[Scan]
initial_time=2015-12-18T21:09:46
final_time=2015-12-18T21:10:05
ip_count=19
run=1020
dataset=4
scan=222
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-7.54762E-1
ql1_imon=1.37736E-8
ql2_vset=
ql2_vmon=-7.34258E-1
ql2_imon=1.94896E-9
ql3_vset=
ql3_vmon=-9.19478E0
ql3_imon=3.24595E-10
ql4_vset=
ql4_vmon=-9.18903E0
ql4_imon=3.73602E-11
mult1=-9.65304E-9
mult2=-2.87612E-9
rf_tmon=-4.43279E-3
rf_agc=3.34035E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.63313E-9
bslens_vset=-6.2E0
bslens_vmon=-6.60786E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=2.01011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52571E1
cs_ef1b_imon=3.17335E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=1.10527E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43805E0
lens1_imon=2.87662E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.36843E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=1.40095E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.33383E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=9.78731E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=1.95485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=3.39468E-8
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-4.43544E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26154E1
iondef3_imon=1.52308E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26874E1
iondef2_imon=1.59626E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.96045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=8.56163E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3415E1
lens5b_imon=2.20045E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5411E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41873E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.45013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.34795E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73316E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.30822E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=8.1496E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82602E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=8.47511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.89254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.16651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=5.98048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.43958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65694E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31788E1
cs_fil1_imon=7.87563E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01942E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67489E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84354E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52064E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22571E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.46988E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.55215E-1	-7.34043E-1	-9.19461E0	-9.18913E0	5.26905E-3	9.36031E-2	2.73207E1	-3.26486E1	-3.26133E1	2.68088E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.55668E-1	-7.34043E-1	-9.19471E0	-9.18915E0	5.26905E-3	9.32455E-2	2.72926E1	-3.26628E1	-3.26454E1	2.68064E1	1.19239E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-7.55334E-1	-7.34162E-1	-9.19485E0	-9.1893E0	5.24521E-3	9.31263E-2	2.7288E1	-3.26632E1	-3.2649E1	2.67952E1	1.19237E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.00942E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.55501E-1	-7.33995E-1	-9.19468E0	-9.18932E0	5.34058E-3	9.35555E-2	2.73051E1	-3.26614E1	-3.26189E1	2.67792E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.55262E-1	-7.33972E-1	-9.1948E0	-9.18913E0	5.38826E-3	9.34362E-2	2.72951E1	-3.26555E1	-3.26408E1	2.68028E1	1.1929E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-7.55382E-1	-7.34329E-1	-9.19464E0	-9.18941E0	5.31673E-3	9.34601E-2	2.73051E1	-3.26499E1	-3.26266E1	2.68364E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.55644E-1	-7.34425E-1	-9.19442E0	-9.18927E0	5.4121E-3	9.3627E-2	2.73051E1	-3.26667E1	-3.26012E1	2.68166E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.55072E-1	-7.3452E-1	-9.19442E0	-9.18932E0	5.29289E-3	9.33886E-2	2.72979E1	-3.26512E1	-3.2593E1	2.67806E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.55167E-1	-7.34472E-1	-9.19454E0	-9.18941E0	5.57899E-3	9.32932E-2	2.73269E1	-3.26655E1	-3.26307E1	2.67902E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-7.55286E-1	-7.34496E-1	-9.19464E0	-9.18901E0	5.43594E-3	9.36508E-2	2.73257E1	-3.26673E1	-3.26001E1	2.68076E1	1.1929E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-7.55095E-1	-7.34568E-1	-9.19454E0	-9.18903E0	5.34058E-3	9.36747E-2	2.72865E1	-3.26254E1	-3.2635E1	2.68232E1	1.19238E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.55191E-1	-7.34496E-1	-9.19423E0	-9.1893E0	5.17368E-3	9.3627E-2	2.73195E1	-3.26488E1	-3.26332E1	2.68082E1	1.1929E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-7.55405E-1	-7.34568E-1	-9.19459E0	-9.18899E0	5.45979E-3	9.37223E-2	2.73081E1	-3.26765E1	-3.25978E1	2.67836E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98481E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-7.55239E-1	-7.34401E-1	-9.19456E0	-9.18911E0	5.50747E-3	9.377E-2	2.72925E1	-3.26651E1	-3.2647E1	2.68599E1	1.19238E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-7.54952E-1	-7.34401E-1	-9.19466E0	-9.18932E0	5.31673E-3	9.3627E-2	2.73039E1	-3.26349E1	-3.26166E1	2.67866E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.55048E-1	-7.34568E-1	-9.19478E0	-9.18922E0	5.55515E-3	9.36985E-2	2.72973E1	-3.26801E1	-3.26356E1	2.67878E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.01347E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.54952E-1	-7.34425E-1	-9.19449E0	-9.18903E0	5.17368E-3	9.37223E-2	2.73177E1	-3.26464E1	-3.2611E1	2.68502E1	1.1929E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.54905E-1	-7.34329E-1	-9.19435E0	-9.18884E0	5.19753E-3	9.37462E-2	2.73472E1	-3.26885E1	-3.25882E1	2.67653E1	1.19239E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.54857E-1	-7.33995E-1	-9.19471E0	-9.18918E0	5.4121E-3	9.35316E-2	2.72919E1	-3.26603E1	-3.26302E1	2.68244E1	1.19238E-7	2.52209E-3	2.52209E-3	6.3514E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.54762E-1	-7.34258E-1	-9.19478E0	-9.18903E0	5.19753E-3	9.36985E-2	2.73316E1	-3.26874E1	-3.26154E1	2.67974E1	1.1929E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.01347E-1