[Scan]
initial_time=2015-12-18T21:03:17
final_time=2015-12-18T21:03:37
ip_count=19
run=1020
dataset=3
scan=208
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.78692E-1
ql1_imon=1.32768E-8
ql2_vset=
ql2_vmon=-8.95643E-1
ql2_imon=1.93032E-9
ql3_vset=
ql3_vmon=-9.04627E0
ql3_imon=3.42834E-10
ql4_vset=
ql4_vmon=-9.04114E0
ql4_imon=5.03659E-11
mult1=-1.02481E-8
mult2=-2.73616E-9
rf_tmon=-4.77872E-3
rf_agc=3.39099E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.62911E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66281E0
bslens_imon=2.78843E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20419E1
lens5a_imon=1.98879E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53441E1
cs_ef1b_imon=3.18269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02159E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05179E1
cs_ea1_imon=1.09401E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40095E0
lens1_imon=2.49642E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64568E1
os_ef1alow_imon=2.98773E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03766E1
cs_ea2_imon=1.40652E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.03847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.40005E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11633E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15358E1
os_ea1_imon=2.35448E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25499E0
cs_ionrep_imon=9.50793E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.97365E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.39673E-8
tplens_vset=1.4E-1
tplens_vmon=1.60319E0
tplens_imon=-3.33207E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26297E1
iondef3_imon=1.50108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26517E1
iondef2_imon=1.58311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98554E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.05654E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26426E0
ionrepsh_imon=8.67016E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.18763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57423E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00748E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09742E0
os_ef2alow_imon=-2.64061E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47043E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11013E1
os_restr2_imon=3.45168E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30345E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01948E1
cs_anode2_imon=2.09355E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72904E1
iondef1_imon=1.08671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08399E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.31042E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=8.17103E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13304E0
cs_ionaccel_imon=-9.44689E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.81642E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.33878E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.23449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49641E0
defgridb_imon=5.99349E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.44667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06941E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65701E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31805E1
cs_fil1_imon=6.93989E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2046E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67221E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43161E-2
os_fil2_imon=-2.48384E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.833E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31899E-1
cs_fil2_imon=-2.30428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44899E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71573E-1
res40_imon=-2.35564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.78668E-1	-8.96144E-1	-9.04646E0	-9.041E0	5.72205E-3	9.34362E-2	2.73275E1	-3.26632E1	-3.26408E1	2.68036E1	1.1924E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.99845E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.78906E-1	-8.96049E-1	-9.04655E0	-9.04105E0	5.38826E-3	9.36985E-2	2.72787E1	-3.26669E1	-3.26128E1	2.67848E1	1.19238E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.79121E-1	-8.96096E-1	-9.04651E0	-9.04126E0	5.36442E-3	9.35078E-2	2.73387E1	-3.26679E1	-3.26195E1	2.68214E1	1.1929E-7	2.51793E-3	2.51793E-3	6.32896E-3	3.0264E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.78978E-1	-8.95691E-1	-9.04629E0	-9.041E0	5.45979E-3	9.33886E-2	2.72763E1	-3.26669E1	-3.2632E1	2.68322E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.79216E-1	-8.95953E-1	-9.04605E0	-9.04105E0	5.53131E-3	9.32455E-2	2.73237E1	-3.26579E1	-3.26128E1	2.67818E1	1.19237E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.98819E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.79002E-1	-8.95858E-1	-9.04639E0	-9.04124E0	5.36442E-3	9.34362E-2	2.73082E1	-3.2664E1	-3.26125E1	2.68118E1	1.19238E-7	2.52373E-3	2.52373E-3	6.31837E-3	3.00693E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.7893E-1	-8.95929E-1	-9.04648E0	-9.041E0	5.07832E-3	9.35555E-2	2.72945E1	-3.26661E1	-3.26449E1	2.67776E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.78739E-1	-8.96049E-1	-9.0461E0	-9.04105E0	5.6982E-3	9.34601E-2	2.72949E1	-3.26567E1	-3.25972E1	2.68016E1	1.1929E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.78644E-1	-8.96072E-1	-9.04622E0	-9.04109E0	5.45979E-3	9.36747E-2	2.72973E1	-3.26494E1	-3.2641E1	2.68292E1	1.19237E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.02277E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.78596E-1	-8.96168E-1	-9.0461E0	-9.04138E0	5.60284E-3	9.36985E-2	2.73075E1	-3.2638E1	-3.26188E1	2.6807E1	1.19188E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.00197E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.78501E-1	-8.95977E-1	-9.04636E0	-9.04086E0	5.38826E-3	9.377E-2	2.73099E1	-3.26579E1	-3.26176E1	2.6768E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.7862E-1	-8.96215E-1	-9.04622E0	-9.04081E0	5.26905E-3	9.37223E-2	2.73147E1	-3.26759E1	-3.26254E1	2.68496E1	1.1929E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.00144E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.78811E-1	-8.95882E-1	-9.04605E0	-9.04102E0	5.14984E-3	9.3627E-2	2.72853E1	-3.26783E1	-3.26296E1	2.68328E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28006E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.78501E-1	-8.95905E-1	-9.04636E0	-9.04088E0	5.00679E-3	9.37223E-2	2.73171E1	-3.26717E1	-3.26308E1	2.67439E1	1.19238E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.78596E-1	-8.95691E-1	-9.0461E0	-9.04121E0	5.19753E-3	9.37223E-2	2.73074E1	-3.26608E1	-3.26393E1	2.68476E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.7893E-1	-8.95858E-1	-9.0462E0	-9.04083E0	5.62668E-3	9.36031E-2	2.73307E1	-3.26915E1	-3.26541E1	2.67951E1	1.1929E-7	2.51393E-3	2.51393E-3	6.32858E-3	2.98842E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.78954E-1	-8.95953E-1	-9.0462E0	-9.04105E0	5.45979E-3	9.35078E-2	2.73167E1	-3.26621E1	-3.26444E1	2.67956E1	1.1929E-7	2.51874E-3	2.51874E-3	6.33648E-3	2.99811E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.78692E-1	-8.95882E-1	-9.04596E0	-9.0409E0	5.24521E-3	9.36031E-2	2.73134E1	-3.26484E1	-3.26095E1	2.68773E1	1.19239E-7	2.51863E-3	2.51863E-3	6.31555E-3	3.00249E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.78739E-1	-8.95905E-1	-9.04615E0	-9.04131E0	5.31673E-3	9.36747E-2	2.72769E1	-3.26933E1	-3.2614E1	2.67487E1	1.19238E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.78692E-1	-8.95643E-1	-9.04627E0	-9.04114E0	5.10216E-3	9.36508E-2	2.72904E1	-3.26517E1	-3.26297E1	2.68046E1