[Scan]
initial_time=2015-12-18T21:06:24
final_time=2015-12-18T21:06:43
ip_count=19
run=1020
dataset=3
scan=215
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.78239E-1
ql1_imon=1.32626E-8
ql2_vset=
ql2_vmon=-8.95715E-1
ql2_imon=1.96869E-9
ql3_vset=
ql3_vmon=-9.04622E0
ql3_imon=3.15964E-10
ql4_vset=
ql4_vmon=-9.04107E0
ql4_imon=4.32372E-11
mult1=-9.29839E-9
mult2=-2.71738E-9
rf_tmon=-4.83982E-3
rf_agc=3.31911E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.64729E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.72731E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.97589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05203E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53488E1
cs_ef1b_imon=3.17957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.10272E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42211E0
lens1_imon=2.66714E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.99295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.39791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84452E1
cs_ef1a_imon=3.03569E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.39211E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.29651E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.33798E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26567E0
cs_ionrep_imon=9.39909E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02192E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.38924E-8
tplens_vset=1.4E-1
tplens_vmon=1.59542E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26815E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.04614E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=8.56733E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34218E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74797E1
cs_ef2b_imon=3.14273E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53702E0
os_ea2_imon=-4.97094E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00708E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19555E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0812E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2735E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=3.45828E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.3145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01937E1
cs_anode2_imon=2.09598E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72815E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67976E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.32864E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=8.15177E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-9.16887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47167E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56359E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.09577E-1
window_imon=-9.44689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39223E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-4.68579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.71268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.79055E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.4494E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07404E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65812E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31817E1
cs_fil1_imon=7.9593E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.99811E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67143E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13246E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9217E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.19423E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.81364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19186E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.72731E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.78525E-1	-8.95929E-1	-9.04651E0	-9.04086E0	4.95911E-3	9.34839E-2	2.73279E1	-3.26693E1	-3.26458E1	2.68334E1	1.19239E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.9943E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.78644E-1	-8.95691E-1	-9.04615E0	-9.04081E0	5.38826E-3	9.36031E-2	2.73123E1	-3.26428E1	-3.26116E1	2.68064E1	1.19238E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.78453E-1	-8.95882E-1	-9.04677E0	-9.04076E0	5.60284E-3	9.31263E-2	2.72797E1	-3.26649E1	-3.26154E1	2.68214E1	1.19264E-7	2.51809E-3	2.51809E-3	6.31283E-3	3.0012E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.78429E-1	-8.95882E-1	-9.04627E0	-9.04045E0	5.53131E-3	9.30786E-2	2.73009E1	-3.26573E1	-3.26182E1	2.67553E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.78692E-1	-8.96192E-1	-9.04596E0	-9.04098E0	5.48363E-3	9.32217E-2	2.72895E1	-3.265E1	-3.26536E1	2.68454E1	1.19238E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.78572E-1	-8.95691E-1	-9.04603E0	-9.04081E0	5.19753E-3	9.3174E-2	2.73153E1	-3.26543E1	-3.26765E1	2.67842E1	1.19316E-7	2.51935E-3	2.51935E-3	6.31563E-3	3.00693E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.78549E-1	-8.95643E-1	-9.04634E0	-9.04062E0	5.17368E-3	9.32455E-2	2.73075E1	-3.26524E1	-3.26224E1	2.68441E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.78668E-1	-8.95596E-1	-9.04624E0	-9.0409E0	5.45979E-3	9.32217E-2	2.72898E1	-3.26549E1	-3.26083E1	2.67932E1	1.19238E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.78453E-1	-8.95858E-1	-9.04593E0	-9.04062E0	5.36442E-3	9.33886E-2	2.72883E1	-3.26663E1	-3.26386E1	2.67914E1	1.19188E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.7862E-1	-8.95953E-1	-9.04603E0	-9.04078E0	5.72205E-3	9.34362E-2	2.726E1	-3.26699E1	-3.25978E1	2.67788E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.78358E-1	-8.96001E-1	-9.04591E0	-9.04107E0	5.55515E-3	9.3627E-2	2.73063E1	-3.26837E1	-3.26374E1	2.67878E1	1.1929E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00942E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.78286E-1	-8.95739E-1	-9.04627E0	-9.04105E0	5.43594E-3	9.34124E-2	2.72871E1	-3.26711E1	-3.25948E1	2.6804E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.78239E-1	-8.96072E-1	-9.04622E0	-9.04088E0	5.38826E-3	9.35316E-2	2.73193E1	-3.26366E1	-3.26602E1	2.68406E1	1.19186E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.78525E-1	-8.96168E-1	-9.04613E0	-9.04071E0	5.6982E-3	9.33886E-2	2.731E1	-3.26438E1	-3.26603E1	2.68286E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.78191E-1	-8.96072E-1	-9.04632E0	-9.04086E0	5.57899E-3	9.35793E-2	2.7355E1	-3.26416E1	-3.26573E1	2.67776E1	1.19184E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09294E0	-8.78072E-1	-8.95858E-1	-9.04632E0	-9.041E0	5.76973E-3	9.33886E-2	2.72991E1	-3.26849E1	-3.26242E1	2.68232E1	1.19264E-7	2.51607E-3	2.51607E-3	6.32661E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.78191E-1	-8.95762E-1	-9.04589E0	-9.04105E0	5.38826E-3	9.34601E-2	2.73015E1	-3.26543E1	-3.26452E1	2.67884E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.78072E-1	-8.95929E-1	-9.04617E0	-9.04083E0	5.48363E-3	9.35555E-2	2.73092E1	-3.26478E1	-3.25959E1	2.68184E1	1.19186E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00302E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.78191E-1	-8.96025E-1	-9.04629E0	-9.04112E0	5.48363E-3	9.36508E-2	2.73243E1	-3.26494E1	-3.26314E1	2.68041E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.78239E-1	-8.95715E-1	-9.04622E0	-9.04107E0	5.65052E-3	9.36031E-2	2.72815E1	-3.26431E1	-3.26815E1	2.67976E1	1.19186E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1