[Scan]
initial_time=2015-12-18T21:05:31
final_time=2015-12-18T21:05:50
ip_count=19
run=1020
dataset=3
scan=213
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.78501E-1
ql1_imon=1.33596E-8
ql2_vset=
ql2_vmon=-8.9581E-1
ql2_imon=1.94758E-9
ql3_vset=
ql3_vmon=-9.04648E0
ql3_imon=2.74849E-10
ql4_vset=
ql4_vmon=-9.04102E0
ql4_imon=5.70416E-11
mult1=-9.27081E-9
mult2=-2.83438E-9
rf_tmon=-4.68066E-3
rf_agc=3.364E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.68403E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63249E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5414E1
cs_ef1b_imon=3.18787E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=1.09229E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42784E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64673E1
os_ef1alow_imon=2.98885E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.37564E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.04687E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.39681E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11417E1
os_restr1_imon=4.28322E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.34933E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63669E1
os_ef1bup_imon=3.09057E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=9.35111E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01864E1
cs_anode1_imon=1.96107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.40274E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.14675E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=8.52198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74734E1
cs_ef2b_imon=3.13206E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57955E0
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71092E1
cs_ef2a_imon=3.19191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08669E0
os_ef2alow_imon=-2.57163E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38836E-1
os_ef2bup_imon=-5.28889E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10928E1
os_restr2_imon=3.45666E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01632E1
cs_anode2_imon=2.0995E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.10073E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.3095E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.16077E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14055E0
cs_ionaccel_imon=-8.82528E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47274E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56148E1
einzel_imon=7.74659E-6
window_vset=0.0E0
window_vmon=2.23587E-1
window_imon=-9.85343E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39224E-4
mask2_vset=0.0E0
mask2_vmon=-1.86589E1
mask2_imon=-7.06273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.24222E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=5.94083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33264E1
os_fil1_imon=9.45174E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08033E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65758E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=6.9624E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37978E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66944E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.45619E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14601E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74687E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31828E-1
cs_fil2_imon=-2.37051E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07502E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19188E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.21822E-1
res40_imon=-2.36967E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.78596E-1	-8.96335E-1	-9.0461E0	-9.041E0	5.31673E-3	9.31263E-2	2.7288E1	-3.26461E1	-3.26307E1	2.67864E1	1.19238E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00302E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.78739E-1	-8.95762E-1	-9.0461E0	-9.04105E0	5.60284E-3	9.32217E-2	2.73106E1	-3.26658E1	-3.26095E1	2.68132E1	1.19188E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.78477E-1	-8.95929E-1	-9.04629E0	-9.04074E0	5.60284E-3	9.35555E-2	2.73265E1	-3.26492E1	-3.26272E1	2.68192E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.78668E-1	-8.96072E-1	-9.04605E0	-9.04098E0	4.98295E-3	9.34124E-2	2.73393E1	-3.26242E1	-3.26603E1	2.68175E1	1.1924E-7	2.51709E-3	2.51709E-3	6.31269E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.78835E-1	-8.95691E-1	-9.04601E0	-9.04062E0	5.126E-3	9.32932E-2	2.72886E1	-3.26499E1	-3.25736E1	2.68088E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.78477E-1	-8.95762E-1	-9.04601E0	-9.04067E0	5.34058E-3	9.33409E-2	2.72932E1	-3.26566E1	-3.26422E1	2.68063E1	1.19241E-7	2.52301E-3	2.52301E-3	6.31779E-3	3.00247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.78596E-1	-8.95643E-1	-9.04601E0	-9.04076E0	5.65052E-3	9.35078E-2	2.73123E1	-3.26591E1	-3.25996E1	2.68208E1	1.19236E-7	2.52293E-3	2.52293E-3	6.33021E-3	3.02972E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.78859E-1	-8.96025E-1	-9.04598E0	-9.04088E0	5.22137E-3	9.34362E-2	2.73201E1	-3.2647E1	-3.26861E1	2.68088E1	1.1929E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.78406E-1	-8.95619E-1	-9.04627E0	-9.041E0	5.24521E-3	9.35078E-2	2.73075E1	-3.26549E1	-3.26344E1	2.68112E1	1.19186E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.78572E-1	-8.96049E-1	-9.04617E0	-9.04105E0	5.126E-3	9.3174E-2	2.73111E1	-3.26518E1	-3.26098E1	2.68184E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.78644E-1	-8.96311E-1	-9.04613E0	-9.04076E0	5.24521E-3	9.31978E-2	2.7301E1	-3.26331E1	-3.26195E1	2.67938E1	1.1929E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.78501E-1	-8.96287E-1	-9.04615E0	-9.04074E0	5.43594E-3	9.35793E-2	2.73141E1	-3.26843E1	-3.26278E1	2.67896E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.78716E-1	-8.9581E-1	-9.04617E0	-9.04105E0	5.34058E-3	9.3317E-2	2.73069E1	-3.26765E1	-3.26621E1	2.67962E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.78668E-1	-8.95619E-1	-9.04629E0	-9.04121E0	5.24521E-3	9.33647E-2	2.73039E1	-3.26626E1	-3.26449E1	2.68557E1	1.19186E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.02922E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.78692E-1	-8.95309E-1	-9.04622E0	-9.04114E0	5.29289E-3	9.3317E-2	2.73303E1	-3.26458E1	-3.26248E1	2.6804E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.78429E-1	-8.9581E-1	-9.04658E0	-9.04114E0	5.36442E-3	9.3317E-2	2.73075E1	-3.2736E1	-3.2626E1	2.67619E1	1.19186E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00302E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.78453E-1	-8.95977E-1	-9.04648E0	-9.0409E0	5.29289E-3	9.34839E-2	2.73177E1	-3.26603E1	-3.26416E1	2.68274E1	1.19238E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.78E-1	-8.95977E-1	-9.04624E0	-9.04093E0	5.55515E-3	9.31978E-2	2.73287E1	-3.26779E1	-3.25818E1	2.68214E1	1.19264E-7	2.51538E-3	2.51538E-3	6.32099E-3	3.00637E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.7831E-1	-8.95572E-1	-9.04603E0	-9.04105E0	5.17368E-3	9.3317E-2	2.73169E1	-3.26915E1	-3.26726E1	2.677E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.78501E-1	-8.9581E-1	-9.04648E0	-9.04102E0	5.14984E-3	9.29832E-2	2.73027E1	-3.26266E1	-3.26152E1	2.6828E1	1.19188E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1