[Scan]
initial_time=2015-12-18T21:17:18
final_time=2015-12-18T21:17:46
ip_count=19
run=1020
dataset=4
scan=238
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08864E-4
ql1_vset=
ql1_vmon=-7.55596E-1
ql1_imon=1.37271E-8
ql2_vset=
ql2_vmon=-7.34138E-1
ql2_imon=1.99815E-9
ql3_vset=
ql3_vmon=-9.19464E0
ql3_imon=2.25723E-10
ql4_vset=
ql4_vmon=-9.18925E0
ql4_imon=2.65598E-11
mult1=-9.05407E-9
mult2=-2.81243E-9
rf_tmon=-6.04453E-3
rf_agc=3.24323E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.58551E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65749E0
bslens_imon=2.72671E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20154E1
lens5a_imon=1.99787E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05218E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=3.18957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02158E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04737E1
cs_ea1_imon=1.08476E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42643E0
lens1_imon=2.73773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.4168E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.03135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.3961E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15226E1
os_ea1_imon=2.34606E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63876E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2723E0
cs_ionrep_imon=9.55843E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.94872E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.39879E-8
tplens_vset=1.4E-1
tplens_vmon=1.61205E0
tplens_imon=-3.47571E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.4921E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.57768E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98419E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.0287E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2625E0
ionrepsh_imon=8.54469E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3378E1
lens5b_imon=2.18519E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56246E0
os_ea2_imon=-6.74465E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.27457E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.46095E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.08315E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.09799E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67698E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.29826E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=8.11649E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.83214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.86615E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.10856E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63644E0
defgridb_imon=6.19399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.44703E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66084E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31771E1
cs_fil1_imon=7.29299E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02242E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67249E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43654E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56938E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22468E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.59002E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-7.55191E-1	-7.34186E-1	-9.19445E0	-9.18927E0	5.126E-3	9.3317E-2	2.73535E1	-3.26614E1	-3.25942E1	2.68677E1	1.1929E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.55215E-1	-7.3421E-1	-9.19452E0	-9.18913E0	5.50747E-3	9.32455E-2	2.73253E1	-3.26591E1	-3.26272E1	2.68307E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-7.55095E-1	-7.34305E-1	-9.19428E0	-9.18925E0	5.19753E-3	9.34601E-2	2.72921E1	-3.26714E1	-3.2629E1	2.67949E1	1.19237E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.02277E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.55024E-1	-7.33995E-1	-9.19464E0	-9.18884E0	5.29289E-3	9.36031E-2	2.73351E1	-3.26744E1	-3.26529E1	2.67902E1	1.19137E-7	2.51632E-3	2.51632E-3	6.35059E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-7.55334E-1	-7.34115E-1	-9.19466E0	-9.18911E0	5.22137E-3	9.36508E-2	2.73128E1	-3.26378E1	-3.26065E1	2.67926E1	1.1929E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-7.55334E-1	-7.34043E-1	-9.19461E0	-9.18946E0	5.00679E-3	9.33886E-2	2.73159E1	-3.27101E1	-3.262E1	2.6807E1	1.19137E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09688E0	-7.55453E-1	-7.34353E-1	-9.19449E0	-9.18939E0	5.17368E-3	9.38177E-2	2.7298E1	-3.26113E1	-3.26071E1	2.68058E1	1.19238E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09742E0	-7.55286E-1	-7.34568E-1	-9.19466E0	-9.18934E0	5.14984E-3	9.38416E-2	2.72991E1	-3.26927E1	-3.25882E1	2.6796E1	1.1929E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-7.55191E-1	-7.34377E-1	-9.19442E0	-9.18906E0	5.19753E-3	9.3317E-2	2.73225E1	-3.26476E1	-3.2632E1	2.68144E1	1.1929E-7	2.51552E-3	2.51552E-3	6.26371E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-7.55405E-1	-7.34472E-1	-9.19449E0	-9.18951E0	5.57899E-3	9.36508E-2	2.73159E1	-3.26729E1	-3.26609E1	2.68157E1	1.19238E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00824E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-7.55095E-1	-7.34425E-1	-9.1948E0	-9.18934E0	5.79357E-3	9.35078E-2	2.73255E1	-3.26939E1	-3.26452E1	2.67674E1	1.19238E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-7.55143E-1	-7.34329E-1	-9.19466E0	-9.1893E0	5.55515E-3	9.35316E-2	2.73234E1	-3.26703E1	-3.26526E1	2.68004E1	1.1929E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09696E0	-7.5531E-1	-7.34353E-1	-9.19459E0	-9.18937E0	5.29289E-3	9.34601E-2	2.72776E1	-3.26344E1	-3.26388E1	2.67826E1	1.19239E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.55048E-1	-7.34234E-1	-9.19466E0	-9.18918E0	5.34058E-3	9.36031E-2	2.73181E1	-3.26915E1	-3.26077E1	2.6807E1	1.1929E-7	2.51542E-3	2.51542E-3	6.3074E-3	3.01395E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-7.54976E-1	-7.34162E-1	-9.19445E0	-9.18899E0	5.24521E-3	9.34124E-2	2.73309E1	-3.26645E1	-3.2626E1	2.67902E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-7.55215E-1	-7.34234E-1	-9.19466E0	-9.18925E0	5.38826E-3	9.34362E-2	2.72962E1	-3.26502E1	-3.26183E1	2.68058E1	1.19238E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.02922E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-7.5562E-1	-7.34496E-1	-9.19454E0	-9.18927E0	5.57899E-3	9.35078E-2	2.73237E1	-3.26554E1	-3.25972E1	2.68052E1	1.19239E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.03027E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.55072E-1	-7.34615E-1	-9.19464E0	-9.18906E0	5.53131E-3	9.34124E-2	2.73063E1	-3.26555E1	-3.2662E1	2.67972E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-7.55239E-1	-7.3452E-1	-9.19428E0	-9.18937E0	5.53131E-3	9.377E-2	2.73165E1	-3.26939E1	-3.26302E1	2.68556E1	1.19188E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-7.55596E-1	-7.34138E-1	-9.19464E0	-9.18925E0	5.26905E-3	9.377E-2	2.73207E1	-3.26585E1	-3.2623E1	2.67698E1	1.1929E-7	2.51334E-3	2.51334E-3	6.28006E-3	2.9978E-1