[Scan]
initial_time=2015-12-18T21:08:53
final_time=2015-12-18T21:09:12
ip_count=19
run=1020
dataset=4
scan=220
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-7.54809E-1
ql1_imon=1.372E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=1.98224E-9
ql3_vset=
ql3_vmon=-9.19433E0
ql3_imon=2.47753E-10
ql4_vset=
ql4_vmon=-9.18946E0
ql4_imon=3.14832E-11
mult1=-1.06461E-8
mult2=-2.77421E-9
rf_tmon=-3.29428E-3
rf_agc=3.41232E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.65129E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61096E0
bslens_imon=2.74874E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19988E1
lens5a_imon=1.98721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=3.1802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02169E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05251E1
cs_ea1_imon=1.10937E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43316E0
lens1_imon=2.59081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03819E1
cs_ea2_imon=1.38081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.3981E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15202E1
os_ea1_imon=2.34239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28271E0
cs_ionrep_imon=9.52905E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9184E2
cs_nozzle_imon=1.9328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.95449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20594E0
olens4_imon=3.40205E-8
tplens_vset=1.4E-1
tplens_vmon=1.58511E0
tplens_imon=-1.74941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.51854E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.58025E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98103E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.01102E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24659E0
ionrepsh_imon=8.61081E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34092E1
lens5b_imon=2.17307E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53553E0
os_ea2_imon=-6.48754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00593E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09901E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46077E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.45482E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.33381E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68036E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.32463E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=8.15131E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-9.65283E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.27554E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.43178E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.66413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.16366E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50774E0
defgridb_imon=5.7312E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33244E1
os_fil1_imon=9.43327E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=7.02269E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.97795E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67169E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4234E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79395E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49661E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22661E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83318E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.54929E-1	-7.34282E-1	-9.19487E0	-9.1892E0	5.26905E-3	9.33409E-2	2.73027E1	-3.2649E1	-3.25717E1	2.684E1	1.1929E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.00302E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.55191E-1	-7.33972E-1	-9.19504E0	-9.1893E0	5.4121E-3	9.31263E-2	2.73131E1	-3.26768E1	-3.25942E1	2.68022E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.54952E-1	-7.34019E-1	-9.19485E0	-9.1893E0	5.00679E-3	9.32455E-2	2.72962E1	-3.26366E1	-3.26419E1	2.68105E1	1.19237E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.99613E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-7.55358E-1	-7.34091E-1	-9.1948E0	-9.18918E0	5.07832E-3	9.34839E-2	2.72962E1	-3.26301E1	-3.26018E1	2.67914E1	1.19239E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.55215E-1	-7.33733E-1	-9.19483E0	-9.18937E0	5.03063E-3	9.36031E-2	2.73093E1	-3.26729E1	-3.2617E1	2.67902E1	1.1929E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.55095E-1	-7.34258E-1	-9.19464E0	-9.18951E0	4.86374E-3	9.31978E-2	2.73351E1	-3.26729E1	-3.26128E1	2.68322E1	1.19184E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-7.55191E-1	-7.34305E-1	-9.19476E0	-9.18908E0	5.45979E-3	9.35555E-2	2.72739E1	-3.26549E1	-3.2641E1	2.67872E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.55286E-1	-7.34425E-1	-9.19452E0	-9.18915E0	5.17368E-3	9.32455E-2	2.73177E1	-3.26561E1	-3.25659E1	2.68665E1	1.1929E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-7.55239E-1	-7.34544E-1	-9.19473E0	-9.18901E0	5.36442E-3	9.32932E-2	2.72961E1	-3.26735E1	-3.26206E1	2.68064E1	1.1929E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.02253E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.55215E-1	-7.34067E-1	-9.19497E0	-9.18908E0	5.19753E-3	9.34124E-2	2.73216E1	-3.26667E1	-3.26113E1	2.6777E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.55286E-1	-7.33972E-1	-9.19478E0	-9.18913E0	5.17368E-3	9.33886E-2	2.73381E1	-3.26843E1	-3.26236E1	2.6847E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-7.55358E-1	-7.34329E-1	-9.1948E0	-9.18913E0	4.95911E-3	9.33886E-2	2.7321E1	-3.26561E1	-3.26313E1	2.67926E1	1.19188E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-7.55E-1	-7.34258E-1	-9.19468E0	-9.18927E0	5.55515E-3	9.35555E-2	2.73181E1	-3.26549E1	-3.26596E1	2.68028E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.55095E-1	-7.34282E-1	-9.19459E0	-9.18958E0	5.34058E-3	9.36747E-2	2.72937E1	-3.26543E1	-3.26224E1	2.67968E1	1.19239E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.55286E-1	-7.34043E-1	-9.19476E0	-9.1893E0	5.38826E-3	9.34839E-2	2.72877E1	-3.26506E1	-3.26326E1	2.6804E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.55262E-1	-7.3421E-1	-9.19471E0	-9.18939E0	5.36442E-3	9.38416E-2	2.72666E1	-3.26645E1	-3.26278E1	2.68442E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-7.55143E-1	-7.34329E-1	-9.19471E0	-9.18925E0	5.43594E-3	9.35793E-2	2.73069E1	-3.26543E1	-3.26194E1	2.68388E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-7.55143E-1	-7.34138E-1	-9.19464E0	-9.18953E0	5.55515E-3	9.35555E-2	2.73004E1	-3.26526E1	-3.26425E1	2.67711E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.02277E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-7.55215E-1	-7.34425E-1	-9.19459E0	-9.18932E0	5.65052E-3	9.37462E-2	2.73346E1	-3.26508E1	-3.26402E1	2.68244E1	1.1929E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-7.54809E-1	-7.34544E-1	-9.19433E0	-9.18946E0	5.29289E-3	9.34362E-2	2.73063E1	-3.26844E1	-3.26484E1	2.68036E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1