[Scan]
initial_time=2015-12-18T21:05:04
final_time=2015-12-18T21:05:23
ip_count=19
run=1020
dataset=3
scan=212
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.79002E-1
ql1_imon=1.31827E-8
ql2_vset=
ql2_vmon=-8.96335E-1
ql2_imon=1.92878E-9
ql3_vset=
ql3_vmon=-9.04603E0
ql3_imon=3.44336E-10
ql4_vset=
ql4_vmon=-9.04093E0
ql4_imon=8.79049E-11
mult1=-9.70033E-9
mult2=-2.931E-9
rf_tmon=-4.14374E-3
rf_agc=3.41468E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.69057E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=3.18993E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=1.08976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43985E0
lens1_imon=2.51973E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04135E1
cs_ea2_imon=1.39763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.0555E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=1.39963E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.34501E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.10848E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01521E1
cs_anode1_imon=1.94728E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.3992E-8
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26354E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.03346E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=8.51116E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.14524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.55011E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34665E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.44941E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.10081E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73305E1
iondef1_imon=1.08075E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68394E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.34108E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=8.14255E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-6.6255E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47071E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.01125E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.24222E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.7231E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.80602E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19404E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.45928E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08272E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65713E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31809E1
cs_fil1_imon=8.95682E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.04692E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67392E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46063E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72238E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62005E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.78906E-1	-8.95953E-1	-9.04634E0	-9.04086E0	5.6982E-3	9.36747E-2	2.73103E1	-3.26353E1	-3.26388E1	2.68464E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02769E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.78811E-1	-8.95858E-1	-9.04653E0	-9.04071E0	5.29289E-3	9.33886E-2	2.73475E1	-3.26603E1	-3.26254E1	2.67845E1	1.1929E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.02621E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.78763E-1	-8.95715E-1	-9.04684E0	-9.04107E0	5.60284E-3	9.35078E-2	2.7324E1	-3.26549E1	-3.26278E1	2.68713E1	1.19236E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.01337E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.78716E-1	-8.95786E-1	-9.0467E0	-9.041E0	5.36442E-3	9.35555E-2	2.73145E1	-3.26791E1	-3.26189E1	2.68118E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.78787E-1	-8.95834E-1	-9.04677E0	-9.04086E0	5.34058E-3	9.35555E-2	2.72883E1	-3.26506E1	-3.26218E1	2.67926E1	1.19239E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.78835E-1	-8.96001E-1	-9.04663E0	-9.04086E0	5.07832E-3	9.35078E-2	2.73135E1	-3.26639E1	-3.2629E1	2.68184E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.78406E-1	-8.9612E-1	-9.04653E0	-9.04114E0	5.38826E-3	9.36985E-2	2.72865E1	-3.26723E1	-3.25797E1	2.67758E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.78549E-1	-8.96096E-1	-9.04675E0	-9.04114E0	5.26905E-3	9.36031E-2	2.72979E1	-3.26356E1	-3.2638E1	2.6834E1	1.19238E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.78596E-1	-8.96049E-1	-9.04644E0	-9.0409E0	4.93526E-3	9.36031E-2	2.72943E1	-3.26651E1	-3.26266E1	2.68244E1	1.19239E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.78692E-1	-8.95858E-1	-9.04634E0	-9.04095E0	5.24521E-3	9.33409E-2	2.72868E1	-3.26956E1	-3.26242E1	2.67974E1	1.19238E-7	2.51826E-3	2.51826E-3	6.32386E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.78716E-1	-8.95905E-1	-9.04589E0	-9.04093E0	5.14984E-3	9.36031E-2	2.73033E1	-3.26597E1	-3.26456E1	2.67451E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.78572E-1	-8.96072E-1	-9.04639E0	-9.04105E0	5.55515E-3	9.35316E-2	2.73123E1	-3.26645E1	-3.26314E1	2.68352E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.78692E-1	-8.96192E-1	-9.0462E0	-9.04126E0	5.36442E-3	9.37223E-2	2.73122E1	-3.26372E1	-3.26602E1	2.68064E1	1.19238E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.78811E-1	-8.96001E-1	-9.04579E0	-9.04112E0	5.14984E-3	9.35316E-2	2.73129E1	-3.26549E1	-3.26326E1	2.68094E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.78716E-1	-8.95858E-1	-9.0457E0	-9.04114E0	5.48363E-3	9.35555E-2	2.73104E1	-3.26756E1	-3.26325E1	2.68007E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.78739E-1	-8.95977E-1	-9.04613E0	-9.04076E0	5.6982E-3	9.34601E-2	2.72805E1	-3.265E1	-3.25978E1	2.67541E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01738E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.78978E-1	-8.95643E-1	-9.0461E0	-9.04083E0	5.36442E-3	9.33886E-2	2.73255E1	-3.26428E1	-3.26326E1	2.68256E1	1.1929E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.78906E-1	-8.96239E-1	-9.0462E0	-9.04081E0	5.53131E-3	9.34362E-2	2.73021E1	-3.26408E1	-3.26779E1	2.68388E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.7893E-1	-8.96287E-1	-9.0461E0	-9.04098E0	5.29289E-3	9.34124E-2	2.72955E1	-3.26549E1	-3.26446E1	2.67781E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.79002E-1	-8.96335E-1	-9.04603E0	-9.04093E0	5.19753E-3	9.3627E-2	2.73305E1	-3.26354E1	-3.26354E1	2.68394E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02922E-1