[Scan]
initial_time=2015-12-18T21:14:39
final_time=2015-12-18T21:14:58
ip_count=19
run=1020
dataset=4
scan=233
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-7.54881E-1
ql1_imon=1.36953E-8
ql2_vset=
ql2_vmon=-7.34377E-1
ql2_imon=1.98262E-9
ql3_vset=
ql3_vmon=-9.19478E0
ql3_imon=2.27666E-10
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=3.5727E-11
mult1=-9.83671E-9
mult2=-2.95215E-9
rf_tmon=-3.81547E-3
rf_agc=3.41988E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.65893E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20241E1
lens5a_imon=1.97911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.17623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=1.08255E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38938E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04285E1
cs_ea2_imon=1.37672E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.05045E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.39602E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.34753E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63948E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=9.37635E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93705E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.96854E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.40403E-8
tplens_vset=1.4E-1
tplens_vmon=1.57054E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.01442E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=8.47151E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.19973E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.60178E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00861E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.22345E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.45878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.10635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6836E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.29791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=8.15035E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-7.92292E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82594E2
mask1_imon=2.39394E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=5.9913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.42607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.46054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65965E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31851E1
cs_fil1_imon=7.99576E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04765E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67324E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61668E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70084E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22706E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19238E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.95041E-1
res40_imon=-2.27713E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.55429E-1	-7.33781E-1	-9.19425E0	-9.18908E0	5.38826E-3	9.35793E-2	2.73169E1	-3.26408E1	-3.26478E1	2.67704E1	1.1929E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.01209E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-7.5531E-1	-7.33876E-1	-9.19445E0	-9.18946E0	5.05447E-3	9.37462E-2	2.73273E1	-3.26795E1	-3.26446E1	2.68388E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-7.5562E-1	-7.34162E-1	-9.19452E0	-9.18953E0	5.17368E-3	9.36508E-2	2.73381E1	-3.2672E1	-3.26301E1	2.67624E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-7.55167E-1	-7.34138E-1	-9.19468E0	-9.18918E0	5.50747E-3	9.33886E-2	2.72811E1	-3.26554E1	-3.26404E1	2.684E1	1.1929E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.54952E-1	-7.34258E-1	-9.19437E0	-9.18941E0	4.98295E-3	9.37462E-2	2.73071E1	-3.2652E1	-3.2642E1	2.67986E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.55072E-1	-7.34258E-1	-9.19464E0	-9.18932E0	5.14984E-3	9.38654E-2	2.73143E1	-3.26542E1	-3.26291E1	2.68298E1	1.1929E-7	2.51364E-3	2.51364E-3	6.32986E-3	2.9841E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.55143E-1	-7.34115E-1	-9.19447E0	-9.18891E0	5.05447E-3	9.40323E-2	2.72959E1	-3.26648E1	-3.26606E1	2.6842E1	1.19129E-7	2.52635E-3	2.52635E-3	6.33592E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-7.54881E-1	-7.34019E-1	-9.19449E0	-9.18913E0	5.07832E-3	9.37939E-2	2.72907E1	-3.26464E1	-3.26476E1	2.68022E1	1.1929E-7	2.51819E-3	2.51819E-3	6.29455E-3	2.99463E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-7.54905E-1	-7.33995E-1	-9.19447E0	-9.18922E0	5.14984E-3	9.3317E-2	2.72967E1	-3.26645E1	-3.26176E1	2.67986E1	1.19238E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.54952E-1	-7.34282E-1	-9.19464E0	-9.18941E0	5.07832E-3	9.36508E-2	2.72967E1	-3.26723E1	-3.26603E1	2.67589E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.55167E-1	-7.34305E-1	-9.19473E0	-9.18951E0	5.03063E-3	9.38654E-2	2.72957E1	-3.26614E1	-3.25883E1	2.68118E1	1.19238E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.54857E-1	-7.34186E-1	-9.19449E0	-9.18968E0	5.14984E-3	9.35555E-2	2.73237E1	-3.26753E1	-3.26194E1	2.68514E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.54905E-1	-7.34091E-1	-9.19471E0	-9.1897E0	5.48363E-3	9.36985E-2	2.72912E1	-3.26816E1	-3.2622E1	2.67723E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02769E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-7.54833E-1	-7.33757E-1	-9.19483E0	-9.18899E0	5.24521E-3	9.36747E-2	2.73101E1	-3.26541E1	-3.26491E1	2.68647E1	1.1929E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.02769E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.54952E-1	-7.34067E-1	-9.19476E0	-9.18915E0	5.26905E-3	9.35555E-2	2.73021E1	-3.26627E1	-3.26621E1	2.68126E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.54929E-1	-7.34067E-1	-9.19452E0	-9.18911E0	5.4121E-3	9.36747E-2	2.72845E1	-3.26944E1	-3.26231E1	2.68285E1	1.19213E-7	2.51701E-3	2.51701E-3	6.32099E-3	3.00896E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.55286E-1	-7.33829E-1	-9.19423E0	-9.18941E0	5.24521E-3	9.33647E-2	2.73402E1	-3.2639E1	-3.26374E1	2.68071E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.54976E-1	-7.34115E-1	-9.19435E0	-9.18939E0	5.17368E-3	9.36508E-2	2.73145E1	-3.26773E1	-3.26065E1	2.68226E1	1.19243E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00432E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-7.55072E-1	-7.33972E-1	-9.19464E0	-9.18956E0	5.126E-3	9.35555E-2	2.72979E1	-3.26524E1	-3.26386E1	2.68304E1	1.19238E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-7.54881E-1	-7.34377E-1	-9.19478E0	-9.18941E0	5.19753E-3	9.38416E-2	2.73285E1	-3.26651E1	-3.26368E1	2.6836E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1