[Scan]
initial_time=2015-12-18T21:26:46
final_time=2015-12-18T21:27:08
ip_count=19
run=1020
dataset=4
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.9
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-7.54881E-1
ql1_imon=1.37315E-8
ql2_vset=
ql2_vmon=-7.34162E-1
ql2_imon=1.95566E-9
ql3_vset=
ql3_vmon=-9.19456E0
ql3_imon=1.96564E-10
ql4_vset=
ql4_vmon=-9.18925E0
ql4_imon=1.14322E-11
mult1=-1.04812E-8
mult2=-2.80531E-9
rf_tmon=-3.14424E-3
rf_agc=3.462E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.67066E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.96613E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.1838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=1.08183E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42423E0
lens1_imon=2.52333E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03456E1
cs_ea2_imon=1.40916E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.05082E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.39385E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.28734E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.34825E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=9.1925E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.39245E-8
tplens_vset=1.4E-1
tplens_vmon=1.60779E0
tplens_imon=-4.33943E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26058E1
iondef3_imon=1.47081E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26842E1
iondef2_imon=1.59914E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98735E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.98436E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=8.47511E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57594E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10622E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26856E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.44761E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73082E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68119E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.27065E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=8.10371E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-8.96807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93762E3
defgrida_imon=7.1557E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.44084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07437E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65745E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31795E1
cs_fil1_imon=7.55728E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6775E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61675E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33863E-3
inlet_lpb_pmon=3.02479E-1
chamber_ion_pmon=1.19241E-7
chamber_cvt_pmon=2.51679E-3
foreline_cvt_pmon=2.51679E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.40962E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.55024E-1	-7.34282E-1	-9.19514E0	-9.18908E0	5.38826E-3	9.34839E-2	2.7298E1	-3.26703E1	-3.26231E1	2.68337E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.54738E-1	-7.34353E-1	-9.19511E0	-9.18922E0	5.48363E-3	9.34839E-2	2.73213E1	-3.26678E1	-3.26129E1	2.67371E1	1.19239E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.54833E-1	-7.3421E-1	-9.19511E0	-9.18925E0	5.4121E-3	9.3317E-2	2.73175E1	-3.26632E1	-3.26396E1	2.68941E1	1.19236E-7	2.51498E-3	2.51498E-3	6.29035E-3	2.98361E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-7.55239E-1	-7.34401E-1	-9.19478E0	-9.18896E0	5.22137E-3	9.37223E-2	2.72973E1	-3.26783E1	-3.26296E1	2.67559E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-7.55262E-1	-7.34615E-1	-9.19478E0	-9.18939E0	5.50747E-3	9.37939E-2	2.72955E1	-3.26633E1	-3.2623E1	2.67415E1	1.1929E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-7.55358E-1	-7.34711E-1	-9.19497E0	-9.18913E0	5.43594E-3	9.37223E-2	2.73104E1	-3.26596E1	-3.26095E1	2.6786E1	1.1929E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-7.5531E-1	-7.34496E-1	-9.19502E0	-9.18949E0	5.72205E-3	9.36031E-2	2.72947E1	-3.26364E1	-3.25942E1	2.68214E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-7.55215E-1	-7.34138E-1	-9.19485E0	-9.18927E0	5.43594E-3	9.36031E-2	2.73045E1	-3.26543E1	-3.26158E1	2.67884E1	1.19237E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.54976E-1	-7.34115E-1	-9.19507E0	-9.18939E0	5.14984E-3	9.33886E-2	2.73195E1	-3.26639E1	-3.26452E1	2.67842E1	1.19238E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-7.54857E-1	-7.34353E-1	-9.19478E0	-9.1892E0	5.34058E-3	9.32932E-2	2.73287E1	-3.26679E1	-3.25995E1	2.68012E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-7.54905E-1	-7.34472E-1	-9.19468E0	-9.18939E0	5.26905E-3	9.377E-2	2.73327E1	-3.26825E1	-3.26212E1	2.68761E1	1.19238E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.54881E-1	-7.34687E-1	-9.19459E0	-9.18918E0	5.29289E-3	9.36031E-2	2.73275E1	-3.26543E1	-3.26378E1	2.67854E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-7.55239E-1	-7.3452E-1	-9.1948E0	-9.18911E0	5.22137E-3	9.36031E-2	2.73118E1	-3.26725E1	-3.25985E1	2.6825E1	1.19188E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-7.55119E-1	-7.34496E-1	-9.19495E0	-9.18934E0	5.14984E-3	9.36747E-2	2.73234E1	-3.26585E1	-3.26166E1	2.68292E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.98481E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.55286E-1	-7.34353E-1	-9.19476E0	-9.18927E0	5.14984E-3	9.36031E-2	2.73141E1	-3.26645E1	-3.26422E1	2.67475E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.55191E-1	-7.34472E-1	-9.19461E0	-9.18934E0	5.60284E-3	9.35555E-2	2.72745E1	-3.26842E1	-3.26548E1	2.68106E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.55286E-1	-7.34568E-1	-9.19485E0	-9.18941E0	5.22137E-3	9.36985E-2	2.73198E1	-3.26419E1	-3.2629E1	2.68737E1	1.1929E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.55262E-1	-7.34448E-1	-9.19464E0	-9.18911E0	5.17368E-3	9.34124E-2	2.72865E1	-3.26621E1	-3.26122E1	2.68088E1	1.19238E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.55072E-1	-7.34258E-1	-9.1944E0	-9.18941E0	5.17368E-3	9.35555E-2	2.73353E1	-3.26886E1	-3.26425E1	2.67724E1	1.19239E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.54881E-1	-7.34162E-1	-9.19456E0	-9.18925E0	5.43594E-3	9.35316E-2	2.73082E1	-3.26842E1	-3.26058E1	2.68119E1	1.19241E-7	2.51679E-3	2.51679E-3	6.33863E-3	3.02479E-1