[Scan]
initial_time=2015-12-18T21:13:45
final_time=2015-12-18T21:14:05
ip_count=19
run=1020
dataset=4
scan=231
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-7.55429E-1
ql1_imon=1.37444E-8
ql2_vset=
ql2_vmon=-7.34305E-1
ql2_imon=2.01557E-9
ql3_vset=
ql3_vmon=-9.19487E0
ql3_imon=3.12078E-10
ql4_vset=
ql4_vmon=-9.18922E0
ql4_imon=4.74215E-11
mult1=-9.8036E-9
mult2=-2.74805E-9
rf_tmon=-4.08434E-3
rf_agc=3.37046E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=1.63419E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20181E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5321E1
cs_ef1b_imon=3.17574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02373E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.402E0
lens1_imon=2.3539E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64545E1
os_ef1alow_imon=2.98148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0348E1
cs_ea2_imon=1.39655E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.03083E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.39627E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.30902E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15456E1
os_ea1_imon=2.36123E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63861E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28574E0
cs_ionrep_imon=9.40519E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91824E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=1.95767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=3.39632E-8
tplens_vset=1.4E-1
tplens_vmon=1.59938E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26359E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26594E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.0331E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=8.70222E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34066E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.14169E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5429E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.50855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.47622E-1
os_ef2bup_imon=-5.2123E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=3.45689E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.32416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.09772E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.07498E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6824E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.31949E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=8.13507E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15099E0
cs_ionaccel_imon=-8.64758E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=2.05522E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-5.76312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=5.90117E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.4399E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08181E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65869E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=7.6639E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02588E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67267E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.51859E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28778E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.91414E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.88949E-1
res40_imon=-2.35912E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-7.55382E-1	-7.34401E-1	-9.19452E0	-9.18901E0	5.45979E-3	9.37462E-2	2.72544E1	-3.26172E1	-3.26349E1	2.67794E1	1.19188E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02769E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.55525E-1	-7.34568E-1	-9.19416E0	-9.18908E0	5.45979E-3	9.35793E-2	2.72925E1	-3.26669E1	-3.26603E1	2.68202E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.55358E-1	-7.33972E-1	-9.1943E0	-9.18913E0	5.36442E-3	9.34839E-2	2.73027E1	-3.26526E1	-3.26325E1	2.67938E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.55501E-1	-7.3421E-1	-9.19437E0	-9.18884E0	5.67436E-3	9.34362E-2	2.73228E1	-3.26579E1	-3.26567E1	2.68418E1	1.19239E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.55239E-1	-7.34019E-1	-9.19456E0	-9.18889E0	5.50747E-3	9.38892E-2	2.73183E1	-3.26434E1	-3.26464E1	2.6828E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.55072E-1	-7.34234E-1	-9.19452E0	-9.18922E0	5.65052E-3	9.36031E-2	2.73167E1	-3.26725E1	-3.26419E1	2.68009E1	1.19238E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.55286E-1	-7.34043E-1	-9.19447E0	-9.1892E0	5.53131E-3	9.37939E-2	2.73237E1	-3.26591E1	-3.26446E1	2.6787E1	1.19237E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.55501E-1	-7.34019E-1	-9.19483E0	-9.18903E0	5.6982E-3	9.33886E-2	2.72787E1	-3.26524E1	-3.26224E1	2.68538E1	1.1929E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.55286E-1	-7.33948E-1	-9.19504E0	-9.1892E0	5.43594E-3	9.32217E-2	2.73069E1	-3.26555E1	-3.2629E1	2.67944E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-7.54976E-1	-7.33924E-1	-9.19459E0	-9.18934E0	5.67436E-3	9.32217E-2	2.72438E1	-3.26314E1	-3.26735E1	2.67872E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-7.55191E-1	-7.33924E-1	-9.19459E0	-9.18941E0	5.65052E-3	9.34124E-2	2.73045E1	-3.26639E1	-3.26116E1	2.68064E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.5531E-1	-7.33948E-1	-9.19478E0	-9.18934E0	5.26905E-3	9.3627E-2	2.73267E1	-3.26795E1	-3.26452E1	2.67902E1	1.1929E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-7.55382E-1	-7.34162E-1	-9.19459E0	-9.18891E0	5.60284E-3	9.33886E-2	2.73275E1	-3.26561E1	-3.26378E1	2.68046E1	1.19238E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-7.55286E-1	-7.34091E-1	-9.19466E0	-9.18925E0	5.36442E-3	9.33409E-2	2.73165E1	-3.26909E1	-3.262E1	2.68065E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-7.55215E-1	-7.34138E-1	-9.19471E0	-9.18951E0	5.31673E-3	9.33409E-2	2.73263E1	-3.26319E1	-3.26036E1	2.67866E1	1.19213E-7	2.52189E-3	2.52189E-3	6.31283E-3	2.99861E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-7.55072E-1	-7.34258E-1	-9.19485E0	-9.18927E0	5.57899E-3	9.35078E-2	2.73099E1	-3.26573E1	-3.26158E1	2.68214E1					
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09657E0	-7.55143E-1	-7.34138E-1	-9.19476E0	-9.18934E0	5.38826E-3	9.35555E-2	2.73213E1	-3.26603E1	-3.2617E1	2.67974E1	1.19239E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.55262E-1	-7.34258E-1	-9.19461E0	-9.18961E0	5.4121E-3	9.33647E-2	2.72992E1	-3.26496E1	-3.26231E1	2.68273E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.03081E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09627E0	-7.55191E-1	-7.3421E-1	-9.19454E0	-9.18901E0	5.67436E-3	9.34362E-2	2.72991E1	-3.26573E1	-3.26224E1	2.6789E1	1.1929E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-7.55429E-1	-7.34305E-1	-9.19487E0	-9.18922E0	5.60284E-3	9.33647E-2	2.73299E1	-3.26594E1	-3.26359E1	2.6824E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98481E-1