[Scan]
initial_time=2015-12-18T21:13:19
final_time=2015-12-18T21:13:38
ip_count=19
run=1020
dataset=4
scan=230
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-7.55191E-1
ql1_imon=1.36913E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=2.00336E-9
ql3_vset=
ql3_vmon=-9.19418E0
ql3_imon=2.49016E-10
ql4_vset=
ql4_vmon=-9.18901E0
ql4_imon=6.84977E-11
mult1=-9.45141E-9
mult2=-2.85634E-9
rf_tmon=-4.56049E-3
rf_agc=3.3634E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.64657E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59164E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20452E1
lens5a_imon=2.044E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52799E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.045E2
lens23_imon=1.01876E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05276E1
cs_ea1_imon=1.14672E-5
lens1_vset=-5.0E0
lens1_vmon=-5.51556E0
lens1_imon=2.89464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03456E1
cs_ea2_imon=1.34031E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.05442E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.39821E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.28589E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14464E1
os_ea1_imon=2.35618E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.10379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31819E0
cs_ionrep_imon=9.90267E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93186E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=1.95305E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=3.39423E-8
tplens_vset=1.4E-1
tplens_vmon=1.53268E0
tplens_imon=-5.19248E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25882E1
iondef3_imon=1.55192E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.60527E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.97949E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.98257E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20884E0
ionrepsh_imon=8.74548E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34421E1
lens5b_imon=2.22172E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5459E0
os_ea2_imon=-1.05639E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.05989E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46678E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.45626E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23111E2
cs_ionfoca_imon=6.36237E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.09E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.3188E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=8.13746E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56111E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.93076E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93764E3
defgrida_imon=7.3756E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50086E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56999E0
defgridb_imon=5.86152E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.45568E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07756E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65858E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=7.41312E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.08296E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2114E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62442E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22624E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50883E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-7.55167E-1	-7.33995E-1	-9.19433E0	-9.18951E0	5.17368E-3	9.33886E-2	2.73422E1	-3.26677E1	-3.26121E1	2.68178E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.55262E-1	-7.33757E-1	-9.19478E0	-9.18963E0	4.95911E-3	9.34362E-2	2.73167E1	-3.26517E1	-3.2648E1	2.67836E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-7.5531E-1	-7.34043E-1	-9.19442E0	-9.18925E0	4.64916E-3	9.31978E-2	2.73322E1	-3.26602E1	-3.26484E1	2.68076E1	1.1929E-7	2.52362E-3	2.52362E-3	6.32978E-3	2.9829E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-7.55191E-1	-7.34234E-1	-9.19425E0	-9.1892E0	4.64916E-3	9.33647E-2	2.72709E1	-3.26756E1	-3.26077E1	2.68118E1	1.19239E-7	2.52169E-3	2.52169E-3	6.35601E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.5531E-1	-7.34115E-1	-9.19425E0	-9.18968E0	4.69685E-3	9.36747E-2	2.73284E1	-3.2656E1	-3.26419E1	2.68046E1	1.19239E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.55358E-1	-7.34067E-1	-9.19454E0	-9.18922E0	4.69685E-3	9.3317E-2	2.7311E1	-3.26437E1	-3.26313E1	2.681E1	1.1929E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-7.55572E-1	-7.34234E-1	-9.19454E0	-9.18949E0	5.03063E-3	9.34839E-2	2.72709E1	-3.26516E1	-3.26249E1	2.68308E1	1.1929E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-7.55811E-1	-7.34258E-1	-9.19447E0	-9.18946E0	4.91142E-3	9.35078E-2	2.73185E1	-3.2682E1	-3.26317E1	2.67976E1	1.1929E-7	2.51369E-3	2.51369E-3	6.31779E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.55906E-1	-7.3421E-1	-9.19447E0	-9.18951E0	5.03063E-3	9.34362E-2	2.73075E1	-3.26639E1	-3.2611E1	2.68358E1	1.19235E-7	2.51642E-3	2.51642E-3	6.31902E-3	2.99535E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.55501E-1	-7.33972E-1	-9.19459E0	-9.18934E0	5.38826E-3	9.35555E-2	2.73009E1	-3.26308E1	-3.26422E1	2.6849E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.54905E-1	-7.33924E-1	-9.19449E0	-9.18922E0	5.14984E-3	9.34839E-2	2.7326E1	-3.26503E1	-3.26405E1	2.68273E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.55095E-1	-7.3421E-1	-9.19466E0	-9.18925E0	5.19753E-3	9.3627E-2	2.72889E1	-3.26285E1	-3.26142E1	2.68026E1	1.1929E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.00852E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-7.55E-1	-7.34043E-1	-9.19473E0	-9.1893E0	5.07832E-3	9.38654E-2	2.73116E1	-3.26862E1	-3.2636E1	2.68202E1	1.19236E-7	2.51045E-3	2.51045E-3	6.3131E-3	3.00251E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-7.54809E-1	-7.34663E-1	-9.19433E0	-9.18922E0	5.03063E-3	9.36508E-2	2.73112E1	-3.26603E1	-3.26548E1	2.68268E1	1.19238E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-7.54905E-1	-7.34472E-1	-9.19454E0	-9.18899E0	5.00679E-3	9.36031E-2	2.73165E1	-3.26536E1	-3.26452E1	2.68502E1	1.19237E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.01475E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-7.55072E-1	-7.34377E-1	-9.19466E0	-9.18951E0	5.19753E-3	9.36508E-2	2.73135E1	-3.2644E1	-3.26092E1	2.68064E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.98481E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-7.55E-1	-7.34377E-1	-9.19449E0	-9.18925E0	5.26905E-3	9.34362E-2	2.73163E1	-3.26738E1	-3.26384E1	2.68007E1	1.1929E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-7.55095E-1	-7.34544E-1	-9.19461E0	-9.18934E0	4.81606E-3	9.32217E-2	2.72685E1	-3.26679E1	-3.26496E1	2.67848E1	1.1929E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.00852E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-7.54976E-1	-7.34448E-1	-9.1944E0	-9.18915E0	5.07832E-3	9.34124E-2	2.72865E1	-3.26567E1	-3.26356E1	2.67908E1	1.19238E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-7.55191E-1	-7.34758E-1	-9.19418E0	-9.18901E0	5.22137E-3	9.33886E-2	2.73267E1	-3.26915E1	-3.25882E1	2.67914E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02133E-1