[Scan]
initial_time=2015-12-18T21:19:13
final_time=2015-12-18T21:19:40
ip_count=19
run=1020
dataset=4
scan=241
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-7.55143E-1
ql1_imon=1.37367E-8
ql2_vset=
ql2_vmon=-7.34186E-1
ql2_imon=1.96368E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=2.46048E-10
ql4_vset=
ql4_vmon=-9.18901E0
ql4_imon=4.86135E-11
mult1=-9.45141E-9
mult2=-2.63677E-9
rf_tmon=-4.72872E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.62604E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68367E0
bslens_imon=2.52771E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.99192E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54493E1
cs_ef1b_imon=3.20038E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04919E1
cs_ea1_imon=1.10305E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42007E0
lens1_imon=2.43733E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03609E1
cs_ea2_imon=1.39888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.05406E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.39811E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15207E1
os_ea1_imon=2.33988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27238E0
cs_ionrep_imon=9.39321E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.40175E-8
tplens_vset=1.4E-1
tplens_vmon=1.6171E0
tplens_imon=-2.63683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.4896E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.5713E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.9828E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.05118E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25905E0
ionrepsh_imon=8.73274E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.18311E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57017E0
os_ea2_imon=-6.04351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71558E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.50282E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.45698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.10514E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=5.25056E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=8.13418E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.25151E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=6.85211E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.57054E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.40135E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3282E0
defgridb_imon=6.21596E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.44781E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65909E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31783E1
cs_fil1_imon=6.87854E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.22712E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67265E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40674E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.71285E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22518E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13351E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-7.55024E-1	-7.33829E-1	-9.1949E0	-9.18944E0	4.8399E-3	9.35793E-2	2.73241E1	-3.26585E1	-3.26389E1	2.68184E1	1.1929E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.99845E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-7.55262E-1	-7.33876E-1	-9.19485E0	-9.1893E0	4.76837E-3	9.3627E-2	2.73267E1	-3.26621E1	-3.26398E1	2.68322E1	1.1929E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.01475E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-7.55596E-1	-7.33948E-1	-9.19468E0	-9.18906E0	5.31673E-3	9.31025E-2	2.73341E1	-3.2659E1	-3.26451E1	2.67879E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02396E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-7.5531E-1	-7.34067E-1	-9.19471E0	-9.18906E0	5.00679E-3	9.30548E-2	2.73045E1	-3.26885E1	-3.26464E1	2.6789E1	1.1924E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-7.55596E-1	-7.34138E-1	-9.19464E0	-9.18889E0	5.38826E-3	9.35078E-2	2.72692E1	-3.26408E1	-3.26192E1	2.68177E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-7.55286E-1	-7.34353E-1	-9.19478E0	-9.18896E0	5.57899E-3	9.35555E-2	2.73076E1	-3.26659E1	-3.26166E1	2.68179E1	1.1929E-7	2.51679E-3	2.51679E-3	6.323E-3	3.01485E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-7.55191E-1	-7.34162E-1	-9.19473E0	-9.18906E0	5.81741E-3	9.35078E-2	2.72935E1	-3.26462E1	-3.26334E1	2.6774E1	1.1929E-7	2.51498E-3	2.51498E-3	6.3131E-3	2.9944E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.55215E-1	-7.34329E-1	-9.19442E0	-9.18915E0	5.05447E-3	9.36508E-2	2.73171E1	-3.26885E1	-3.26356E1	2.67505E1	1.19264E-7	2.51898E-3	2.51898E-3	6.32125E-3	3.00487E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-7.55095E-1	-7.34234E-1	-9.19442E0	-9.18894E0	5.45979E-3	9.33647E-2	2.73051E1	-3.26326E1	-3.26302E1	2.68238E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-7.54952E-1	-7.34162E-1	-9.19487E0	-9.18922E0	5.31673E-3	9.36031E-2	2.73269E1	-3.2629E1	-3.26036E1	2.68226E1	1.19135E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-7.55119E-1	-7.33805E-1	-9.19468E0	-9.18899E0	5.55515E-3	9.31263E-2	2.73221E1	-3.26627E1	-3.26436E1	2.67993E1	1.1929E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.00966E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.55024E-1	-7.33852E-1	-9.19466E0	-9.1892E0	5.65052E-3	9.33409E-2	2.72979E1	-3.26452E1	-3.26585E1	2.67607E1	1.1929E-7	2.52345E-3	2.52345E-3	6.31711E-3	3.02189E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-7.55358E-1	-7.33948E-1	-9.19476E0	-9.18901E0	5.74589E-3	9.34601E-2	2.72907E1	-3.26458E1	-3.26392E1	2.67872E1	1.19238E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-7.55429E-1	-7.33972E-1	-9.19471E0	-9.18884E0	5.36442E-3	9.34839E-2	2.73187E1	-3.2682E1	-3.26437E1	2.68501E1	1.19188E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.00453E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-7.5531E-1	-7.33924E-1	-9.19464E0	-9.18903E0	5.38826E-3	9.36985E-2	2.7352E1	-3.26873E1	-3.25809E1	2.6799E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-7.55286E-1	-7.34019E-1	-9.1949E0	-9.18932E0	5.22137E-3	9.35793E-2	2.72549E1	-3.26095E1	-3.26346E1	2.67782E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03185E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-7.55E-1	-7.34353E-1	-9.19497E0	-9.18918E0	5.55515E-3	9.35078E-2	2.73231E1	-3.26963E1	-3.2647E1	2.68412E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03185E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.55E-1	-7.3421E-1	-9.1949E0	-9.1893E0	5.36442E-3	9.35078E-2	2.73057E1	-3.26378E1	-3.26596E1	2.68302E1	1.1929E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.04156E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.55143E-1	-7.34091E-1	-9.19456E0	-9.18908E0	5.38826E-3	9.34124E-2	2.72962E1	-3.26703E1	-3.26419E1	2.6783E1	1.1929E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.55143E-1	-7.34186E-1	-9.19471E0	-9.18901E0	5.17368E-3	9.33647E-2	2.73069E1	-3.26669E1	-3.2617E1	2.6786E1	1.19239E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.02253E-1