.61221E-10
ql4_vset=
ql4_vmon=-9.04114E0
ql4_imon=5.19872E-11
mult1=-9.9812E-9
mult2=-2.75654E-9
rf_tmon=-5.4437E-3
rf_agc=3.24684E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=1.6995E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68968E0
bslens_imon=2.61595E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19457E1
lens5a_imon=1.98178E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04902E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55427E1
cs_ef1b_imon=3.19734E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02327E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=1.08144E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42747E0
lens1_imon=2.81436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64683E1
os_ef1alow_imon=2.98065E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0399E1
cs_ea2_imon=1.39628E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84407E1
cs_ef1a_imon=3.04128E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.39394E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11404E1
os_restr1_imon=4.30178E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15643E1
os_ea1_imon=2.33331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63679E1
os_ef1bup_imon=3.0933E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=9.44803E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01984E1
cs_anode1_imon=1.95144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.40487E-8
tplens_vset=1.4E-1
tplens_vmon=1.55283E0
tplens_imon=-3.07804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26681E1
iondef3_imon=1.47415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.60143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.05048E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24648E0
ionrepsh_imon=8.4148E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.1757E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13147E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.58902E0
os_ea2_imon=-6.2601E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00466E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.20707E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08824E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36929E-1
os_ef2bup_imon=-5.28769E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11024E1
os_restr2_imon=3.46007E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29741E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0194E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.1099E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.3427E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=8.13638E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11143E0
cs_ionaccel_imon=-9.01382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56262E1
einzel_imon=7.75146E-6
window_vset=0.0E0
window_vmon=2.0824E-1
window_imon=-9.50035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39125E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-5.87005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.46018E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.60664E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=6.7152E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40874E0
defgridb_imon=6.07504E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.42832E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07498E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65565E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31867E1
cs_fil1_imon=7.08068E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77534E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66886E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4651E-2
os_fil2_imon=-2.48161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84419E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31669E-1
cs_fil2_imon=-2.27577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22653E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.57939E-1
res40_imon=-2.39467E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.79455E-1	-8.96406E-1	-9.04582E0	-9.041E0	5.38826E-3	9.34124E-2	2.73161E1	-3.26585E1	-3.26303E1	2.67851E1	1.1929E-7	2.52106E-3	2.52106E-3	6.34231E-3	3.00363E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.79717E-1	-8.9612E-1	-9.04615E0	-9.04083E0	5.38826E-3	9.34601E-2	2.73193E1	-3.26703E1	-3.2652E1	2.68298E1	1.19264E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.79526E-1	-8.96192E-1	-9.04608E0	-9.04076E0	5.31673E-3	9.33409E-2	2.73369E1	-3.26434E1	-3.26344E1	2.68024E1					
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.79478E-1	-8.96215E-1	-9.04615E0	-9.04093E0	5.6982E-3	9.31978E-2	2.72943E1	-3.26711E1	-3.2611E1	2.681E1	1.1929E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.79407E-1	-8.96168E-1	-9.04629E0	-9.04098E0	5.24521E-3	9.35316E-2	2.73175E1	-3.26585E1	-3.26402E1	2.6807E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.79455E-1	-8.96335E-1	-9.04615E0	-9.04109E0	5.57899E-3	9.36508E-2	2.73181E1	-3.26343E1	-3.26201E1	2.68076E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.79121E-1	-8.96597E-1	-9.04584E0	-9.04129E0	5.45979E-3	9.36031E-2	2.73117E1	-3.26573E1	-3.26032E1	2.67938E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.79335E-1	-8.9643E-1	-9.04598E0	-9.04107E0	5.29289E-3	9.3317E-2	2.72985E1	-3.26717E1	-3.2629E1	2.68316E1	1.19184E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0201E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.78978E-1	-8.96406E-1	-9.04593E0	-9.04098E0	5.31673E-3	9.34124E-2	2.7308E1	-3.26555E1	-3.26124E1	2.67998E1	1.1929E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.79216E-1	-8.96454E-1	-9.04593E0	-9.041E0	5.29289E-3	9.38177E-2	2.72895E1	-3.26573E1	-3.26242E1	2.68076E1	1.19238E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.79312E-1	-8.96311E-1	-9.04572E0	-9.04102E0	5.22137E-3	9.3627E-2	2.73015E1	-3.26386E1	-3.26254E1	2.68076E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.79383E-1	-8.96668E-1	-9.04586E0	-9.041E0	5.43594E-3	9.35793E-2	2.72925E1	-3.26603E1	-3.26212E1	2.68184E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0148E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.79526E-1	-8.96478E-1	-9.04579E0	-9.04129E0	5.57899E-3	9.35078E-2	2.73213E1	-3.26524E1	-3.2638E1	2.6825E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.7955E-1	-8.96335E-1	-9.04589E0	-9.04105E0	5.60284E-3	9.31263E-2	2.73169E1	-3.26667E1	-3.26679E1	2.67798E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.79788E-1	-8.96335E-1	-9.04565E0	-9.0409E0	5.43594E-3	9.33409E-2	2.72925E1	-3.26699E1	-3.26158E1	2.68292E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.79383E-1	-8.96335E-1	-9.04586E0	-9.04102E0	5.43594E-3	9.35316E-2	2.73093E1	-3.26573E1	-3.26554E1	2.67956E1	1.19238E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.02133E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.79598E-1	-8.96502E-1	-9.04589E0	-9.04064E0	5.36442E-3	9.32693E-2	2.73123E1	-3.26855E1	-3.2617E1	2.68412E1	1.19238E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.79288E-1	-8.96454E-1	-9.04591E0	-9.04102E0	5.43594E-3	9.29594E-2	2.72974E1	-3.26413E1	-3.26319E1	2.68064E1	1.19237E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.04425E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.79264E-1	-8.96382E-1	-9.04591E0	-9.0409E0	5.38826E-3	9.32217E-2	2.73285E1	-3.26741E1	-3.26182E1	2.67908E1	1.1929E-7	2.52131E-3	2.52131E-3	6.2863E-3	3.02621E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.79288E-1	-8.96287E-1	-9.04577E0	-9.04114E0	5.57899E-3	9.34601E-2	2.73117E1	-3.26771E1	-3.26681E1	2.6804E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1