[Scan]
initial_time=2015-12-18T21:25:44
final_time=2015-12-18T21:26:07
ip_count=19
run=1020
dataset=4
scan=252
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08876E-4
ql1_vset=
ql1_vmon=-7.55405E-1
ql1_imon=1.37591E-8
ql2_vset=
ql2_vmon=-7.34067E-1
ql2_imon=2.01374E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=2.15733E-10
ql4_vset=
ql4_vmon=-9.18927E0
ql4_imon=-1.15633E-12
mult1=-8.7049E-9
mult2=-2.66072E-9
rf_tmon=-5.69004E-3
rf_agc=3.16392E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=1.63436E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69054E0
bslens_imon=2.59081E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.97877E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.0495E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52547E1
cs_ef1b_imon=3.16722E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04719E1
cs_ea1_imon=1.0855E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41419E0
lens1_imon=2.63121E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03892E1
cs_ea2_imon=1.38521E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.05082E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.36348E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11544E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15122E1
os_ea1_imon=2.37655E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63569E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23985E0
cs_ionrep_imon=9.3454E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93486E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=3.36369E-8
tplens_vset=1.4E-1
tplens_vmon=1.60532E0
tplens_imon=-3.91646E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.50128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.57217E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.985E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.00019E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24475E0
ionrepsh_imon=8.55938E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.17343E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54226E0
os_ea2_imon=-5.49584E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00542E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70885E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.31662E-1
os_ef2bup_imon=-5.0702E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11051E1
os_restr2_imon=3.45122E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30149E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72871E1
iondef1_imon=1.09285E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.25316E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=8.00754E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15417E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.58605E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.82942E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31775E0
defgridb_imon=6.24909E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.43681E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07071E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64957E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31816E1
cs_fil1_imon=6.89055E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0026E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68037E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12116E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56675E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=3.00144E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.74018E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-7.55191E-1	-7.34019E-1	-9.19471E0	-9.18927E0	5.19753E-3	9.36747E-2	2.7376E1	-3.26885E1	-3.26008E1	2.68563E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99083E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09727E0	-7.55E-1	-7.34234E-1	-9.19483E0	-9.18922E0	5.38826E-3	9.3627E-2	2.73261E1	-3.2736E1	-3.2584E1	2.67788E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09673E0	-7.54809E-1	-7.34329E-1	-9.19468E0	-9.1893E0	5.34058E-3	9.36985E-2	2.73175E1	-3.2675E1	-3.26325E1	2.68322E1	1.1929E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00824E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09673E0	-7.55048E-1	-7.34162E-1	-9.1949E0	-9.18915E0	5.48363E-3	9.36508E-2	2.73134E1	-3.26708E1	-3.26313E1	2.68364E1	1.1929E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-7.55E-1	-7.34234E-1	-9.19485E0	-9.1893E0	5.43594E-3	9.377E-2	2.73129E1	-3.26543E1	-3.26092E1	2.68011E1	1.19239E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-7.55334E-1	-7.33924E-1	-9.19478E0	-9.18913E0	5.60284E-3	9.33886E-2	2.73021E1	-3.26735E1	-3.2626E1	2.681E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-7.55024E-1	-7.34138E-1	-9.19459E0	-9.1892E0	5.67436E-3	9.36747E-2	2.73123E1	-3.26915E1	-3.2587E1	2.68226E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-7.55072E-1	-7.34043E-1	-9.1949E0	-9.1893E0	5.43594E-3	9.35078E-2	2.73039E1	-3.26254E1	-3.2638E1	2.6792E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.55143E-1	-7.34234E-1	-9.19468E0	-9.18913E0	5.53131E-3	9.38177E-2	2.73405E1	-3.26461E1	-3.26337E1	2.68178E1	1.19238E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.55024E-1	-7.3421E-1	-9.19511E0	-9.18932E0	5.43594E-3	9.34601E-2	2.72931E1	-3.26621E1	-3.26681E1	2.67842E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-7.54857E-1	-7.34162E-1	-9.1948E0	-9.18932E0	5.38826E-3	9.3627E-2	2.73069E1	-3.26603E1	-3.26104E1	2.6822E1	1.19238E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.54929E-1	-7.34401E-1	-9.19507E0	-9.18913E0	5.4121E-3	9.36031E-2	2.73045E1	-3.26591E1	-3.26134E1	2.67914E1	1.1929E-7	2.5199E-3	2.5199E-3	6.35692E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-7.55191E-1	-7.34425E-1	-9.19487E0	-9.18934E0	5.36442E-3	9.37462E-2	2.72745E1	-3.26567E1	-3.2626E1	2.67559E1	1.1929E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-7.55167E-1	-7.34091E-1	-9.19504E0	-9.18932E0	5.57899E-3	9.37223E-2	2.73213E1	-3.26717E1	-3.26188E1	2.68466E1	1.19186E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9874E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-7.55215E-1	-7.34091E-1	-9.19497E0	-9.18951E0	5.29289E-3	9.35555E-2	2.72903E1	-3.26685E1	-3.26449E1	2.68358E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97445E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-7.55095E-1	-7.339E-1	-9.19468E0	-9.18913E0	5.57899E-3	9.37223E-2	2.73027E1	-3.26633E1	-3.2635E1	2.67427E1	1.19239E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00453E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.55024E-1	-7.34043E-1	-9.19454E0	-9.18937E0	5.03063E-3	9.36031E-2	2.73279E1	-3.26518E1	-3.2605E1	2.67873E1	1.19186E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-7.55143E-1	-7.34115E-1	-9.19478E0	-9.1892E0	5.07832E-3	9.3627E-2	2.73334E1	-3.26797E1	-3.25641E1	2.6783E1	1.19186E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-7.55191E-1	-7.34115E-1	-9.19473E0	-9.18915E0	4.95911E-3	9.35555E-2	2.73492E1	-3.26413E1	-3.2664E1	2.68995E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-7.55405E-1	-7.34067E-1	-9.19471E0	-9.18927E0	5.53131E-3	9.3317E-2	2.72871E1	-3.26741E1	-3.26062E1	2.681E1	1.1929E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.00144E-1