[Scan]
initial_time=2015-12-18T21:24:43
final_time=2015-12-18T21:25:05
ip_count=19
run=1020
dataset=4
scan=250
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-7.55286E-1
ql1_imon=1.37024E-8
ql2_vset=
ql2_vmon=-7.33757E-1
ql2_imon=1.95639E-9
ql3_vset=
ql3_vmon=-9.19454E0
ql3_imon=2.2943E-10
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=3.41773E-11
mult1=-9.44191E-9
mult2=-2.7434E-9
rf_tmon=-4.21359E-3
rf_agc=3.31318E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.66388E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.84057E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.17948E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=1.09193E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42183E0
lens1_imon=2.52694E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.38681E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=3.03027E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.39051E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14915E1
os_ea1_imon=2.35438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=9.39437E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.39514E-8
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26363E1
iondef3_imon=1.48847E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.99293E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=8.23718E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.56573E0
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10441E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.3947E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=3.44833E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73148E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67853E1
iondef4_imon=1.109E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.30739E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=8.11603E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.02295E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.55945E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=5.93362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33285E1
os_fil1_imon=9.44667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07834E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65717E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31827E1
cs_fil1_imon=7.59332E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0026E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67346E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84225E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10949E-1
res40_imon=-2.29875E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-7.55048E-1	-7.3421E-1	-9.19433E0	-9.1893E0	5.6982E-3	9.35316E-2	2.72965E1	-3.26768E1	-3.26125E1	2.67962E1	1.19237E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.01475E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-7.55095E-1	-7.34591E-1	-9.19473E0	-9.1892E0	5.88894E-3	9.35793E-2	2.73069E1	-3.26747E1	-3.26026E1	2.67583E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-7.54952E-1	-7.34186E-1	-9.19447E0	-9.18927E0	5.43594E-3	9.39131E-2	2.73039E1	-3.2677E1	-3.2615E1	2.68238E1	1.1929E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.03449E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-7.54619E-1	-7.34162E-1	-9.19499E0	-9.18927E0	5.36442E-3	9.36747E-2	2.72898E1	-3.26425E1	-3.26884E1	2.67716E1	1.1924E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.55143E-1	-7.34138E-1	-9.19476E0	-9.18903E0	5.31673E-3	9.38654E-2	2.73157E1	-3.26337E1	-3.26531E1	2.67656E1	1.19237E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.54905E-1	-7.34472E-1	-9.19464E0	-9.18906E0	5.43594E-3	9.39846E-2	2.73153E1	-3.26488E1	-3.2644E1	2.68334E1	1.19239E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.54619E-1	-7.34448E-1	-9.19464E0	-9.18925E0	5.38826E-3	9.3627E-2	2.72775E1	-3.27239E1	-3.25984E1	2.67553E1	1.1929E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.54642E-1	-7.34377E-1	-9.1948E0	-9.18887E0	5.50747E-3	9.35793E-2	2.72939E1	-3.26585E1	-3.26514E1	2.68683E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-7.54929E-1	-7.34234E-1	-9.19466E0	-9.18901E0	5.4121E-3	9.36985E-2	2.72684E1	-3.26639E1	-3.26212E1	2.68314E1	1.1929E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-7.55119E-1	-7.33995E-1	-9.19476E0	-9.18922E0	5.50747E-3	9.36985E-2	2.72913E1	-3.26717E1	-3.26651E1	2.68563E1	1.19239E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-7.55191E-1	-7.33972E-1	-9.19445E0	-9.18911E0	5.43594E-3	9.35316E-2	2.73255E1	-3.26512E1	-3.25996E1	2.68304E1	1.1929E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-7.55143E-1	-7.33852E-1	-9.19435E0	-9.18922E0	5.07832E-3	9.35078E-2	2.73057E1	-3.26885E1	-3.25912E1	2.67645E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.55048E-1	-7.34019E-1	-9.19504E0	-9.18891E0	5.43594E-3	9.36031E-2	2.73381E1	-3.26753E1	-3.26278E1	2.6789E1	1.19186E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.55072E-1	-7.34329E-1	-9.19507E0	-9.18915E0	5.29289E-3	9.3627E-2	2.73357E1	-3.26476E1	-3.26536E1	2.67538E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.55167E-1	-7.34162E-1	-9.19499E0	-9.18908E0	5.29289E-3	9.37462E-2	2.72774E1	-3.26938E1	-3.26549E1	2.67782E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-7.55382E-1	-7.34162E-1	-9.19473E0	-9.18877E0	5.24521E-3	9.36031E-2	2.72585E1	-3.26502E1	-3.2685E1	2.68638E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-7.55501E-1	-7.339E-1	-9.1949E0	-9.18899E0	5.62668E-3	9.377E-2	2.73237E1	-3.26693E1	-3.2623E1	2.68316E1	1.19188E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-7.55262E-1	-7.33709E-1	-9.19447E0	-9.18887E0	5.50747E-3	9.35316E-2	2.73163E1	-3.26685E1	-3.25918E1	2.68124E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02922E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-7.54976E-1	-7.33757E-1	-9.19456E0	-9.18927E0	5.45979E-3	9.36508E-2	2.73027E1	-3.26831E1	-3.26579E1	2.67571E1	1.1929E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.55286E-1	-7.33757E-1	-9.19454E0	-9.18941E0	5.53131E-3	9.3627E-2	2.73148E1	-3.26681E1	-3.26363E1	2.67853E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1