[Scan]
initial_time=2015-12-18T21:23:40
final_time=2015-12-18T21:24:04
ip_count=19
run=1020
dataset=4
scan=248
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-7.55262E-1
ql1_imon=1.37342E-8
ql2_vset=
ql2_vmon=-7.34019E-1
ql2_imon=1.99268E-9
ql3_vset=
ql3_vmon=-9.19516E0
ql3_imon=2.53904E-10
ql4_vset=
ql4_vmon=-9.18908E0
ql4_imon=6.58512E-11
mult1=-8.86143E-9
mult2=-2.48307E-9
rf_tmon=-5.53984E-3
rf_agc=3.18495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=1.6825E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69158E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=3.18921E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02337E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0523E1
cs_ea1_imon=1.06273E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39557E0
lens1_imon=2.98214E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.39402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.02883E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.39445E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.35673E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.30353E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=1.95341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.39614E-8
tplens_vset=1.4E-1
tplens_vmon=1.58421E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03004E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.02402E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22968E0
ionrepsh_imon=8.61688E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56416E0
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00301E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71594E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.15309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.45806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.32654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.06662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67804E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.36962E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=8.13016E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92717E3
multa_neg_imon=6.7233E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93792E3
defgrida_imon=6.80117E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.98522E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.13684E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.44402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65877E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31858E1
cs_fil1_imon=7.53326E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.99597E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59873E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22625E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62005E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-7.55095E-1	-7.33852E-1	-9.19452E0	-9.18903E0	5.55515E-3	9.377E-2	2.72817E1	-3.26861E1	-3.26386E1	2.67968E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02133E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-7.55024E-1	-7.34019E-1	-9.19464E0	-9.18925E0	5.62668E-3	9.38177E-2	2.73508E1	-3.26488E1	-3.26338E1	2.68478E1	1.19239E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-7.55095E-1	-7.3359E-1	-9.19459E0	-9.18925E0	5.45979E-3	9.39131E-2	2.73075E1	-3.26512E1	-3.26554E1	2.67848E1	1.19184E-7	2.51581E-3	2.51581E-3	6.28511E-3	3.03081E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-7.55262E-1	-7.34043E-1	-9.19459E0	-9.18911E0	5.31673E-3	9.37462E-2	2.72939E1	-3.26461E1	-3.26343E1	2.66773E1	1.19239E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-7.55286E-1	-7.33948E-1	-9.19492E0	-9.18925E0	5.19753E-3	9.39608E-2	2.73405E1	-3.26609E1	-3.2623E1	2.67996E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-7.5531E-1	-7.33972E-1	-9.19471E0	-9.18922E0	5.17368E-3	9.3627E-2	2.72841E1	-3.26585E1	-3.26428E1	2.68896E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.97187E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09673E0	-7.55477E-1	-7.33948E-1	-9.19473E0	-9.18918E0	5.57899E-3	9.33886E-2	2.73219E1	-3.26777E1	-3.26032E1	2.67157E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-7.55477E-1	-7.34615E-1	-9.1948E0	-9.1893E0	5.31673E-3	9.35793E-2	2.73123E1	-3.26639E1	-3.2632E1	2.6804E1	1.19238E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.5562E-1	-7.34425E-1	-9.19492E0	-9.18944E0	5.126E-3	9.39131E-2	2.73111E1	-3.26314E1	-3.2647E1	2.68262E1	1.19186E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.5531E-1	-7.34067E-1	-9.19423E0	-9.18939E0	5.126E-3	9.36031E-2	2.737E1	-3.26705E1	-3.26296E1	2.68487E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00041E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.55119E-1	-7.33924E-1	-9.19428E0	-9.18953E0	5.31673E-3	9.36985E-2	2.73183E1	-3.26248E1	-3.262E1	2.68088E1	1.1929E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.55191E-1	-7.34091E-1	-9.19464E0	-9.18922E0	5.38826E-3	9.37462E-2	2.72865E1	-3.26735E1	-3.26218E1	2.67571E1	1.1929E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.03804E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.55072E-1	-7.34258E-1	-9.19471E0	-9.1893E0	5.34058E-3	9.35555E-2	2.72883E1	-3.26675E1	-3.2629E1	2.68232E1	1.19238E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-7.54881E-1	-7.33972E-1	-9.19476E0	-9.18939E0	5.17368E-3	9.36508E-2	2.72974E1	-3.26508E1	-3.26419E1	2.68412E1	1.19238E-7	2.50354E-3	2.50354E-3	6.32936E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.54929E-1	-7.34138E-1	-9.19483E0	-9.1892E0	5.53131E-3	9.34362E-2	2.72925E1	-3.26813E1	-3.26416E1	2.67595E1	1.19239E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.9943E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.55215E-1	-7.33948E-1	-9.1948E0	-9.18922E0	5.48363E-3	9.35316E-2	2.73003E1	-3.26669E1	-3.26434E1	2.68737E1	1.1929E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.00676E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-7.55286E-1	-7.33972E-1	-9.19478E0	-9.18939E0	5.62668E-3	9.36031E-2	2.73129E1	-3.26536E1	-3.26038E1	2.68256E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.55429E-1	-7.34234E-1	-9.1949E0	-9.18956E0	5.36442E-3	9.32932E-2	2.72555E1	-3.26349E1	-3.26437E1	2.67728E1	1.19135E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-7.55262E-1	-7.34305E-1	-9.19495E0	-9.18925E0	5.26905E-3	9.377E-2	2.73243E1	-3.26681E1	-3.2632E1	2.68611E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98222E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-7.55262E-1	-7.34019E-1	-9.19516E0	-9.18908E0	5.45979E-3	9.34601E-2	2.72895E1	-3.26567E1	-3.26056E1	2.67804E1	1.1929E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00824E-1