[Scan]
initial_time=2015-12-18T21:16:40
final_time=2015-12-18T21:17:08
ip_count=19
run=1020
dataset=4
scan=237
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-7.55239E-1
ql1_imon=1.3809E-8
ql2_vset=
ql2_vmon=-7.34067E-1
ql2_imon=2.05334E-9
ql3_vset=
ql3_vmon=-9.19459E0
ql3_imon=2.62034E-10
ql4_vset=
ql4_vmon=-9.18896E0
ql4_imon=2.26617E-11
mult1=-1.02341E-8
mult2=-2.77251E-9
rf_tmon=-2.69192E-3
rf_agc=3.59832E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.67525E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.96793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.19173E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=1.08904E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41462E0
lens1_imon=2.55938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0342E1
cs_ea2_imon=1.40195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.39488E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.34717E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.41961E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.40324E-8
tplens_vset=1.4E-1
tplens_vmon=1.59457E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26711E1
iondef3_imon=1.48379E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.59049E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.96488E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31639E0
ionrepsh_imon=8.54721E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5471E0
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44275E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.47032E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.3586E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=8.13377E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.61353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55194E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.43183E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07509E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65763E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=7.8456E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01461E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67371E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8371E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.21761E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.54786E-1	-7.34329E-1	-9.19478E0	-9.1892E0	5.36442E-3	9.38416E-2	2.73213E1	-3.26831E1	-3.25954E1	2.6825E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-7.55024E-1	-7.34162E-1	-9.19442E0	-9.18899E0	5.4121E-3	9.36985E-2	2.73111E1	-3.26681E1	-3.26446E1	2.67866E1	1.1929E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-7.55262E-1	-7.34377E-1	-9.19461E0	-9.18896E0	5.60284E-3	9.34601E-2	2.73169E1	-3.26585E1	-3.26054E1	2.6807E1	1.1929E-7	2.51359E-3	2.51359E-3	6.28511E-3	3.02277E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.55405E-1	-7.34377E-1	-9.19435E0	-9.18911E0	5.50747E-3	9.32932E-2	2.73273E1	-3.26645E1	-3.25948E1	2.67944E1	1.1929E-7	2.51603E-3	2.51603E-3	6.3445E-3	3.03383E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.55334E-1	-7.34353E-1	-9.19452E0	-9.18918E0	5.48363E-3	9.35793E-2	2.73069E1	-3.26663E1	-3.2584E1	2.678E1	1.19238E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-7.55382E-1	-7.34305E-1	-9.1948E0	-9.18918E0	5.05447E-3	9.36031E-2	2.72949E1	-3.26969E1	-3.26092E1	2.68016E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32661E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.55525E-1	-7.34186E-1	-9.19483E0	-9.18906E0	5.34058E-3	9.38177E-2	2.72967E1	-3.26771E1	-3.26122E1	2.67788E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.55286E-1	-7.33972E-1	-9.19471E0	-9.18913E0	5.45979E-3	9.36985E-2	2.73075E1	-3.26627E1	-3.26158E1	2.6807E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.55119E-1	-7.3421E-1	-9.19485E0	-9.18889E0	5.50747E-3	9.36031E-2	2.72781E1	-3.26284E1	-3.26428E1	2.68032E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.55024E-1	-7.34711E-1	-9.19461E0	-9.18915E0	5.38826E-3	9.34362E-2	2.73375E1	-3.26837E1	-3.25918E1	2.68166E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-7.55119E-1	-7.34186E-1	-9.19483E0	-9.18939E0	5.17368E-3	9.36508E-2	2.7288E1	-3.26537E1	-3.26242E1	2.67845E1	1.19238E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-7.55334E-1	-7.34067E-1	-9.19468E0	-9.18908E0	5.31673E-3	9.33886E-2	2.73192E1	-3.27001E1	-3.26119E1	2.67794E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.55191E-1	-7.34496E-1	-9.19459E0	-9.18887E0	5.14984E-3	9.34601E-2	2.73119E1	-3.26772E1	-3.26363E1	2.68655E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.55262E-1	-7.34282E-1	-9.1948E0	-9.18899E0	5.17368E-3	9.35555E-2	2.73312E1	-3.26642E1	-3.26069E1	2.68157E1	1.19192E-7	2.51886E-3	2.51886E-3	6.323E-3	3.01733E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.55048E-1	-7.34353E-1	-9.19447E0	-9.1893E0	5.38826E-3	9.41277E-2	2.73021E1	-3.26826E1	-3.25959E1	2.67806E1	1.1929E-7	2.51758E-3	2.51758E-3	6.31321E-3	3.00087E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-7.55239E-1	-7.3452E-1	-9.1949E0	-9.18925E0	5.53131E-3	9.38416E-2	2.73105E1	-3.26693E1	-3.2647E1	2.68124E1	1.1929E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.00966E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-7.55048E-1	-7.34353E-1	-9.19466E0	-9.1893E0	5.55515E-3	9.37462E-2	2.72961E1	-3.26615E1	-3.26164E1	2.68016E1	1.1929E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.03185E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-7.55167E-1	-7.34282E-1	-9.19464E0	-9.18915E0	5.22137E-3	9.35316E-2	2.72998E1	-3.26649E1	-3.26467E1	2.68283E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-7.55024E-1	-7.34091E-1	-9.19468E0	-9.18903E0	5.10216E-3	9.35316E-2	2.72925E1	-3.26789E1	-3.26278E1	2.67788E1	1.1929E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-7.55239E-1	-7.34067E-1	-9.19459E0	-9.18896E0	5.07832E-3	9.37462E-2	2.72985E1	-3.26476E1	-3.26711E1	2.68274E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1