[Scan]
initial_time=2015-12-18T20:58:25
final_time=2015-12-18T20:58:44
ip_count=19
run=1020
dataset=3
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08861E-4
ql1_vset=
ql1_vmon=-8.78978E-1
ql1_imon=1.32821E-8
ql2_vset=
ql2_vmon=-8.96072E-1
ql2_imon=1.91684E-9
ql3_vset=
ql3_vmon=-9.04598E0
ql3_imon=4.64547E-10
ql4_vset=
ql4_vmon=-9.04131E0
ql4_imon=6.15001E-11
mult1=-1.03183E-8
mult2=-2.74656E-9
rf_tmon=-5.15531E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=1.677E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63217E0
bslens_imon=2.52376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98568E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0528E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53636E1
cs_ef1b_imon=3.17975E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02449E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05217E1
cs_ea1_imon=1.08487E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42473E0
lens1_imon=2.46268E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64702E1
os_ef1alow_imon=2.98364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03671E1
cs_ea2_imon=1.39786E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84207E1
cs_ef1a_imon=3.03529E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.39504E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11198E1
os_restr1_imon=4.29429E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15102E1
os_ea1_imon=2.35517E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63685E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23937E0
cs_ionrep_imon=9.58522E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=1.96716E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.3955E-8
tplens_vset=1.4E-1
tplens_vmon=1.59181E0
tplens_imon=-3.12281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.51428E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.5868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.06581E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26609E0
ionrepsh_imon=8.42485E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34052E1
lens5b_imon=2.196E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74601E1
cs_ef2b_imon=3.13933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56064E0
os_ea2_imon=-6.25276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71245E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09822E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.30067E-1
os_ef2bup_imon=-5.28394E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10824E1
os_restr2_imon=3.46045E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.09066E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.08677E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.09589E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.30201E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=8.13445E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11517E0
cs_ionaccel_imon=-7.96589E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.77018E-6
window_vset=0.0E0
window_vmon=1.93894E-1
window_imon=-9.98689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39114E-4
mask2_vset=0.0E0
mask2_vmon=-1.86556E1
mask2_imon=-5.9449E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.44388E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93758E3
defgrida_imon=6.38657E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.40189E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36317E0
defgridb_imon=6.19572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.43936E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06818E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65516E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31788E1
cs_fil1_imon=7.44246E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61316E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66659E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6723E-2
os_fil2_imon=-2.48161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.128E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76673E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29114E-1
cs_fil2_imon=-2.24458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.37979E-1
res40_imon=-2.43958E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.79908E-1	-8.96597E-1	-9.04584E0	-9.04126E0	5.38826E-3	9.377E-2	2.73117E1	-3.26711E1	-3.25942E1	2.67812E1	1.1929E-7	2.51411E-3	2.51411E-3	6.31321E-3	3.00639E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.79312E-1	-8.96168E-1	-9.0462E0	-9.04119E0	5.43594E-3	9.37939E-2	2.73192E1	-3.26768E1	-3.26321E1	2.68038E1	1.1929E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.79455E-1	-8.96144E-1	-9.04629E0	-9.04107E0	5.4121E-3	9.35078E-2	2.73169E1	-3.26467E1	-3.26467E1	2.68337E1	1.19237E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.0041E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.79288E-1	-8.96406E-1	-9.04617E0	-9.04107E0	5.55515E-3	9.34601E-2	2.73129E1	-3.26639E1	-3.26332E1	2.67938E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.79121E-1	-8.9612E-1	-9.0462E0	-9.04098E0	5.79357E-3	9.37462E-2	2.72967E1	-3.26717E1	-3.26543E1	2.6798E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.79359E-1	-8.96311E-1	-9.04601E0	-9.04114E0	5.24521E-3	9.37462E-2	2.72968E1	-3.26567E1	-3.26236E1	2.6789E1	1.19238E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.79264E-1	-8.9612E-1	-9.04608E0	-9.041E0	5.14984E-3	9.35078E-2	2.72805E1	-3.26789E1	-3.26116E1	2.68196E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.79025E-1	-8.96454E-1	-9.04598E0	-9.04124E0	5.31673E-3	9.33647E-2	2.72992E1	-3.26862E1	-3.26136E1	2.68076E1	1.19239E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.79121E-1	-8.96192E-1	-9.04605E0	-9.04098E0	5.50747E-3	9.35078E-2	2.72829E1	-3.26747E1	-3.26332E1	2.6807E1	1.1929E-7	2.51918E-3	2.51918E-3	6.31012E-3	3.02194E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09696E0	-8.79097E-1	-8.96263E-1	-9.04579E0	-9.04105E0	5.36442E-3	9.377E-2	2.73222E1	-3.26496E1	-3.26213E1	2.678E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.79264E-1	-8.96072E-1	-9.04596E0	-9.04124E0	5.38826E-3	9.35078E-2	2.72935E1	-3.26517E1	-3.26217E1	2.68058E1	1.1929E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.79145E-1	-8.96049E-1	-9.0456E0	-9.04119E0	5.26905E-3	9.34839E-2	2.73112E1	-3.26689E1	-3.26223E1	2.68038E1	1.19237E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99613E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.7924E-1	-8.95929E-1	-9.04589E0	-9.04114E0	5.19753E-3	9.35555E-2	2.73145E1	-3.26779E1	-3.26331E1	2.67989E1	1.19238E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.79359E-1	-8.9612E-1	-9.0462E0	-9.04124E0	5.36442E-3	9.35078E-2	2.73099E1	-3.26717E1	-3.26194E1	2.68154E1	1.19239E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.79335E-1	-8.96001E-1	-9.04596E0	-9.04121E0	5.43594E-3	9.33647E-2	2.72961E1	-3.26434E1	-3.2644E1	2.67974E1	1.1929E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.79312E-1	-8.96025E-1	-9.04596E0	-9.04112E0	5.29289E-3	9.33886E-2	2.73321E1	-3.2626E1	-3.26308E1	2.68166E1	1.19083E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00302E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.79169E-1	-8.9612E-1	-9.04589E0	-9.041E0	5.17368E-3	9.34839E-2	2.72985E1	-3.26633E1	-3.26056E1	2.68016E1	1.1929E-7	2.53196E-3	2.53196E-3	6.30192E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.79264E-1	-8.96001E-1	-9.04596E0	-9.04136E0	5.36442E-3	9.34839E-2	2.73299E1	-3.26496E1	-3.2616E1	2.68082E1	1.19238E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.79264E-1	-8.96239E-1	-9.04589E0	-9.04138E0	5.19753E-3	9.32932E-2	2.73267E1	-3.26194E1	-3.26585E1	2.68118E1	1.19239E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.78978E-1	-8.96072E-1	-9.04598E0	-9.04131E0	5.31673E-3	9.33886E-2	2.73207E1	-3.26458E1	-3.26416E1	2.68118E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03185E-1