[Scan]
initial_time=2015-12-18T21:03:44
final_time=2015-12-18T21:04:04
ip_count=19
run=1020
dataset=3
scan=209
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.78811E-1
ql1_imon=1.32389E-8
ql2_vset=
ql2_vmon=-8.95929E-1
ql2_imon=1.95872E-9
ql3_vset=
ql3_vmon=-9.04617E0
ql3_imon=3.21531E-10
ql4_vset=
ql4_vmon=-9.04109E0
ql4_imon=6.02365E-11
mult1=-9.71631E-9
mult2=-2.68268E-9
rf_tmon=-6.39902E-3
rf_agc=3.25225E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.66299E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.96705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.0516E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54313E1
cs_ef1b_imon=3.17659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=1.08113E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42683E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.99964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03873E1
cs_ea2_imon=1.39755E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.0346E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.39788E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.3447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.52297E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=3.4082E-8
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.59647E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.08431E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=8.5107E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.19534E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56711E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09901E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.43074E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67644E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.32358E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=8.13829E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93669E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.11617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50595E0
defgridb_imon=6.31627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.45886E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65959E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=7.80956E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.49141E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67401E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50534E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.97521E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71886E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13952E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.78763E-1	-8.96311E-1	-9.0461E0	-9.04086E0	5.17368E-3	9.36747E-2	2.72974E1	-3.26455E1	-3.26408E1	2.68464E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.78954E-1	-8.96263E-1	-9.04608E0	-9.04095E0	5.36442E-3	9.34601E-2	2.73261E1	-3.26849E1	-3.26248E1	2.67704E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.78716E-1	-8.95905E-1	-9.04644E0	-9.04107E0	5.07832E-3	9.37223E-2	2.7301E1	-3.26555E1	-3.26478E1	2.68256E1	1.1929E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.78787E-1	-8.96096E-1	-9.04636E0	-9.04093E0	5.126E-3	9.32932E-2	2.73219E1	-3.26723E1	-3.26344E1	2.67914E1	1.1919E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.79073E-1	-8.96049E-1	-9.04629E0	-9.04117E0	5.19753E-3	9.33886E-2	2.73092E1	-3.26579E1	-3.26614E1	2.67926E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.78811E-1	-8.95977E-1	-9.04605E0	-9.04114E0	5.05447E-3	9.34601E-2	2.72996E1	-3.26607E1	-3.26425E1	2.68558E1	1.1929E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09711E0	-8.78811E-1	-8.96025E-1	-9.04644E0	-9.04117E0	5.03063E-3	9.32693E-2	2.73033E1	-3.26362E1	-3.2635E1	2.67878E1	1.19242E-7	2.52424E-3	2.52424E-3	6.29738E-3	3.02449E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09766E0	-8.78811E-1	-8.95953E-1	-9.04601E0	-9.04098E0	5.24521E-3	9.35555E-2	2.73357E1	-3.26398E1	-3.26543E1	2.68058E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.78692E-1	-8.96192E-1	-9.04641E0	-9.04109E0	5.10216E-3	9.35316E-2	2.72961E1	-3.26735E1	-3.26224E1	2.68034E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.78787E-1	-8.96311E-1	-9.04634E0	-9.0409E0	5.24521E-3	9.35078E-2	2.73231E1	-3.26452E1	-3.26621E1	2.6825E1	1.19238E-7	2.51607E-3	2.51607E-3	6.31014E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0975E0	-8.79121E-1	-8.96335E-1	-9.04641E0	-9.04129E0	5.00679E-3	9.30309E-2	2.73281E1	-3.26614E1	-3.26296E1	2.67884E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.79145E-1	-8.96263E-1	-9.04646E0	-9.04129E0	5.34058E-3	9.32455E-2	2.72805E1	-3.26615E1	-3.26536E1	2.68124E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.79073E-1	-8.96358E-1	-9.04598E0	-9.04083E0	5.05447E-3	9.33647E-2	2.72941E1	-3.26615E1	-3.26346E1	2.681E1	1.1929E-7	2.51007E-3	2.51007E-3	6.35692E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0968E0	-8.78954E-1	-8.95977E-1	-9.04615E0	-9.04114E0	5.67436E-3	9.31025E-2	2.73511E1	-3.26762E1	-3.26537E1	2.6801E1	1.19264E-7	2.51843E-3	2.51843E-3	6.3074E-3	3.00224E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.7924E-1	-8.95667E-1	-9.04641E0	-9.04124E0	5.24521E-3	9.3317E-2	2.73111E1	-3.26603E1	-3.26098E1	2.68052E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.78906E-1	-8.95739E-1	-9.04622E0	-9.04124E0	5.4121E-3	9.3317E-2	2.72733E1	-3.26807E1	-3.26002E1	2.67577E1	1.19186E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.7893E-1	-8.955E-1	-9.04641E0	-9.04112E0	4.93526E-3	9.31263E-2	2.73129E1	-3.26597E1	-3.26296E1	2.68382E1	1.1929E-7	2.50989E-3	2.50989E-3	6.32356E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.78882E-1	-8.95739E-1	-9.0462E0	-9.04133E0	4.98295E-3	9.34124E-2	2.73328E1	-3.26756E1	-3.26767E1	2.68314E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.7862E-1	-8.95739E-1	-9.04617E0	-9.04119E0	5.07832E-3	9.3174E-2	2.73484E1	-3.26963E1	-3.2635E1	2.67926E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.78811E-1	-8.95929E-1	-9.04617E0	-9.04109E0	5.126E-3	9.33886E-2	2.73051E1	-3.26699E1	-3.26014E1	2.67644E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1