[Scan]
initial_time=2015-12-18T21:16:02
final_time=2015-12-18T21:16:30
ip_count=19
run=1020
dataset=4
scan=236
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-7.55215E-1
ql1_imon=1.3767E-8
ql2_vset=
ql2_vmon=-7.34305E-1
ql2_imon=1.99418E-9
ql3_vset=
ql3_vmon=-9.1943E0
ql3_imon=2.60043E-10
ql4_vset=
ql4_vmon=-9.18922E0
ql4_imon=4.14133E-11
mult1=-1.02461E-8
mult2=-2.86033E-9
rf_tmon=-4.09185E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=1.61289E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05277E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.15677E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.11392E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.63869E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=3.00324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.4189E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84646E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.39749E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.30139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=2.35691E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27012E0
cs_ionrep_imon=9.64312E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02284E1
cs_anode1_imon=1.95341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.39281E-8
tplens_vset=1.4E-1
tplens_vmon=1.64083E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.99177E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30016E0
ionrepsh_imon=8.5436E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.59938E0
os_ea2_imon=-5.94952E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00893E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.34064E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.45194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.09576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.3352E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=8.14789E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-6.37322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.72889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.46572E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.45856E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65668E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=7.67741E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.46138E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67539E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90928E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22602E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19342E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.35866E-1
res40_imon=-2.29875E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.55215E-1	-7.33852E-1	-9.19454E0	-9.18896E0	5.38826E-3	9.36031E-2	2.72805E1	-3.26242E1	-3.265E1	2.68016E1	1.19186E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9874E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.55E-1	-7.34067E-1	-9.19459E0	-9.18913E0	5.31673E-3	9.32693E-2	2.73045E1	-3.26691E1	-3.26225E1	2.68328E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-7.54929E-1	-7.34043E-1	-9.1948E0	-9.18939E0	5.29289E-3	9.34124E-2	2.72997E1	-3.26651E1	-3.2638E1	2.67956E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.03027E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.55E-1	-7.34067E-1	-9.19442E0	-9.18937E0	5.19753E-3	9.33886E-2	2.73092E1	-3.2662E1	-3.26431E1	2.68148E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-7.55239E-1	-7.34067E-1	-9.19492E0	-9.18906E0	5.26905E-3	9.34124E-2	2.72803E1	-3.26589E1	-3.2644E1	2.68029E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.55215E-1	-7.33614E-1	-9.19483E0	-9.1892E0	5.29289E-3	9.35316E-2	2.73339E1	-3.26386E1	-3.26224E1	2.6789E1	1.1929E-7	2.5117E-3	2.5117E-3	6.31151E-3	2.9965E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.54952E-1	-7.33852E-1	-9.19497E0	-9.1892E0	5.24521E-3	9.33886E-2	2.72985E1	-3.26549E1	-3.2641E1	2.68052E1	1.1929E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-7.55072E-1	-7.33829E-1	-9.19471E0	-9.18941E0	5.31673E-3	9.34601E-2	2.73213E1	-3.26476E1	-3.26362E1	2.68088E1	1.19238E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.55048E-1	-7.34067E-1	-9.19497E0	-9.18901E0	5.29289E-3	9.32455E-2	2.73039E1	-3.26455E1	-3.25888E1	2.68322E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.54952E-1	-7.34043E-1	-9.1948E0	-9.18934E0	5.24521E-3	9.35078E-2	2.72955E1	-3.26765E1	-3.26344E1	2.67788E1	1.19238E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.55119E-1	-7.34115E-1	-9.19442E0	-9.18958E0	5.03063E-3	9.36031E-2	2.73478E1	-3.26843E1	-3.2638E1	2.67842E1	1.19264E-7	2.51593E-3	2.51593E-3	6.31012E-3	3.00896E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.54881E-1	-7.34138E-1	-9.19449E0	-9.1892E0	5.00679E-3	9.34362E-2	2.73225E1	-3.26759E1	-3.26344E1	2.68166E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.55286E-1	-7.34091E-1	-9.1948E0	-9.18934E0	4.95911E-3	9.35555E-2	2.73204E1	-3.26726E1	-3.2639E1	2.68022E1	1.19186E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.54976E-1	-7.34401E-1	-9.1948E0	-9.1893E0	5.05447E-3	9.34362E-2	2.73015E1	-3.26579E1	-3.26236E1	2.6818E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.55E-1	-7.34162E-1	-9.19442E0	-9.1893E0	5.07832E-3	9.33409E-2	2.73435E1	-3.26759E1	-3.2614E1	2.68009E1	1.1929E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.55072E-1	-7.34019E-1	-9.19433E0	-9.18953E0	4.98295E-3	9.36747E-2	2.73123E1	-3.26482E1	-3.26194E1	2.68192E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.54833E-1	-7.33972E-1	-9.19452E0	-9.18972E0	5.14984E-3	9.33886E-2	2.73093E1	-3.26633E1	-3.26398E1	2.68522E1	1.1929E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.5531E-1	-7.34186E-1	-9.19459E0	-9.18946E0	5.14984E-3	9.35078E-2	2.72915E1	-3.26372E1	-3.26372E1	2.6801E1	1.1929E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.55358E-1	-7.33972E-1	-9.19447E0	-9.18915E0	4.98295E-3	9.34839E-2	2.73328E1	-3.26803E1	-3.2616E1	2.68346E1	1.1929E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.55215E-1	-7.34305E-1	-9.1943E0	-9.18922E0	5.24521E-3	9.39131E-2	2.72967E1	-3.26615E1	-3.26518E1	2.68123E1	1.19342E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.02133E-1