[Scan]
initial_time=2015-12-18T21:12:52
final_time=2015-12-18T21:13:12
ip_count=19
run=1020
dataset=4
scan=229
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-7.55405E-1
ql1_imon=1.37426E-8
ql2_vset=
ql2_vmon=-7.34258E-1
ql2_imon=1.96641E-9
ql3_vset=
ql3_vmon=-9.19454E0
ql3_imon=2.05731E-10
ql4_vset=
ql4_vmon=-9.18937E0
ql4_imon=3.50952E-11
mult1=-9.94858E-9
mult2=-2.60371E-9
rf_tmon=-5.15247E-3
rf_agc=3.30437E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.69063E-9
bslens_vset=-6.2E0
bslens_vmon=-6.77849E0
bslens_imon=2.36832E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.17994E1
lens5a_imon=1.89331E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54265E1
cs_ef1b_imon=3.19029E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04795E2
lens23_imon=1.02528E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04195E1
cs_ea1_imon=9.51334E-6
lens1_vset=-5.0E0
lens1_vmon=-5.26141E0
lens1_imon=2.95593E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05949E1
cs_ea2_imon=1.50614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.39894E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.23794E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.10249E0
cs_ionrep_imon=8.92933E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.94372E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.96242E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=3.40076E-8
tplens_vset=1.4E-1
tplens_vmon=1.72855E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.39438E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26225E1
iondef2_imon=1.64421E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03101E2
lens6_imon=2.98843E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.00162E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22626E0
ionrepsh_imon=7.55585E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32384E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.74778E0
os_ea2_imon=4.0362E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=1.99855E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.45477E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=3.45266E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22879E2
cs_ionfoca_imon=6.27008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72921E1
iondef1_imon=1.17088E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.35905E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=8.16061E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-9.61679E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56387E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9275E3
multa_neg_imon=8.52558E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93641E3
defgrida_imon=6.15352E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.36261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.81059E0
defgridb_imon=7.27106E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.43321E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08128E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66001E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=7.45517E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00921E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67302E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56269E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22533E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.03449E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.95932E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-7.5531E-1	-7.34544E-1	-9.19454E0	-9.18934E0	5.19753E-3	9.30071E-2	2.7442E1	-3.27169E1	-3.24738E1	2.67885E1	1.19186E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.03712E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-7.55572E-1	-7.34234E-1	-9.19442E0	-9.18911E0	5.29289E-3	9.3317E-2	2.73081E1	-3.26693E1	-3.26314E1	2.67783E1	1.19264E-7	2.51214E-3	2.51214E-3	6.32644E-3	3.00378E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.55334E-1	-7.34353E-1	-9.19435E0	-9.18913E0	5.126E-3	9.35793E-2	2.73139E1	-3.26714E1	-3.26207E1	2.6803E1					
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.55072E-1	-7.34401E-1	-9.19449E0	-9.18863E0	5.38826E-3	9.35555E-2	2.73015E1	-3.26765E1	-3.2644E1	2.68202E1	1.1929E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-7.55334E-1	-7.34615E-1	-9.19437E0	-9.18911E0	5.22137E-3	9.36508E-2	2.73081E1	-3.26837E1	-3.26326E1	2.678E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-7.5531E-1	-7.34615E-1	-9.19468E0	-9.18896E0	5.03063E-3	9.35555E-2	2.72907E1	-3.26675E1	-3.26116E1	2.6831E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-7.55334E-1	-7.34496E-1	-9.19442E0	-9.18927E0	5.19753E-3	9.34839E-2	2.72839E1	-3.26673E1	-3.2613E1	2.67968E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-7.55119E-1	-7.34687E-1	-9.19442E0	-9.18925E0	5.14984E-3	9.3174E-2	2.73123E1	-3.26549E1	-3.26398E1	2.68244E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0968E0	-7.5531E-1	-7.34568E-1	-9.19478E0	-9.1892E0	5.57899E-3	9.32693E-2	2.72853E1	-3.262E1	-3.26326E1	2.68172E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-7.55072E-1	-7.34568E-1	-9.1948E0	-9.18908E0	5.50747E-3	9.33647E-2	2.72907E1	-3.26603E1	-3.2641E1	2.68382E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.98222E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-7.55215E-1	-7.34687E-1	-9.19476E0	-9.18908E0	5.126E-3	9.31263E-2	2.73207E1	-3.26603E1	-3.26567E1	2.67842E1	1.19238E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.96929E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-7.54976E-1	-7.3452E-1	-9.19478E0	-9.18903E0	5.126E-3	9.32693E-2	2.73117E1	-3.26579E1	-3.26687E1	2.684E1	1.19238E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-7.55095E-1	-7.34377E-1	-9.19459E0	-9.18913E0	5.14984E-3	9.32693E-2	2.72961E1	-3.26639E1	-3.2623E1	2.68376E1	1.1929E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-7.54952E-1	-7.34162E-1	-9.1948E0	-9.18903E0	5.05447E-3	9.3174E-2	2.72757E1	-3.26549E1	-3.26344E1	2.67734E1	1.1929E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.55E-1	-7.34186E-1	-9.19468E0	-9.18949E0	5.03063E-3	9.32932E-2	2.73087E1	-3.26543E1	-3.26494E1	2.68047E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.54881E-1	-7.34138E-1	-9.19478E0	-9.18918E0	4.88758E-3	9.32932E-2	2.72757E1	-3.26819E1	-3.25924E1	2.68028E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-7.54952E-1	-7.34377E-1	-9.1948E0	-9.18937E0	5.14984E-3	9.32932E-2	2.73576E1	-3.26649E1	-3.26372E1	2.68214E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.55286E-1	-7.34496E-1	-9.19471E0	-9.18951E0	5.03063E-3	9.35316E-2	2.72703E1	-3.26531E1	-3.26207E1	2.68064E1	1.19238E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.03712E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.55286E-1	-7.34472E-1	-9.1948E0	-9.18951E0	5.36442E-3	9.35078E-2	2.73291E1	-3.26777E1	-3.26368E1	2.67878E1	1.1929E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-7.55405E-1	-7.34258E-1	-9.19454E0	-9.18937E0	5.38826E-3	9.3174E-2	2.72921E1	-3.26225E1	-3.26319E1	2.67908E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03449E-1