[Scan]
initial_time=2015-12-18T21:01:31
final_time=2015-12-18T21:01:50
ip_count=19
run=1020
dataset=3
scan=204
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.78954E-1
ql1_imon=1.3331E-8
ql2_vset=
ql2_vmon=-8.96072E-1
ql2_imon=1.90849E-9
ql3_vset=
ql3_vmon=-9.04584E0
ql3_imon=5.14615E-10
ql4_vset=
ql4_vmon=-9.04136E0
ql4_imon=4.35829E-11
mult1=-1.01009E-8
mult2=-2.69142E-9
rf_tmon=-5.69696E-3
rf_agc=3.37814E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=1.67747E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69197E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19496E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54595E1
cs_ef1b_imon=3.18308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=1.09048E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39359E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04129E1
cs_ea2_imon=1.41781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.39933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.29995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.33996E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=9.57823E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20606E0
olens4_imon=3.3939E-8
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26738E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26248E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.05377E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=8.54721E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56813E0
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.20398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0912E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.46095E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72984E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67957E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.28919E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=8.12797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.44049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.13189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.34819E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.42799E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65589E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31809E1
cs_fil1_imon=7.83359E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55748E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67141E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77652E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22541E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68903E-1
res40_imon=-2.28433E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.78596E-1	-8.96263E-1	-9.04613E0	-9.04121E0	5.26905E-3	9.32455E-2	2.73193E1	-3.26531E1	-3.2652E1	2.68292E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9978E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.78596E-1	-8.9612E-1	-9.04629E0	-9.0409E0	5.6982E-3	9.34839E-2	2.72955E1	-3.2644E1	-3.265E1	2.68196E1	1.19239E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.79025E-1	-8.96525E-1	-9.0462E0	-9.04117E0	5.43594E-3	9.33409E-2	2.72949E1	-3.26585E1	-3.26289E1	2.68104E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02133E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.78882E-1	-8.96096E-1	-9.04677E0	-9.04114E0	5.74589E-3	9.32693E-2	2.73138E1	-3.26628E1	-3.26173E1	2.67864E1	1.19241E-7	2.5199E-3	2.5199E-3	6.34385E-3	3.00741E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.78859E-1	-8.96382E-1	-9.04636E0	-9.04112E0	5.50747E-3	9.32455E-2	2.73195E1	-3.26573E1	-3.26609E1	2.68641E1	1.19236E-7	2.51611E-3	2.51611E-3	6.33021E-3	3.00251E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.78739E-1	-8.96311E-1	-9.04596E0	-9.04121E0	5.53131E-3	9.31501E-2	2.73063E1	-3.26843E1	-3.26308E1	2.68046E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.78906E-1	-8.9643E-1	-9.04572E0	-9.04133E0	5.50747E-3	9.32693E-2	2.73117E1	-3.26561E1	-3.2596E1	2.67956E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.78692E-1	-8.96025E-1	-9.04613E0	-9.04117E0	5.55515E-3	9.31978E-2	2.73135E1	-3.26645E1	-3.26206E1	2.68641E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.78739E-1	-8.96192E-1	-9.04613E0	-9.04102E0	5.03063E-3	9.35793E-2	2.72768E1	-3.26555E1	-3.26396E1	2.67914E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.78668E-1	-8.96215E-1	-9.04608E0	-9.04121E0	5.36442E-3	9.35078E-2	2.72965E1	-3.26805E1	-3.25868E1	2.6834E1	1.19238E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.78787E-1	-8.96287E-1	-9.04639E0	-9.04098E0	5.72205E-3	9.33886E-2	2.72998E1	-3.26632E1	-3.26354E1	2.6804E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.79049E-1	-8.96168E-1	-9.04636E0	-9.04114E0	5.62668E-3	9.34124E-2	2.73118E1	-3.2637E1	-3.26272E1	2.68046E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09673E0	-8.78787E-1	-8.96192E-1	-9.0461E0	-9.04119E0	5.34058E-3	9.3317E-2	2.73051E1	-3.26667E1	-3.2639E1	2.67788E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.78954E-1	-8.95953E-1	-9.04624E0	-9.04126E0	5.34058E-3	9.3317E-2	2.73357E1	-3.26705E1	-3.26254E1	2.6837E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.79145E-1	-8.96335E-1	-9.04624E0	-9.0414E0	5.34058E-3	9.34601E-2	2.72775E1	-3.26669E1	-3.26248E1	2.67487E1	1.19237E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.98819E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.79097E-1	-8.96049E-1	-9.04617E0	-9.04114E0	5.126E-3	9.31501E-2	2.73287E1	-3.27003E1	-3.2652E1	2.68314E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09657E0	-8.78954E-1	-8.96001E-1	-9.04639E0	-9.04136E0	5.36442E-3	9.36031E-2	2.73002E1	-3.26787E1	-3.26272E1	2.67837E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.79264E-1	-8.96096E-1	-9.04648E0	-9.04133E0	5.4121E-3	9.34601E-2	2.7321E1	-3.26331E1	-3.26449E1	2.68341E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.79002E-1	-8.96025E-1	-9.04627E0	-9.04117E0	5.14984E-3	9.31978E-2	2.73093E1	-3.2653E1	-3.26164E1	2.6786E1	1.1929E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.78954E-1	-8.96072E-1	-9.04584E0	-9.04136E0	5.36442E-3	9.32693E-2	2.72984E1	-3.26248E1	-3.26738E1	2.67957E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1