[Scan]
initial_time=2015-12-18T21:24:12
final_time=2015-12-18T21:24:35
ip_count=19
run=1020
dataset=4
scan=249
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-7.55286E-1
ql1_imon=1.37205E-8
ql2_vset=
ql2_vmon=-7.34258E-1
ql2_imon=1.98381E-9
ql3_vset=
ql3_vmon=-9.19423E0
ql3_imon=2.7442E-10
ql4_vset=
ql4_vmon=-9.1893E0
ql4_imon=4.65393E-11
mult1=-9.66815E-9
mult2=-2.81642E-9
rf_tmon=-4.83687E-3
rf_agc=3.30692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.6209E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.18777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04662E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=1.08291E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.52333E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.39186E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.04072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.3958E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.29094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.32843E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01629E1
cs_anode1_imon=1.9462E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.39148E-8
tplens_vset=1.4E-1
tplens_vmon=1.60358E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26543E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.58869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.09765E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=8.34173E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.20766E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56753E0
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.39966E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.44112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.0918E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.13194E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.32825E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=8.12127E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-9.68887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86777E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=8.44627E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.36261E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.44877E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65947E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=7.98375E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.34125E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67597E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59219E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.19186E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.55398E-1
res40_imon=-2.2519E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-7.55715E-1	-7.34186E-1	-9.19452E0	-9.18896E0	5.74589E-3	9.34839E-2	2.73063E1	-3.2617E1	-3.26476E1	2.68382E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.55477E-1	-7.34186E-1	-9.1944E0	-9.18937E0	5.72205E-3	9.34124E-2	2.7312E1	-3.26364E1	-3.25924E1	2.677E1	1.19238E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.55429E-1	-7.34091E-1	-9.19445E0	-9.18913E0	5.53131E-3	9.35078E-2	2.72932E1	-3.26429E1	-3.26366E1	2.67907E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.03027E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.55191E-1	-7.34186E-1	-9.19483E0	-9.18922E0	5.45979E-3	9.34124E-2	2.72992E1	-3.26478E1	-3.26313E1	2.68534E1	1.19237E-7	2.51248E-3	2.51248E-3	6.27954E-3	3.02277E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-7.54929E-1	-7.34043E-1	-9.19461E0	-9.1892E0	5.72205E-3	9.34362E-2	2.72877E1	-3.26301E1	-3.26215E1	2.68017E1	1.19239E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.55215E-1	-7.34234E-1	-9.19473E0	-9.18899E0	5.48363E-3	9.33409E-2	2.73315E1	-3.26687E1	-3.26326E1	2.68262E1	1.19255E-7	2.51645E-3	2.51645E-3	6.32222E-3	3.00726E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-7.55215E-1	-7.34067E-1	-9.19478E0	-9.18927E0	5.48363E-3	9.33409E-2	2.72986E1	-3.2649E1	-3.26354E1	2.68418E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-7.55024E-1	-7.33924E-1	-9.19473E0	-9.18899E0	5.48363E-3	9.33647E-2	2.72901E1	-3.26332E1	-3.2644E1	2.6768E1	1.1929E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-7.55095E-1	-7.34115E-1	-9.19449E0	-9.18915E0	5.60284E-3	9.31978E-2	2.72889E1	-3.26458E1	-3.26434E1	2.68142E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.55167E-1	-7.33876E-1	-9.19449E0	-9.18906E0	5.38826E-3	9.33409E-2	2.72817E1	-3.26585E1	-3.26807E1	2.68226E1	1.1929E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.55286E-1	-7.33995E-1	-9.19437E0	-9.18941E0	5.38826E-3	9.35555E-2	2.72774E1	-3.26502E1	-3.26343E1	2.68082E1	1.19239E-7	2.51793E-3	2.51793E-3	6.33977E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.55262E-1	-7.34448E-1	-9.19445E0	-9.18925E0	5.38826E-3	9.34124E-2	2.7321E1	-3.27062E1	-3.26168E1	2.67677E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-7.55286E-1	-7.34425E-1	-9.19456E0	-9.18925E0	5.14984E-3	9.36508E-2	2.73028E1	-3.26388E1	-3.26486E1	2.68621E1	1.1929E-7	2.52473E-3	2.52473E-3	6.34099E-3	3.00942E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-7.55215E-1	-7.34138E-1	-9.19452E0	-9.18925E0	5.26905E-3	9.35316E-2	2.73496E1	-3.26999E1	-3.26038E1	2.6783E1	1.1929E-7	2.51287E-3	2.51287E-3	6.32858E-3	2.99845E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-7.55405E-1	-7.34043E-1	-9.19445E0	-9.18918E0	5.34058E-3	9.35793E-2	2.72787E1	-3.26146E1	-3.2641E1	2.67866E1	1.19238E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.5531E-1	-7.34115E-1	-9.19447E0	-9.18918E0	5.43594E-3	9.37223E-2	2.73225E1	-3.26561E1	-3.26308E1	2.6804E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.55382E-1	-7.34115E-1	-9.19437E0	-9.18922E0	5.62668E-3	9.38892E-2	2.7257E1	-3.26663E1	-3.26182E1	2.68184E1	1.19186E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.55525E-1	-7.34425E-1	-9.19466E0	-9.18949E0	5.53131E-3	9.37462E-2	2.72727E1	-3.26626E1	-3.25977E1	2.67781E1	1.19238E-7	2.51225E-3	2.51225E-3	6.3514E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-7.55286E-1	-7.3421E-1	-9.19411E0	-9.18961E0	5.38826E-3	9.34124E-2	2.72847E1	-3.26723E1	-3.26104E1	2.68857E1	1.1929E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-7.55286E-1	-7.34258E-1	-9.19423E0	-9.1893E0	5.43594E-3	9.33647E-2	2.72889E1	-3.26681E1	-3.26543E1	2.68088E1	1.19186E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02922E-1