[Scan]
initial_time=2015-12-18T20:59:18
final_time=2015-12-18T20:59:37
ip_count=19
run=1020
dataset=3
scan=199
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08854E-4
ql1_vset=
ql1_vmon=-8.78811E-1
ql1_imon=1.32742E-8
ql2_vset=
ql2_vmon=-8.96192E-1
ql2_imon=1.90786E-9
ql3_vset=
ql3_vmon=-9.0456E0
ql3_imon=4.19879E-10
ql4_vset=
ql4_vmon=-9.04129E0
ql4_imon=4.42386E-11
mult1=-9.88947E-9
mult2=-2.82909E-9
rf_tmon=-1.80183E-3
rf_agc=3.59814E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.74853E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65198E0
bslens_imon=2.62754E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19964E1
lens5a_imon=1.98317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05163E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54463E1
cs_ef1b_imon=3.20903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=1.07705E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39766E0
lens1_imon=2.51367E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.96072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.40027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=3.06271E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.39575E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10871E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1541E1
os_ea1_imon=2.35414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64002E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23006E0
cs_ionrep_imon=9.60251E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93405E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=3.39308E-8
tplens_vset=1.4E-1
tplens_vmon=1.59613E0
tplens_imon=-1.38211E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.50054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.59494E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98405E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.07497E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26679E0
ionrepsh_imon=8.53735E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34129E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53798E0
os_ea2_imon=-6.70792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00582E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.44617E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72839E1
iondef1_imon=1.07705E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.3063E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=8.12734E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.90047E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-4.57124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.43913E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.89553E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.18202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51693E0
defgridb_imon=6.23807E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33288E1
os_fil1_imon=9.4436E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07491E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=7.16085E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.35927E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66755E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52853E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80577E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-1.84306E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22461E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31283E-3
inlet_lpb_pmon=2.99346E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5208E-3
foreline_cvt_pmon=2.5208E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.0285E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09704E0	-8.79145E-1	-8.96263E-1	-9.04622E0	-9.04078E0	5.60284E-3	9.34124E-2	2.72715E1	-3.26602E1	-3.26042E1	2.67649E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01742E-1
2.0E0	2.3E1	1.0E0	3.16E2	1.6E2	-2.09696E0	-8.7893E-1	-8.96025E-1	-9.0462E0	-9.04105E0	5.55515E-3	9.32217E-2	2.7266E1	-3.26765E1	-3.26218E1	2.68538E1	1.19213E-7	2.51268E-3	2.51268E-3	6.32916E-3	3.00507E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.78787E-1	-8.9612E-1	-9.04605E0	-9.04076E0	5.48363E-3	9.35078E-2	2.73213E1	-3.26631E1	-3.26052E1	2.6807E1					
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.78429E-1	-8.96335E-1	-9.04622E0	-9.04088E0	5.48363E-3	9.33409E-2	2.72974E1	-3.26514E1	-3.26567E1	2.67862E1	1.1929E-7	2.51287E-3	2.51287E-3	6.29684E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.78668E-1	-8.96239E-1	-9.04617E0	-9.04086E0	5.38826E-3	9.3317E-2	2.73303E1	-3.26699E1	-3.26452E1	2.67962E1	1.19239E-7	2.51701E-3	2.51701E-3	6.29655E-3	3.01674E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.7862E-1	-8.96263E-1	-9.0462E0	-9.04083E0	5.31673E-3	9.35316E-2	2.72823E1	-3.26554E1	-3.26458E1	2.67529E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.78596E-1	-8.96168E-1	-9.04634E0	-9.04055E0	5.03063E-3	9.35078E-2	2.72913E1	-3.2647E1	-3.2632E1	2.68034E1	1.1929E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.78572E-1	-8.9612E-1	-9.04574E0	-9.04088E0	5.24521E-3	9.33647E-2	2.72715E1	-3.26591E1	-3.26362E1	2.68186E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.78716E-1	-8.96001E-1	-9.04591E0	-9.04074E0	5.57899E-3	9.31978E-2	2.72914E1	-3.26419E1	-3.26283E1	2.68588E1	1.19237E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.79025E-1	-8.96168E-1	-9.04589E0	-9.04052E0	5.79357E-3	9.31978E-2	2.72841E1	-3.26451E1	-3.26635E1	2.68132E1	1.1929E-7	2.51752E-3	2.51752E-3	6.29211E-3	3.02831E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.79049E-1	-8.96335E-1	-9.04603E0	-9.04067E0	5.57899E-3	9.35793E-2	2.73303E1	-3.26687E1	-3.26458E1	2.68124E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33648E-3	3.00639E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.79049E-1	-8.96358E-1	-9.0461E0	-9.04064E0	5.53131E-3	9.34839E-2	2.73246E1	-3.26526E1	-3.2629E1	2.67734E1	1.19238E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.78859E-1	-8.96382E-1	-9.04615E0	-9.04107E0	5.22137E-3	9.35555E-2	2.72907E1	-3.26597E1	-3.26518E1	2.67607E1	1.1929E-7	2.5068E-3	2.5068E-3	6.28552E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.7893E-1	-8.96311E-1	-9.04617E0	-9.04102E0	5.53131E-3	9.35078E-2	2.73021E1	-3.26897E1	-3.26158E1	2.68418E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02511E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.78978E-1	-8.96335E-1	-9.04586E0	-9.04083E0	5.34058E-3	9.35555E-2	2.72892E1	-3.2652E1	-3.26343E1	2.6787E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.7924E-1	-8.96287E-1	-9.04605E0	-9.04109E0	5.17368E-3	9.32693E-2	2.73075E1	-3.26572E1	-3.26168E1	2.68168E1	1.19135E-7	2.51443E-3	2.51443E-3	6.34588E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.79288E-1	-8.96335E-1	-9.04613E0	-9.04105E0	5.43594E-3	9.35316E-2	2.73181E1	-3.26638E1	-3.26467E1	2.67995E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.7893E-1	-8.95929E-1	-9.04589E0	-9.04105E0	5.26905E-3	9.35078E-2	2.73009E1	-3.26759E1	-3.26218E1	2.67938E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.79002E-1	-8.95977E-1	-9.04572E0	-9.04119E0	5.26905E-3	9.35316E-2	2.73139E1	-3.26638E1	-3.26703E1	2.6825E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.78811E-1	-8.96192E-1	-9.0456E0	-9.04129E0	5.14984E-3	9.34839E-2	2.72839E1	-3.26372E1	-3.26319E1	2.68208E1	1.1929E-7	2.5208E-3	2.5208E-3	6.31283E-3	2.99346E-1