[Scan]
initial_time=2015-12-18T20:58:51
final_time=2015-12-18T20:59:11
ip_count=19
run=1020
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.79073E-1
ql1_imon=1.32953E-8
ql2_vset=
ql2_vmon=-8.96263E-1
ql2_imon=1.93167E-9
ql3_vset=
ql3_vmon=-9.0461E0
ql3_imon=4.7133E-10
ql4_vset=
ql4_vmon=-9.04107E0
ql4_imon=2.10762E-11
mult1=-9.6561E-9
mult2=-2.7266E-9
rf_tmon=-3.94765E-3
rf_agc=3.37722E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.62437E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63484E0
bslens_imon=2.66427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20264E1
lens5a_imon=1.98281E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04935E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54553E1
cs_ef1b_imon=3.18574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.08623E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41235E0
lens1_imon=2.67161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64646E1
os_ef1alow_imon=2.98813E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03868E1
cs_ea2_imon=1.40137E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.03529E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.3955E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11229E1
os_restr1_imon=4.30365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.3468E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.09629E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26924E0
cs_ionrep_imon=9.50701E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.96791E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.3996E-8
tplens_vset=1.4E-1
tplens_vmon=1.58328E0
tplens_imon=-3.843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.5134E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.56519E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.04845E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26373E0
ionrepsh_imon=8.41981E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.1929E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7457E1
cs_ef2b_imon=3.14158E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56185E0
os_ea2_imon=-5.38565E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7132E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08824E0
os_ef2alow_imon=-2.46578E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36929E-1
os_ef2bup_imon=-5.12675E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.44847E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.3092E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01771E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.09101E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09514E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.27189E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=8.13631E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13638E0
cs_ionaccel_imon=-9.05124E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56262E1
einzel_imon=7.67661E-6
window_vset=0.0E0
window_vmon=1.95765E-1
window_imon=-1.00243E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86631E1
mask2_imon=-5.87005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92574E3
multa_neg_imon=7.6191E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93664E3
defgrida_imon=6.55394E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.28119E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55677E0
defgridb_imon=6.06544E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.43412E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07597E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65371E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=7.26157E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01309E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6698E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50225E-2
os_fil2_imon=-2.34438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29248E-1
cs_fil2_imon=-1.90775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22592E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31902E-3
inlet_lpb_pmon=3.03418E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51642E-3
foreline_cvt_pmon=2.51642E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71662E-1
res40_imon=-2.45455E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.79097E-1	-8.9581E-1	-9.04598E0	-9.04098E0	5.45979E-3	9.36747E-2	2.72915E1	-3.26596E1	-3.26419E1	2.67561E1	1.19237E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00144E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.79145E-1	-8.955E-1	-9.04636E0	-9.04119E0	5.19753E-3	9.35793E-2	2.73039E1	-3.26591E1	-3.26512E1	2.68308E1	1.19239E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.78882E-1	-8.95905E-1	-9.04613E0	-9.04114E0	5.34058E-3	9.32455E-2	2.73381E1	-3.26791E1	-3.26461E1	2.68029E1	1.1929E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.01742E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.78859E-1	-8.9581E-1	-9.04577E0	-9.04129E0	5.29289E-3	9.31025E-2	2.73249E1	-3.26933E1	-3.26398E1	2.68034E1	1.19239E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.78954E-1	-8.95977E-1	-9.04577E0	-9.041E0	5.50747E-3	9.35078E-2	2.72955E1	-3.26669E1	-3.2647E1	2.6822E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.79049E-1	-8.95882E-1	-9.04574E0	-9.04093E0	5.48363E-3	9.33647E-2	2.73225E1	-3.26446E1	-3.26296E1	2.6816E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.79097E-1	-8.96072E-1	-9.0462E0	-9.04114E0	5.29289E-3	9.35793E-2	2.73147E1	-3.26645E1	-3.26176E1	2.68046E1	1.1929E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.79335E-1	-8.95882E-1	-9.04598E0	-9.041E0	5.26905E-3	9.35793E-2	2.72901E1	-3.26464E1	-3.26476E1	2.67968E1	1.1929E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.79455E-1	-8.96311E-1	-9.04613E0	-9.04081E0	5.19753E-3	9.35793E-2	2.73454E1	-3.26452E1	-3.26302E1	2.68112E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.79121E-1	-8.96192E-1	-9.0462E0	-9.04098E0	5.17368E-3	9.32455E-2	2.72762E1	-3.26549E1	-3.26596E1	2.68076E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.79383E-1	-8.96072E-1	-9.04601E0	-9.04071E0	5.19753E-3	9.32932E-2	2.72817E1	-3.26458E1	-3.26386E1	2.67955E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.79478E-1	-8.96335E-1	-9.0461E0	-9.04074E0	5.48363E-3	9.35078E-2	2.72847E1	-3.26567E1	-3.26218E1	2.68262E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.79192E-1	-8.96192E-1	-9.04598E0	-9.04105E0	5.67436E-3	9.33886E-2	2.73075E1	-3.26626E1	-3.26408E1	2.67944E1	1.1929E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00824E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.79002E-1	-8.96239E-1	-9.04603E0	-9.04083E0	5.22137E-3	9.32932E-2	2.72732E1	-3.26413E1	-3.26773E1	2.67958E1	1.19264E-7	2.52134E-3	2.52134E-3	6.3074E-3	3.02845E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.79049E-1	-8.96144E-1	-9.04577E0	-9.04071E0	5.126E-3	9.34601E-2	2.73198E1	-3.26707E1	-3.26572E1	2.68296E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.79073E-1	-8.96335E-1	-9.04565E0	-9.04064E0	5.14984E-3	9.34601E-2	2.73405E1	-3.26452E1	-3.26506E1	2.6798E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.79216E-1	-8.96168E-1	-9.04601E0	-9.04064E0	5.19753E-3	9.32693E-2	2.73004E1	-3.26443E1	-3.26354E1	2.68175E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.97963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.79312E-1	-8.9612E-1	-9.04593E0	-9.04093E0	5.22137E-3	9.33647E-2	2.73319E1	-3.26727E1	-3.25998E1	2.6843E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.79145E-1	-8.96096E-1	-9.04591E0	-9.04093E0	5.26905E-3	9.32693E-2	2.73121E1	-3.26521E1	-3.26305E1	2.68063E1	1.1929E-7	2.52301E-3	2.52301E-3	6.3074E-3	3.00247E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.79073E-1	-8.96263E-1	-9.0461E0	-9.04107E0	5.36442E-3	9.32455E-2	2.73279E1	-3.26783E1	-3.26536E1	2.68052E1	1.1929E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.03418E-1