[Scan]
initial_time=2015-12-18T21:14:12
final_time=2015-12-18T21:14:31
ip_count=19
run=1020
dataset=4
scan=232
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-7.55262E-1
ql1_imon=1.37606E-8
ql2_vset=
ql2_vmon=-7.34115E-1
ql2_imon=1.9617E-9
ql3_vset=
ql3_vmon=-9.19466E0
ql3_imon=2.81477E-10
ql4_vset=
ql4_vmon=-9.18946E0
ql4_imon=4.32372E-11
mult1=-9.74039E-9
mult2=-2.69266E-9
rf_tmon=-4.43432E-3
rf_agc=3.30872E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.63339E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70699E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=1.95603E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05241E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53316E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0469E2
lens23_imon=1.02572E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=1.08003E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.39716E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.42358E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=3.04036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.39724E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.156E1
os_ea1_imon=2.3414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=9.35111E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=3.3958E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-1.44333E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.48523E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98627E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.00125E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2551E0
ionrepsh_imon=8.44267E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57354E0
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10201E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.40071E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.46023E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.28666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.29997E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=8.15534E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-7.92292E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.82982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93677E3
defgrida_imon=6.49239E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16697E0
defgridb_imon=6.26167E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.44378E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65765E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31811E1
cs_fil1_imon=7.3891E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.97484E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69144E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22668E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.51503E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.55048E-1	-7.34305E-1	-9.19473E0	-9.18949E0	5.45979E-3	9.35078E-2	2.73153E1	-3.26416E1	-3.26068E1	2.67949E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01085E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-7.55E-1	-7.34425E-1	-9.19507E0	-9.18972E0	5.57899E-3	9.38892E-2	2.7349E1	-3.26777E1	-3.26212E1	2.68487E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-7.54786E-1	-7.34282E-1	-9.19485E0	-9.18944E0	5.57899E-3	9.32217E-2	2.72941E1	-3.26898E1	-3.26376E1	2.6792E1	1.1929E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00144E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.55E-1	-7.34258E-1	-9.1948E0	-9.18899E0	5.24521E-3	9.33409E-2	2.72999E1	-3.26572E1	-3.26636E1	2.68309E1	1.19195E-7	2.52123E-3	2.52123E-3	6.3074E-3	3.01249E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.55048E-1	-7.34258E-1	-9.19476E0	-9.18925E0	5.36442E-3	9.31501E-2	2.73198E1	-3.2626E1	-3.26077E1	2.68058E1	1.1929E-7	2.51874E-3	2.51874E-3	6.33065E-3	2.99811E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-7.55119E-1	-7.34162E-1	-9.19452E0	-9.18918E0	5.10216E-3	9.32693E-2	2.72678E1	-3.26933E1	-3.26346E1	2.68569E1	1.19238E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-7.55048E-1	-7.34353E-1	-9.1948E0	-9.18918E0	5.48363E-3	9.32693E-2	2.72927E1	-3.26644E1	-3.26178E1	2.67955E1	1.1929E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-7.55072E-1	-7.34401E-1	-9.1949E0	-9.1893E0	5.6982E-3	9.35316E-2	2.73088E1	-3.26346E1	-3.26248E1	2.68537E1	1.19188E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-7.55262E-1	-7.34591E-1	-9.19478E0	-9.18932E0	5.22137E-3	9.32455E-2	2.73213E1	-3.2644E1	-3.26404E1	2.67686E1	1.1929E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.98819E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-7.55191E-1	-7.34258E-1	-9.19492E0	-9.18932E0	5.34058E-3	9.33647E-2	2.72516E1	-3.26266E1	-3.26266E1	2.68142E1	1.1929E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.55119E-1	-7.34258E-1	-9.19471E0	-9.18908E0	5.43594E-3	9.34362E-2	2.73351E1	-3.26717E1	-3.2623E1	2.67878E1	1.1929E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.55477E-1	-7.34425E-1	-9.19487E0	-9.18937E0	5.22137E-3	9.34362E-2	2.73207E1	-3.26759E1	-3.26416E1	2.67746E1	1.19188E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.5531E-1	-7.34472E-1	-9.19464E0	-9.18956E0	5.10216E-3	9.32217E-2	2.73267E1	-3.26428E1	-3.26242E1	2.68172E1	1.19237E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00144E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-7.55072E-1	-7.3452E-1	-9.19483E0	-9.18925E0	5.26905E-3	9.31263E-2	2.73267E1	-3.26747E1	-3.26314E1	2.68334E1	1.19186E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02659E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.55239E-1	-7.34544E-1	-9.19483E0	-9.18937E0	5.24521E-3	9.31263E-2	2.73177E1	-3.26813E1	-3.25942E1	2.68142E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.55453E-1	-7.33972E-1	-9.1949E0	-9.18939E0	5.10216E-3	9.31501E-2	2.73281E1	-3.26124E1	-3.2649E1	2.68172E1	1.1929E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01085E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.55286E-1	-7.33948E-1	-9.19499E0	-9.18941E0	4.88758E-3	9.35078E-2	2.73063E1	-3.26693E1	-3.26218E1	2.68142E1	1.19238E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.55262E-1	-7.33972E-1	-9.19478E0	-9.18944E0	5.19753E-3	9.33409E-2	2.72931E1	-3.26615E1	-3.26476E1	2.68262E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.5531E-1	-7.33995E-1	-9.19495E0	-9.18927E0	5.31673E-3	9.3627E-2	2.72957E1	-3.26543E1	-3.26425E1	2.6789E1	1.1929E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.55262E-1	-7.34115E-1	-9.19466E0	-9.18946E0	5.38826E-3	9.36031E-2	2.72829E1	-3.26603E1	-3.26254E1	2.68412E1	1.1929E-7	2.50989E-3	2.50989E-3	6.30202E-3	3.02511E-1